Physical Cleaning Enhancement Using Advanced Spray with Uniform Droplet Control

2012 ◽  
Vol 195 ◽  
pp. 195-197 ◽  
Author(s):  
Ying Hsueh Chang Chien ◽  
Matt Yeh ◽  
Scott Ku ◽  
C.M. Yang ◽  
C.C. Chen ◽  
...  

In semiconductor device manufacturing, single wafer processors are widely used in not only BEOL process but also in FEOL process for 2X devices to improve the cleaning efficiency and get the higher productivity. Because the scaled down devices require the minimum substrate loss in the cleaning steps, the physical force by a dual fluid spray is still the main position to improve the cleaning efficiency at the moment comparing with chemical effects as the dissolution of contaminants and/or the lift off of particles. Sato, et al., reported that the relationship between particle removal and droplet characteristics linked to the droplet energy densityEdas following equation [. The kinetic energyEkof droplet is calculated from droplet diameterdand velocityv, as shown in Equation 1.

2017 ◽  
Vol 41 (S1) ◽  
pp. S616-S616
Author(s):  
L. Rodrigues ◽  
J.V. Freitas-de-Jesus ◽  
G. Lavorato-Neto ◽  
D.D. Lima ◽  
E.R. Turato ◽  
...  

IntroductionThe relationship between parents and children is a complex link. In the process of pregnancy-birth-puerperium, frequent feelings such as responsibility, love, fear, uncertainty, generate strong expectations at birth. The death of a newborn may not be perceived as natural by the parents, considering the local culture and the context of great technological development of neonatology.ObjectiveTo explore possible guilt and fantasies in life experiences of parents during mourning process due to death of their newborn.MethodClinical-qualitative design, a particularization of qualitative methods here applied in clinical assistance settings with highlight to psychological aspects. Data collection with the technique of semi-directed interview with open-ended questions, in-depth. Sample intentionally constructed, with closure by theoretical saturation of information. The participants were 7 parents, mourning by the death of their child at the neonatal intensive care unit, in a university hospital of Campinas, São Paulo State.ResultsFeelings of guilt - conscious or not - lead to an internal and particular movement so that mourning can be lived. The participants showed certain embarrassment, accompanied by natural suffering facing to the cultural pattern that permeates the emotional experience. It predicts types of psychological meanings that the experience will give to the person.ConclusionHealth professionals working with bereaved parents should consider more deeply the moment these one experienced, with emphasis on the details of the death scenery, beside the problems of illness and death properly so called.Disclosure of interestThe authors have not supplied their declaration of competing interest.


2005 ◽  
Vol 21 (4) ◽  
pp. 367-381 ◽  
Author(s):  
Victoria Hunter

In this article, Victoria Hunter explores the concept of the ‘here and now’ in the creation of site-specific dance performance, in response to Doreen Massey's questioning of the fixity of the concept of the ‘here and now’ during the recent RESCEN seminar on ‘Making Space’, in which she challenged the concept of a singular fixed ‘present’, suggesting instead that we exist in a constant production of ‘here and nows’ akin to ‘being in the moment’. Here the concept is applied to an analysis of the author's recent performance work created as part of a PhD investigation into the relationship between the site and the creative process in site-specific dance performance. In this context the notion of the ‘here and now’ is discussed in relation to the concept of dance embodiment informed by the site and the genius loci, or ‘spirit of place’. Victoria Hunter is a Lecturer in Dance at the University of Leeds, who is currently researching a PhD in site-specific dance performance.


2021 ◽  
pp. 030573562110316
Author(s):  
Elena Saiz-Clar ◽  
Miguel Ángel Serrano ◽  
José Manuel Reales

The relationship between parameters extracted from the musical stimuli and emotional response has been traditionally approached using several physical measures extracted from time or frequency domains. From time-domain measures, the musical onset is defined as the moment in that any musical instrument or human voice issues a musical note. The onsets’ sequence in the performance of a specific musical score creates what is known as the onset curve (OC). The influence of the structure of OC on the emotional judgment of people is not known. To this end, we have applied principal component analysis on a complete set of variables extracted from the OC to capture their statistical structure. We have found a trifactorial structure related to activation and valence dimensions of emotional judgment. The structure has been cross-validated using different participants and stimuli. In this way, we propose the factorial scores of the OC as a reliable and relevant piece of information to predict the emotional judgment of music.


