Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process

2010 ◽  
Vol 663-665 ◽  
pp. 999-1003
Author(s):  
Yi Gui Li ◽  
Jian Sun ◽  
Jing Quan Liu ◽  
Chun Sheng Yang ◽  
Dan Nong He ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Piezoelectric Sensor ◽  
Lead Zirconate ◽  
Pzt Ceramics ◽  
Eutectic Bonding ◽  
Energy Harvesters ◽  
Silicon Cantilever ◽  
Piezoelectric Layers ◽  
Device Applications

Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zirconate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper, PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing process.The properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed.

Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding

2011 ◽  
Vol 28 (6) ◽  
pp. 068103 ◽  
Author(s):  
Yi-Gui Li ◽  
Jian Sun ◽  
Chun-Sheng Yang ◽  
Jing-Quan Liu ◽  
Susumu Sugiyama ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Eutectic Bonding ◽  
Zirconate Titanate ◽  
Fabrication And Characterization

PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

2013 ◽  
Vol 300-301 ◽  
pp. 912-915
Author(s):  
Yusuke Uchida ◽  
Satoshi Iizumi ◽  
Syungo Tomioka ◽  
Kyohei Tsujimoto ◽  
Kazuki Tomii ◽  
...  
Keyword(s):  
Power Generation ◽  
Lead Zirconate Titanate ◽  
Sound Pressure Level ◽  
Sound Pressure ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Pressure Level ◽  
Acoustic Energy ◽  
Microelectromechanical System ◽  
Energy Harvesters

This paper presents the power generation performances of an array of three microelectromechanical system (MEMS) acoustic energy harvesters equiped with lead–zirconate–titanate (PZT) capacitors. The PZT acoustic energy harvesters had a diaphragm with a　diameter of 2 mm consisting of Al (0.1 μm) / PZT (1 μm) / Pt (0.1 μm) / Ti (0.1 μm) / SiO2 (1.5 μm), and the diaphragm vibrations were excited by sound pressure. The arrayed peripheral energy harvester generated a maximum power of 2.26 × 10-10 W at a sound pressure level (SPL) of 100 dB at 5 kHz. The output power of three arraying devices was about 3 times larger than that of the single devices.

PZT Piezoelectric Energy Harvester Enhancement Using Slotted Aluminium Beam

2014 ◽  
Vol 1051 ◽  
pp. 932-936
Author(s):  
Mun Heng Lam ◽  
Hanim Salleh
Keyword(s):  
Energy Source ◽  
Renewable Energy Source ◽  
Lead Zirconate Titanate ◽  
Output Voltage ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
External Beam ◽  
Energy Harvesters ◽  
Piezoelectric Energy ◽  
Wide Range

This paper presents work on improving piezoelectric energy harvesters. Harvesting energy from vibrations has received massive attention due to it being a renewable energy source that has a wide range of applications. Over the years of development, there is always research to further improve and optimise piezoelectric energy harvesters. For this paper, the piezoelectric specimen is made of PZT (Lead Zirconate Titanate), brass reinforced and has 31.8mm length, 12.7mm width and 0.511mm thick. An external beam is implemented to provide deflection amplification which in turn increases the output of the energy harvester. Depending on the configuration of the external beam, it can amplify output voltage from 100% to 300%.

Photonically Sintered PZT Energy Harvester

2015 ◽  
Author(s):  
Jing Ouyang ◽  
Anirudh R. Penmetcha ◽  
Denis Cormier ◽  
David A. Borkholder
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Flexible Substrate ◽  
Lead Zirconate ◽  
Energy Harvesters ◽  
Pzt Film ◽  
Silver Electrodes ◽  
Resistive Loads ◽  
First Time ◽  
Photonic Sintering

This paper reports an Aerosol-Jet printed micro scale Lead Zirconate Titanate (PZT) energy harvester directly sintered on a low melting point substrate in less than 1 msec using photonic sintering technology. To improve the output signal, d33 piezoelectric mode was employed by patterning silver electrodes as an interdigitated structure on top of a PZT film. The size of the device is 15.5 mm × 13.5 mm × 0.2 mm. Up to 2.4 V was measured at 145 MPa tensile bending stress level in the device after poling at 180 °C for 2 hours with an electric field of 30 kV/cm. Using an oscillating stress (∼2.5 Hz) of approximately 145 MPa, the power as a function of load was determined by connecting the device with various series resistive loads. A maximal power of 0.1 μW was generated when driving into a 10 MΩ load. A PZT energy harvester, for the first time, is demonstrated which has been directly printed and sintered on a low melting temperature flexible substrate without a film transfer processes. This not only dramatically simplifies the fabrication process, but expands the possible substrate materials for PZT energy harvesters.

