Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition

2013 ◽  
Vol 277 ◽  
pp. 167-175 ◽  
Author(s):  
Erin R. Cleveland ◽  
Laura B. Ruppalt ◽  
Brian R. Bennett ◽  
S.M. Prokes
Keyword(s):  
Atomic Layer Deposition ◽  
Hydrogen Plasma ◽  
Atomic Layer ◽  
Native Oxides ◽  
Layer Deposition ◽  
Pre Treatment

Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure

2012 ◽  
Vol 101 (23) ◽  
pp. 231601 ◽  
Author(s):  
Laura B. Ruppalt ◽  
Erin R. Cleveland ◽  
James G. Champlain ◽  
Sharka M. Prokes ◽  
J. Brad Boos ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hydrogen Plasma ◽  
Atomic Layer ◽  
Plasma Exposure ◽  
Layer Deposition

Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition

2013 ◽  
Vol 31 (1) ◽  
pp. 01A124 ◽  
Author(s):  
Tae-Hoon Jung ◽  
Jin-Seong Park ◽  
Dong-Ho Kim ◽  
Yongsoo Jeong ◽  
Sung-Gyu Park ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Atomic Layer ◽  
Layer Deposition

The impact on in-situ-hydrogen-plasma treatment for zinc oxide plasma enhanced atomic layer deposition

2012 ◽  
Vol 12 ◽  
pp. S134-S138 ◽  
Author(s):  
Jung-Dae Kwon ◽  
Jae-Won Lee ◽  
Kee-Seok Nam ◽  
Dong-Ho Kim ◽  
Yongsoo Jeong ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Plasma Treatment ◽  
Hydrogen Plasma ◽  
Atomic Layer ◽  
Layer Deposition ◽  
The Impact

Current collapse reduction in InAlN/GaN MOS HEMTs by in situ surface pre-treatment and atomic layer deposition of ZrO2 high-k gate dielectrics

2009 ◽  
Vol 45 (11) ◽  
pp. 570 ◽  
Author(s):  
S. Abermann ◽  
G. Pozzovivo ◽  
J. Kuzmik ◽  
C. Ostermaier ◽  
C. Henkel ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Gate Dielectrics ◽  
Atomic Layer ◽  
Current Collapse ◽  
Layer Deposition ◽  
High K ◽  
Pre Treatment
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