Mechanics of Buckled Structure MEMS for Actuation and Energy Harvesting Applications

2012 ◽  
Author(s):  
Daniel A. Porter ◽  
Usha R. Gowrishetty ◽  
Isaac J. Phelps ◽  
Kevin M. Walsh ◽  
Thomas A. Berfield
Keyword(s):  
Optimal Design ◽  
Energy Harvesting ◽  
Residual Stresses ◽  
Microelectromechanical Systems ◽  
Design Parameters ◽  
Experimental Measurements ◽  
Mems Devices ◽  
Stable States ◽  
Naturally Occurring ◽  
Buckling Behavior

Buckled structures offer many great benefits to microelectromechanical systems (MEMS), using naturally occurring residual stresses to provide structures with switchable stable states capable of large transverse deflections. In this work a simple, circular bi-layer diaphragm style of buckled MEMS devices is discussed. The buckling behavior of the system, including buckling height and switching criteria, is modeled and analyzed in ANSYS, then compared with theoretical equations and experimental measurements. Results of this work will help to yield optimal design parameters for both energy harvesting and actuation MEMS applications.

scholarly journals Wide-angle, wide-band, polarization-insensitive metamaterial absorber for thermal energy harvesting

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Ahmed Elsharabasy ◽  
Mohamed Bakr ◽  
M. Jamal Deen
Keyword(s):  
Optimal Design ◽  
Energy Harvesting ◽  
Thermal Energy ◽  
Near Field ◽  
Wide Band ◽  
Design Parameters ◽  
Perfect Absorber ◽  
Split Ring ◽  
Ir Radiation ◽  
Thermal Energy Harvesting

Abstract We propose a wide-band metamaterial perfect absorber (MPA), using the coupling in the near-field of a quadruple split-ring resonator concentric with crossed ellipses. We designed the MPA with a metal–insulator-metal (MIM) structure for use in thermal energy harvesting. A gradient-based optimization approach was carried out to maximize the absorption of infrared (IR) radiation around 10 μm. Owing to the near-field coupling of resonators with optimal design parameters, the peaks of the absorption responses approach each other, thus broadening the overall bandwidth with almost unity absorptivity. The proposed design has a resonance at 10 μm resulting from magnetic polaritons (MPs) and thus maintains high absorption above 99% up to a range of incident-angles greater than 60° and exhibits a polarization-free behavior due to symmetry. When the optimal design was numerically examined to fabrication tolerances, it showed negligible sensitivities in the absorptivity with respect to design parameters. The strong electric field enhancement inside the split-ring gaps and between the ends of the cross arms and the surrounding ring enables designing MIM diodes to rectify the harvested thermal radiations at 288 K. MIM diodes can be built by the deposition of thin insulators to sit in these gaps. The MIM diode and MPA work together to harvest and rectify the incident IR radiation in a manner similar to the operation of rectennas. The MPA outperforms the traditional nano-antennas in impedance matching efficiency because of its higher resistance. Also, its dual-polarization reception capability doubles the rectenna efficiency. Our proposed MPA retained absorptivity more than 99% when coupled with MIM diodes whose resistances are in the range of 500 Ω–1 MΩ.

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

MRS Bulletin ◽  
2009 ◽  
Vol 34 (9) ◽  
pp. 658-664 ◽  
Author(s):  
P. Muralt ◽  
R. G. Polcawich ◽  
S. Trolier-McKinstry
Keyword(s):  
Thin Films ◽  
Energy Harvesting ◽  
Microelectromechanical Systems ◽  
Low Voltage ◽  
High Sensitivity ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Mems Devices ◽  
Si Substrates ◽  
The Impact

AbstractPiezoelectric microelectromechanical systems (MEMS) offer the opportunity for high-sensitivity sensors and large displacement, low-voltage actuators. In particular, recent advances in the deposition of perovskite thin films point to a generation of MEMS devices capable of large displacements at complementary metal oxide semiconductor-compatible voltage levels. Moreover, if the devices are mounted in mechanically noisy environments, they also can be used for energy harvesting. Key to all of these applications is the ability to obtain high piezoelectric coefficients and retain these coefficients throughout the microfabrication process. This article will review the impact of composition, orientation, and microstructure on the piezoelectric properties of perovskite thin films such as PbZr1−xTixO3 (PZT). Superior piezoelectric coefficients (e31, f of −18 C/m2) are achieved in {001}-oriented PbZr0.52Ti0.48O3 films with improved compositional homogeneity on Si substrates. The advent of such high piezoelectric responses in films opens up a wide variety of possible applications. A few examples of these, including low-voltage radio frequency MEMS switches and resonators, actuators for millimeter-scale robotics, droplet ejectors, energy scavengers for unattended sensors, and medical imaging transducers, will be discussed.