A human heartbeat frequencies based 2-DOF piezoelectric energy harvester for pacemaker application

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Hygin Davidson Mayekol Mayck ◽  
Ahmed Mohamed Rashad Fath El-Bab ◽  
Evan Murimi ◽  
Pierre Moukala Mpele
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Low Frequency ◽  
Life Time ◽  
Lead Zirconate ◽  
Secondary Beam ◽  
Average Output ◽  
Energy Harvesters ◽  
Piezoelectric Energy ◽  
Self Powered

Abstract In the last decade, piezoelectric energy harvesters have received a significant attention from the scientific community. This comes along with the need of developing self-powered devices such as medical implant to reduce the cost and risk of surgery. This paper investigates a two degree of freedom (2-DOF) piezoelectric energy harvester device to be integrated into a pacemaker. The 2-DOF is designed as a cut-out beam with a secondary beam cut into a primary one. The system is developed to operate in the frequency range of 0–2 Hz, with an acceleration of 1 g (9.8 m/s2) to match the heartbeat frequencies (1–1.67 Hz). The system uses a Lead Zirconate Titanate (PZT) and a Poly Methyl Methacrylate (PMMA) as lead beam to compensate the brittleness of PZT. COMSOL Multiphysics software is used to model and analyze the resonant frequencies of the system, and the stress in the piezoelectric beam. The proposed device has a compact volume of 26 × 11.58 × 0.41 mm, which can fit perfectly in a pacemaker whose battery volume has been reduced by 50%. The output voltage and power are determined through analytical calculus using Matlab. Typical pacemakers require 1 μW to operate. Thus, with a peak power of 30.97 μW at 1.5 Hz and an average output power of 11.05 μW observed from 0.9 to 1.7 Hz, the harvester can power a pacemaker. It is assumed that the energy harvester could extend its life time for 5–10 more years. Furthermore, the harvester operates at extremely low frequency and produces reasonable power, making it suitable for biomedical devices.

Convergent-bceam diffraction studies on lead zirconate titanate Ceramics

1986 ◽  
Vol 44 ◽  
pp. 482-483
Author(s):  
M.L.A. Dass ◽  
T.A. Bielicki ◽  
G. Thomas ◽  
T. Yamamoto ◽  
K. Okazaki
Keyword(s):  
Lead Zirconate Titanate ◽  
Direct Proof ◽  
Lead Zirconate ◽  
Subsolidus Phase ◽  
Pzt Ceramics ◽  
Subsolidus Phase Diagram ◽  
Zirconate Titanate ◽  
Two Phases ◽  
Cbd Method ◽  
Titanate Ceramics

Lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), ceramics are ferroelectrics formed as solid solutions between ferroelectric PbTiO3 and ant iferroelectric PbZrO3. The subsolidus phase diagram is shown in figure 1. PZT transforms between the Ti-rich tetragonal (T) and the Zr-rich rhombohedral (R) phases at a composition which is nearly independent of temperature. This phenomenon is called morphotropism, and the boundary between the two phases is known as the morphotropic phase boundary (MPB). The excellent piezoelectric and dielectric properties occurring at this composition are believed to.be due to the coexistence of T and R phases, which results in easy poling (i.e. orientation of individual grain polarizations in the direction of an applied electric field). However, there is little direct proof of the coexistence of the two phases at the MPB, possibly because of the difficulty of distinguishing between them. In this investigation a CBD method was found which would successfully differentiate between the phases, and this was applied to confirm the coexistence of the two phases.

scholarly journals Correction: Microstructure and Properties of Plasma Sprayed Lead Zirconate Titanate (PZT) Ceramics. Coatings 2012, 2, 64-75

Coatings ◽  
2012 ◽  
Vol 2 (2) ◽  
pp. 94-94
Author(s):  
Pavel Ctibor ◽  
Zdenek Pala ◽  
Hanna Boldyryeva ◽  
Josef Sedláček ◽  
Viliam Kmetík
Keyword(s):  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Pzt Ceramics ◽  
Microstructure And Properties ◽  
Zirconate Titanate ◽  
Plasma Sprayed