2021 ◽  
Vol 314 ◽  
pp. 259-263
Author(s):  
Samrina Sahir ◽  
Hwi Won Cho ◽  
Nagendra Prasad Yerriboina ◽  
Tae Gon Kim ◽  
Satomi Hamada ◽  
...  

Brush scrubbing is a well-known post CMP cleaning process. Interaction between PVA brush and the particles removed during the process must be considered while designing a cleaning process. In this work, the effect of cleaning solution pH was investigated in terms of particle removal from the wafer and subsequent loading to the PVA brush nodule. Higher cleaning of particles from wafer was observed for pH 2 and 12 cleaning solutions and poor cleaning for pH 7 cleaning solution. In contrast, the brushes were loaded heavily for pH 7 compared to pH 2 and 12. Higher electrostatic attraction between oppositely charged PVA and ceria surfaces provided higher ceria particles loading to PVA brush in acidic and neutral cleaning solutions. This particle loading to PVA brush can further effect cleaning efficiency as well as cross-contamination.


Author(s):  
Clément M. Gosselin ◽  
Ammar Hadj-Messaoud

Abstract This paper proposes some new polynomial solutions to the trajectory planning problem encountered in pick-and-place operations. When a robotic manipulator is used for such operations, it is possible to plan the required trajectory in joint space, provided that the inverse kinematic problem has been solved for the initial and final configurations — and possibly for a lift-off and a set-down configuration — and that the workspace is free of obstacles. Polynomial solutions to this problem can be found in the literature. However, they usually provide continuity up to the second derivative only, leading to a discontinuous jerk. The solutions derived in this paper preserve the continuity of the third derivative of the joint coordinates, thereby ensuring smooth trajectories with smooth variations of the actuator currents. Moreover, whenever possible, unique polynomial expressions valid between the initial and final configurations are used in order to simplify the logic. Polynomial formulations without lift-off and set-down configurations are first presented. Then, these intermediate configurations are introduced, leading to a new set of solutions. A global algorithm is then discussed in order to clearly indicate the relationship between the different solutions. Finally, an example illustrating the application to a pick-and-place operation is solved.


2018 ◽  
Vol 48 (9) ◽  
Author(s):  
André Luis Vian ◽  
Christian Bredemeier ◽  
Marcos Alexandre Turra ◽  
Cecília Paz da Silva Giordano ◽  
Elizandro Fochesatto ◽  
...  

ABSTRACT: Biomass production and nitrogen (N) accumulated in wheat shoots may be used for quantifying optimal topdressing nitrogen doses. The objective of this study was to develop and validate models for estimating the amount of biomass and nitrogen accumulated in shoots and the N topdressing dose of maximum technical efficiency in wheat using the normalized difference vegetation index (NDVI) measured by an active optical canopy sensor. Field experiments were carried out in two years and treatments consisted of N doses applied at plant emergence and as topdressing. NDVI, shoot biomass and N accumulated in shoots at the growth stage of six fully expanded leaves and grain yield were evaluated, being determined the topdressing N dose of maximum technical efficiency (DMTE). The NDVI was positively correlated to shoot biomass and N content in shoots and models for the relationship between these variables were developed and validated. The DMTE was negatively correlated with the NDVI value evaluated at the moment of N topdressing application. Thus, NDVI evaluation by an active optical canopy sensor can be used for nitrogen fertilization in variable rate, allowing the adjustment of applied N doses in different areas within a field.


1998 ◽  
Vol 47 (3-4) ◽  
pp. 153-160
Author(s):  
S. A. Gruszewska

AbstractTaking into consideration two facts: that the structure of social life forces twins to part and that the presented roles in a pair are not equal, (one of the twins plays the role of a leader (L) and the other, the subordinate (P.)), one can ask the question — what meaning does the moment of parting have and what are its consequences?In order to do that, a survey was conducted, (a sample of 31 pairs of twins above the age of 30), in which every pair was asked the question: “Which one of you made the decision about parting?” The answer had two options: A – I, B – brother/sister. Out of 31 pairs of twins, 16 pairs chose the variant different from his brother or sister – that is A, B, admitting that the interpersonal conflict was the result of the parting. In 7 pairs, both twins chose the B variant – they withdrew from the conflict; and in 8 pairs they chose the A variant – looking for a compromise as the means of agreement.When analyzing the results of the survey, we can state the following:– in the relationship of twins, there is an interpersonal conflict;– the decision about parting is difficult with prevalent feelings of sadness and sorrow;– after parting, at least one of the twins has problems with preserving his identity and integrity of psychological space.Since the moment of parting is necessary and difficult, specialists and mainly parents are required to consciously change their position towards the relationship of twins. It has to be the result of applied educational methods which aim at creating subjectivity and equality of each of the twins before the moment of parting.


