Effects of the Photoelectrochemical Etching in Hydrogen Fluride (HF) on the Optoelectrical Properties of Ga2O3
2021 ◽
Vol 2112
(1)
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pp. 012006
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Abstract Photoelectrochemical (PEC) etching is preferred to produce micro-and nano-structures for constructing Ga2O3-based electronics and optoelectronics, owing to its numerous controllable parameters. During the devices fabrications, beyond the wet chemical and dry (plasma) etching produces, PEC etching also leads to device degradations inordinately. In this work, the Ga2O3 thin film was PEC etched by hydrogen fluride (HF) etchant, and its opto-electric deep-ultraviolet sensing performances, including photo-to-dark current ratio, responsivity, and response speed, before and after PEC etching were analyzed and discussed.
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2015 ◽
Vol 3
(9)
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pp. 1942-1948
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2016 ◽
Vol 4
(15)
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pp. 3113-3118
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ORGANIC CuPc COATING INDUCED IMPROVED PHOTOLUMINESCENCE AND PHOTOCONDUCTIVITY OF ZnO NANOWIRES ARRAY
2012 ◽
Vol 05
(03)
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pp. 1250021
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