Pb(Zr0.52Ti0.48)O3 Ceramics Synthesized Using Planetary Ball Mill

2012 ◽  
Vol 620 ◽  
pp. 486-490
Author(s):  
Shafiza Afzan Sharif ◽  
Julie Juliewatty Mohamed ◽  
W.A.W. Yusoff
Keyword(s):  
Lead Zirconate Titanate ◽  
Ball Mill ◽  
Single Phase ◽  
Perovskite Phase ◽  
Xrd Analysis ◽  
Lead Zirconate ◽  
Planetary Ball Mill ◽  
X Ray Diffraction ◽  
Sem Images ◽  
Pzt Ceramics

Lead zirconate titanate Pb (Zr0.52Ti0.48)O3, (PZT) ceramic was successfully prepared from the mixture of commercial PbO, TiO2and ZrO2powders using planetary ball mill at room temperature. The phase formation and microstructure of the milled powders were characterized using X-ray diffraction (XRD) and Scanning Electron Microscope (SEM). XRD results indicated that the perovskite phase of PZT was formed from the mixture of starting materials after milling for 40 h. The grain sizes of the powders have been estimated from the SEM images to be ~200 nm. The compacted PZT samples were then sintered at 950 °C for 1 h. The samples were characterized by XRD and SEM, meanwhile the density was measured by Archimedes principle. XRD analysis on the sintered samples revealed the formation of single phase Pb (Zr0.52Ti0.48)O3ceramics while the SEM images estimated the grain size to be ~2 µm. The relative density of the obtained sintered PZT ceramics was measured to be approximately 99.93 % of the theoretical density. The results hence indicate that planetary ball mill is an effective preparatory technique to improve the sinterability of PZT ceramics.

Study on the Piezoelectric Behavior and Structural Changes of Strontium Doped PZT Ceramics

2016 ◽  
Vol 869 ◽  
pp. 13-18
Author(s):  
Margarete Soares da Silva ◽  
Lucas L. Silva ◽  
Eliane F. Souza ◽  
Elson Longo ◽  
Maria A. Zaghete ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Room Temperature ◽  
Structural Changes ◽  
Piezoelectric Properties ◽  
Lead Zirconate ◽  
Strontium Content ◽  
Pzt Ceramics ◽  
Ceramic Samples ◽  
Piezoelectric Behavior ◽  
Piezoelectric Devices

Some piezoelectric properties of lead zirconate titanate PbZr0.53Ti0.47O3 ceramic samples sintered at 1100oC for 3 hours has been investigated in this work and compared to the strontium modification at 0.2, 0.4, and 0.6 mol%. Polarization versus Electric Field curve and d33 and Kp piezoelectric parameters was taken at room temperature in order to investigate the correlation with phase amount and lattice parameters of crystalline phases calculated through Rietveld refinement. The results indicated the lead substitution with 0.4 mol% of strontium enhances the d33 and Kp piezoelectric parameters, but there is no systematic variation of the piezoelectric properties with strontium content. By the other hand, tetragonal phase seems plays an important rule on piezoelectric devices operating near the room temperature and some correlations could be found.

Design and experimental study of rotary-type energy harvester

2020 ◽  
Vol 31 (13) ◽  
pp. 1594-1603
Author(s):  
Tejkaran Narolia ◽  
Vijay K Gupta ◽  
IA Parinov
Keyword(s):  
Finite Element ◽  
Lead Zirconate Titanate ◽  
Magnetic Force ◽  
Energy Harvester ◽  
Electrical Energy ◽  
Lead Zirconate ◽  
Finite Element Models ◽  
Average Output ◽  
Motion System ◽  
Rotary Type

A rotary-type energy harvester for the applications having space restrictions has been designed and developed to harvest the energy from rotary motion system. The rotation kinetic energy is converted into electrical energy through a lead zirconate titanate patch, which is strained by magnetic force. Most of the researchers used d31 mode of the piezoelectric material of such conversion. Some researchers have explored d33 mode harvester with piezo patch along the circumferential direction. In this article, d33 mode of harvesting with radial direction piezo patch has been proposed. Mathematical and finite element models are developed to calculate the harvested energy. The results are experimentally verified. The average output power of 14.48 nW is generated corresponding to the magnetic force of 0.3126 N and rotational speed of 2100 r/min. The results from the mathematical and finite element models are observed to be consistent with the experimental results. Such harvester will be useful for the applications having space limitations such as self-power generation in an artillery shell and rotary projectile.

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