Design and Fabrication of a Functionally Modified Bimorph Actuator

2014 ◽  
Author(s):  
Johnson Fujamade ◽  
Frances Williams ◽  
Oliver Myers ◽  
Brandon Plastied ◽  
Messaoud Bahoura ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Microelectromechanical Systems ◽  
Lead Zirconate ◽  
Linear Displacement ◽  
Design Parameters ◽  
Platinum Electrodes ◽  
Mems Devices ◽  
Device Design ◽  
High Performing ◽  
Mems Technology

In recent years, the use of microelectromechanical systems (MEMS) devices has led to high performing actuators for various applications, including unmanned air vehicles (UAVs) for defense applications. The incorporation of MEMS technology in this field has resulted in miniaturized UAVs with the capability of carrying out sophisticated reconnaissance and relaying real time information remotely; however, maneuverability of these devices around obstacles is still a challenge. This paper presents the design and fabrication of a functionally modified bimorph actuator with enhanced UAV aerodynamics and maneuverability. The actuator is a metal-based MEMS device consisting of stainless steel, lead zirconate titanate (PZT), and titanium/platinum electrodes. COMSOL analysis was performed to examine optimal device design parameters and is presented in this paper. The design consists of off-axis PZT segments on a bimorph PZT layer which results in bend twist coupling. A detailed description of the fabrication process flow developed based on the optimization of the device design is also given. MEMS processing technology was incorporated to produce a torsional cantilever beam that produces angular and linear displacement for superior UAV maneuverability and its performance is also presented in this paper.

scholarly journals A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

Sensors ◽  
2021 ◽  
Vol 21 (21) ◽  
pp. 7242
Author(s):  
Shayaan Saghir ◽  
Muhammad Mubasher Saleem ◽  
Amir Hamza ◽  
Kashif Riaz ◽  
Sohail Iqbal ◽  
...  
Keyword(s):  
Gaussian Process ◽  
Design Space ◽  
Microelectromechanical Systems ◽  
Computer Experiments ◽  
Design Parameters ◽  
Voltage Sensitivity ◽  
Mems Devices ◽  
Fem Simulations ◽  
Mems Accelerometer ◽  
Gradient Descent Algorithm

This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of the MEMS accelerometer including natural frequency, proof mass displacement, pull-in voltage, capacitance change, and Brownian noise equivalent acceleration (BNEA) are optimized simultaneously with respect to the geometric design parameters, environmental conditions, and microfabrication process constraints. The sampling design space is created using DACE based Latin hypercube sampling (LHS) technique and corresponding output responses are obtained using multiphysics coupled field electro–thermal–structural interaction based finite element method (FEM) simulations. The metamodels for the individual output responses are obtained using statistical GP analysis. The developed metamodels not only allowed to analyze the effect of individual design parameters on an output response, but to also study the interaction of the design parameters. An objective function, considering the performance requirements of the MEMS accelerometer, is defined and simultaneous multi-objective optimization of the output responses, with respect to the design parameters, is carried out by using a combined gradient descent algorithm and desirability function approach. The accuracy of the optimization prediction is validated using FEM simulations. The behavioral model of the final optimized MEMS accelerometer design is integrated with the readout electronics in the simulation environment and voltage sensitivity is obtained. The results show that the combined DACE and GP based design methodology can be an efficient technique for the design space exploration and optimization of multiphysics MEMS devices at the design phase of their development cycle.

