Application of WACBED to superlattice structures in compound semiconductors
Superlattice structures are now routinely grown in compound semiconductors, with superlattice periodicities ranging from a few angstroms to several hundred angstroms. The structures consist of alternating layers of compound semiconductor which have different chemical composition. The composition of the layers may be chosen to provide a relatively large lattice mismatch for a strained layer superlattice, or to provide lattice matching for good epitactic growth. The chemical difference may be large, as in AIAs/GaAs for example or may be represent only a change in concentration of substitutionally doped material. In all of these materials it is important to characterize the material of the individual layers as well as the interface between these layers.Microscopy of these materials has been performed in real space, using both high resolution and diffraction contrast techniques, and in reciprocal space. The thin cross section specimens used in these investigations are affected by stress relaxation at the interfaces which can result in bending of the atomic planes near the interface.