i-Perception ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 204166952090355 ◽  
Author(s):  
Jan Koenderink ◽  
Andrea van Doorn ◽  
Christoph Witzel ◽  
Karl Gegenfurtner

We studied the relationship between color afterimages and complementary colors. The hues of afterimages of 24 inducer hues, uniformly distributed over the rgb color circle, were measured by an iterative method of adjustment. The judgment of equality of hue of the afterimage and a synthesized patch was effectively judged at the moment immediately after the switch-off of the inducer, when the synthesized patch went through any number of iterative adjustments. The two patches—both phenomenally present, but only one optically presented—appeared to the left and right of a fixation mark that was fixated throughout the whole procedure. Thus, both patches were present in eccentric vision. The hues of afterimages were found to be quite different from the hue of the complementary of the inducer. Almost one half of the color circle (orange to chartreuse) leads to afterimage hues in a narrow region of purples. This implies that color circles based on diametrically opposed inducer–afterimage hues are necessarily inconsistent. Yet, perhaps surprisingly, the relation between primary and afterimage hues is still approximately an involution (they are reciprocally related).


2014 ◽  
Vol 68 (5-6) ◽  
pp. 291-300
Author(s):  
Dajana Slijepcevic ◽  
R. Savic ◽  
Dragisa Trailovic

One of very important prerequisites for achieving good results in races, in addition to genetic predisposition, quality training and good health, are optimal values for number of erythrocytes, concentration of haemoglobin and hematocrit, of which depends efficient oxygen supply of muscles during great efforts. The stated values, along with data on heart rate, are useful indicators of the degree of horse fitness and readiness for horse race. The influence of physical exertion on the values of basic hematological parameters as well as on heart rate, was investigated on 6 trotters, in training at the Belgrade racetrack (one head of Italian trotter, male, 3 years old; 3 heads of American trotter, male, 3,4 and 6 years old and two heads of Serbian trotter, female, 4 and 5 years old). The blood samples for hematological tests were taken by punction of jugular vein in resting phase - immediately before the commencement of work, after light trot warming for 3000 m and fast trot for 1000 m, with 30 minutes rest between the two runnings. The heart rate was monitored continuously by radio telemetry cardiometer, from the moment they were taken from their boxes and harnessing to the completion of work. The obtained results confirm the relationship between the rise of heart rate and hematocrit values: maximal hematocrit values were determined after the first running (0.49?0.05, in regard to 0.42?0.03 in resting phase), but 30 minutes after the second running there was a slight drop of hematocrit values (0.46?0.04). The blood samples in both cases were taken after fast trot during which there were recorded maximal pulse values, so in the moment of sampling the pulse lowered close to the values in resting - after the first running from 192.23?19.66, and after the second from 180.33?17.22 to 40.67?5.76.


2020 ◽  
Author(s):  
Zhongwen Jin ◽  
Yuwei Meng ◽  
Rongdong Yu ◽  
Ruochen Huang ◽  
Mingyang Lu ◽  
...  

<p>Previously, a conductivity invariance phenomena (CIP) has been discovered – at a certain lift-off, the inductance change of the sensor due to a test sample is immune to conductivity variations, i.e. the inductance – lift-off curve passes through a common point at a certain lift-off, termed as conductivity invariance lift-off. However, this conductivity invariance lift-off is fixed for a particular sensor setup, which is not convenient for various sample conditions. In this paper, we propose using two parameters in the coil design – the horizontal and vertical distances between the transmitter and the receiver to control the conductivity invariance lift-off. The relationship between these two parameters and the conductivity invariance lift-off is investigated by simulation and experiments and it has been found that there is an approximate linear relationship between these two parameters and the conductivity invariance lift-off. This is useful for applications where the measurements have restrictions on lift-off, e.g. uneven coating thickness which limits the range of the lift-off of probe during the measurements. Therefore, based on this relationship, it can be easier to adjust the configuration of the probe for a better inspection of the test samples.</p>


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