Justification of design parameters of the fractional reaping conveyor and its devices for removal of beveled stems from under the wheels of the vehicle

2019 ◽  
Vol 1 (3) ◽  
pp. 1-10
Author(s):  
Mikhail M. Konstantinov ◽  
Ivan N. Glushkov ◽  
Sergey S. Pashinin ◽  
Igor I. Ognev ◽  
Tatyana V. Bedych
Keyword(s):  
Optimal Design ◽  
Technological Process ◽  
Design Parameters ◽  
Theoretical Studies ◽  
Optimal Parameters ◽  
Belt Conveyor ◽  
Grain Crops ◽  
Mode Of Operation ◽  
Optimal Values ◽  
Main Component

In this paper we consider the structural and technological process of the combine used in the process of separate harvesting of grain crops, as well as a number of its parameters. Among the main units of the combine, we allocate a conveyor and devices for removing beveled stems from under the wheels of the vehicle. The principle of operation of the conveyor at different phases of the Reaper and especially the removal of cut stems from under the wheels of the vehicle during operation of the Reaper. The results of theoretical studies on the establishment of the optimal design of the parameters of the belt conveyor are presented, the ranges of their optimal values are considered and determined. Studies on the establishment of optimal parameters of the screw divider in the Reaper, which is the main component of the device for removal of beveled stems, are presented. Taking into account the optimal design and mode of operation of the screw divider, the correct work is provided to remove the cut stems from under the wheels of the harvester.

scholarly journals Optimal Design Parameters for a Phased Array Based Ultrasonic Polar Scan

2021 ◽  
pp. 1-1
Author(s):  
Jannes Daemen ◽  
Arvid Martens ◽  
Mathias Kersemans ◽  
Erik Verboven ◽  
Steven Delrue ◽  
...  
Keyword(s):  
Optimal Design ◽  
Phased Array ◽  
Design Parameters ◽  
Ultrasonic Polar Scan

scholarly journals A Two-Round Optimization Design Method for Aerostatic Spindles Considering the Fluid–Structure Interaction Effect

2021 ◽  
Vol 11 (7) ◽  
pp. 3017
Author(s):  
Qiang Gao ◽  
Siyu Gao ◽  
Lihua Lu ◽  
Min Zhu ◽  
Feihu Zhang
Keyword(s):  
Optimal Design ◽  
Optimization Design ◽  
Design Method ◽  
Fluid Structure Interaction ◽  
Design Procedure ◽  
Design Parameters ◽  
Geometrical Parameters ◽  
Fluid Structure ◽  
Structure Interaction ◽  
Aerostatic Spindle

The fluid–structure interaction (FSI) effect has a significant impact on the static and dynamic performance of aerostatic spindles, which should be fully considered when developing a new product. To enhance the overall performance of aerostatic spindles, a two-round optimization design method for aerostatic spindles considering the FSI effect is proposed in this article. An aerostatic spindle is optimized to elaborate the design procedure of the proposed method. In the first-round design, the geometrical parameters of the aerostatic bearing were optimized to improve its stiffness. Then, the key structural dimension of the aerostatic spindle is optimized in the second-round design to improve the natural frequency of the spindle. Finally, optimal design parameters are acquired and experimentally verified. This research guides the optimal design of aerostatic spindles considering the FSI effect.

Momentum exchange impact damper design methodology for object-wall-collision problems

2017 ◽  
Vol 24 (14) ◽  
pp. 3206-3218
Author(s):  
Yohei Kushida ◽  
Hiroaki Umehara ◽  
Susumu Hara ◽  
Keisuke Yamada
Keyword(s):  
Optimal Design ◽  
Design Methodology ◽  
Design Parameters ◽  
Momentum Exchange ◽  
Impact Damper ◽  
One Dimensional ◽  
Practical Design ◽  
Wall Collision ◽  
Damper Design ◽  
And Control

Momentum exchange impact dampers (MEIDs) were proposed to control the shock responses of mechanical structures. They were applied to reduce floor shock vibrations and control lunar/planetary exploration spacecraft landings. MEIDs are required to control an object’s velocity and displacement, especially for applications involving spacecraft landing. Previous studies verified numerous MEID performances through various types of simulations and experiments. However, previous studies discussing the optimal design methodology for MEIDs are limited. This study explicitly derived the optimal design parameters of MEIDs, which control the controlled object’s displacement and velocity to zero in one-dimensional motion. In addition, the study derived sub-optimal design parameters to control the controlled object’s velocity within a reasonable approximation to derive a practical design methodology for MEIDs. The derived sub-optimal design methodology could also be applied to MEIDs in two-dimensional motion. Furthermore, simulations conducted in the study verified the performances of MEIDs with optimal/sub-optimal design parameters.

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