SkyBridge-3D-CMOS 2.0: IC Technology for Stacked-Transistor 3D ICs beyond FinFETs

Author(s):  
Sachin Bhat ◽  
Mingyu Li ◽  
Shaun Ghosh ◽  
Sourabh Kulkarni ◽  
Csaba Andras Moritz
Keyword(s):  
3D Ics ◽  
Author(s):  
Je-Hyoung Park ◽  
Ali Shakouri ◽  
Sung-Mo Kang

CMOS VLSI technology has been facing various technical challenges as the feature sizes scale down. To overcome the challenges imposed by the shrink of the conventional on-chip interconnect system in IC chips, alternative interconnect technologies are being developed: one of them is three dimensional chips (3D ICs). Even though 3D IC technology is a promising solution for interconnect bottlenecks, thermal issues can be exacerbated. Thermal-aware design and optimization will be more critical in 3D IC technology than conventional planar IC technology, and hence accurate temperature profiles of each active layer will become very important. In 3D ICs, temperature profile of one layer depends not only on its own power dissipation but also on the heat transferred from other layers. Thus, thermal considerations for 3D ICs need to be done in a holistic manner even if each layer can be designed and fabricated individually. Conventional grid-based temperature computation methods are accurate but are computationally expensive, especially for 3D ICs. To increase computational efficiency, we developed a matrix convolution technique, called Power Blurring (PB) for 3D ICs. The temperature resulting from any arbitrary power dissipation in each layer of the 3D chip can be computed quickly. The PB method has been validated against commercial FEA software, ANSYS. Our method yields good results with maximum error less than 2% for various case studies and reduces the computation time by a factor of ∼ 60. The additional advantage is the possibility to evaluate different power dissipation profiles without the need to re-mesh the whole 3D chip structure.


Author(s):  
R. J. Gutmann ◽  
J. J. McMahon ◽  
J.-Q. Lu

Planarization needs for integrated circuit (IC) technology focus on feature-scale (100nm–1μm) and die-scale (5mm-20mm) dimensions. As three-dimensional (3D) integration moves from die-by-die assembly to wafer-level integration to provide a higher density of low electrical parasitic vertical interconnects (or vias), wafer-level planarization needs to be considered. Planarization needs depend upon the 3D technology platform approach (such as (1) blanket bonding followed by inter-wafer interconnect processing or via-first processing followed by bonding and thinning to expose the vias and (2) the number of wafers in a 3D stack) and the processing conditions used in fabricating the wafers to be 3D integrated (in particular, the built-in stress levels and post-bonding thermal processing budget). This invited presentation includes a summary of the current interest in wafer-level 3D integration in both the academic and industrial research community. Wafer-level planarization issues with different technology platforms are presented, and the limited results presented in the literature to date are summarized. The importance of wafer-level planarization compared to bonding, thinning and wafer-to-wafer alignment is discussed.


2015 ◽  
Vol 135 (7) ◽  
pp. 744-751
Author(s):  
Tetsuya Kobayashi ◽  
Nanako Niioka ◽  
Masa-aki Fukase ◽  
Atsushi Kurokawa

Author(s):  
T. Zanon ◽  
W. Maly

Abstract Building a portfolio of deformations is the key step for building better defect models for the test and yield learning domain. A viable approach to achieve this goal is through geometric characterization and classification of failure patterns found on memory fail bitmaps. In this paper, we present preliminary results on how to build such a portfolio of deformations for an IC technology of interest based on a fail bitmap analysis study conducted on large, modern SRAM memory products.


Author(s):  
Ingrid De Wolf ◽  
Ahmad Khaled ◽  
Martin Herms ◽  
Matthias Wagner ◽  
Tatjana Djuric ◽  
...  

Abstract This paper discusses the application of two different techniques for failure analysis of Cu through-silicon vias (TSVs), used in 3D stacked-IC technology. The first technique is GHz Scanning Acoustic Microscopy (GHz- SAM), which not only allows detection of defects like voids, cracks and delamination, but also the visualization of Rayleigh waves. GHz-SAM can provide information on voids, delamination and possibly stress near the TSVs. The second is a reflection-based photoelastic technique (SIREX), which is shown to be very sensitive to stress anisotropy in the Si near TSVs and as such also to any defect affecting this stress, such as delamination and large voids.


2013 ◽  
Vol 33 (6) ◽  
pp. 1548-1552
Author(s):  
Wenchao GAO ◽  
Qiang ZHOU ◽  
Xu QIAN ◽  
Yici CAI

Author(s):  
A.J. Walton ◽  
J.T.M. Stevenson ◽  
I. Underwood ◽  
J.G. Terry ◽  
S. Smith ◽  
...  

1986 ◽  
Vol 22 (4) ◽  
pp. 188 ◽  
Author(s):  
T. Kinoshita ◽  
K. Yamashita ◽  
M. Maeda ◽  
T. Nakamura
Keyword(s):  

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