scholarly journals A Review of Inductively Coupled Plasma-Assisted Magnetron Sputter System

2019 ◽  
Vol 28 (5) ◽  
pp. 131-138 ◽  
Author(s):  
Tae Hyung Kim ◽  
Geun Young Yeom
Keyword(s):  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Magnetron Sputter

Low Inductance Antenna (LIA) plasma source and plasma-enhanced dual rotatable magnetron sputter assisted with LIA

2015 ◽  
Vol 2015 (1) ◽  
pp. 000757-000760
Author(s):  
Y. Takaya ◽  
Y. Tanioka ◽  
H. Yoshino ◽  
A. Osawa
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Voltage ◽  
Polymer Surface ◽  
Plasma Source ◽  
Large Area ◽  
Plasma Damage ◽  
Inductively Coupled ◽  
Temperature Deposition ◽  
Magnetron Sputter ◽  
Plasma Profile

In recent years, both low plasma damage and low temperature deposition technic for polymer substrates (e.g. PCB, films and etc.) are often required. We have developed a plasma enhanced dual rotatable magnetron sputter source assisted with inductively coupled plasma (ICP) using low inductance antenna (LIA). LIA has same unique characteristics, a)low voltage high density plasma, b)well controllability of plasma profile to ensure uniformity over large area, c)ionization of sputtered particle and etc. when in being used as a plasma assistant, and besides, LIA can be used as a ICP source for polymer surface modification. We introduce a variety of the possibilities of whether this sputter source is usable for the process of the fabrication of PCB.

Deposition of TiN/NbN Superlattice Hard Coatings by Ionised Magnetron Sputter Deposition

2003 ◽  
Vol 791 ◽  
Author(s):  
Yi Long ◽  
Robert J. Stearn ◽  
Zoe H. Barber ◽  
Stephen J. Lloyd ◽  
William J. Clegg
Keyword(s):  
Inductively Coupled Plasma ◽  
Hard Coatings ◽  
Multilayer Coatings ◽  
Radio Frequency Coil ◽  
Multilayered Structures ◽  
Cross Sectional ◽  
Inductively Coupled ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Low Energy Ions

ABSTRACTWe have investigated the effect of ion bombardment on the structure and hardness of thin coatings of TiN/NbN multilayered structures and monolithic films of both TiN and NbN. A radio frequency coil was used to generate an additional inductively coupled plasma between the substrate and the target enabling the sample to be bombarded by a high flux of relatively low energy ions under the appropriate conditions. It is shown that the effect of such bombardment in the case of the monolithic films is to reduce the porosity. This gave an increase in the hardness of both the TiN and the NbN films up to a power of 100 W (using a coil with a cross-sectional area of 2 × 103 mm2). Further increasing the power density led to a decrease in hardness. TiN/NbN multilayer coatings were made under the optimum deposition conditions for the monolithic materials and gave hardnesses greater than those observed in either TiN or NbN and approximately 50% greater than that predicted by a mixtures rule.

Estimation of Trace Elements in Gingival Crevicular Fluid and Serum-Comparative Study in Healthy and Periodontitis

2017 ◽  
Vol 9 (5) ◽  
Author(s):  
Bhagavathami Meenaksh ◽  
Chitraa R. Chandran ◽  
Aravindhan Thathchari Ranganathan ◽  
Kavindapadi Venkateswaran Rama ◽  
Valarmathy Srinivasan
Keyword(s):  
Trace Elements ◽  
Inductively Coupled Plasma ◽  
Gingival Crevicular Fluid ◽  
Serum Zinc ◽  
Cross Sectional Study ◽  
Serum Copper ◽  
Cross Sectional ◽  
Inductively Coupled ◽  
Significant Difference ◽  
Copper Zinc

Background: This study aims to determine and compare the levels of trace elements copper, zinc, selenium and chromium in GCF and serum of patients with periodontitis and healthy individuals. Methods: This cross sectional study includes 24 study subjects recruited from the patients reporting to the Department of Periodontics , Tagore Dental College Chennai. All the selected patients were subjected to a clinical examination done by a single examiner. The estimation of trace elements Copper, Zinc, Selenium and Chromium in GCF and serum is performed using Perkin Elmer optima 5300 Inductively Coupled Plasma Emission Spectrometer (ICPOES). Results: GCF and serum copper levels showed no significant difference in both periodontitis and healthy groups . Selenium levels tend to be the same in both groups. Serum zinc levels are more in periodontitis patients than healthy subjects (p less than 0.01). GCF chromium levels are found to be more in patients with periodontitis than healthy. Conclusions : More research is therefore needed to monitor the role of these trace elements C with an increased sample size to ascertain whether they are associated with a reduced risk of periodontitis.

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