FUNDAMENTALS OF PLASMA ETCHING FOR SILICON TECHNOLOGY (PART 1)

1990 ◽  
Vol 01 (03n04) ◽  
pp. 303-345 ◽  
Author(s):  
ALEXANDER M. VOSHCHENKOV
Keyword(s):  
Plasma Etching ◽  
Technology Development ◽  
Rapid Evolution ◽  
Building Blocks ◽  
Semiconductor Technology ◽  
Silicon Technology ◽  
Wet Chemical ◽  
Basic Characteristics ◽  
Relationship Of ◽  
The Relationship

Over the past decade, as the rapid evolution of semiconductor technology has progressed towards submicron design rules, plasma (dry) etching has supplanted simple wet etching processes for the transfer of patterns. To understand the underlying need for development of plasma etching, a brief background of integrated semiconductor technology is presented. Along with a historical perspective of the evolution of plasma etching, the relationship of plasma etching to lithography needs, its basic characteristics and advantages over wet chemical processing are discussed. Following this, relevant concepts of plasma physics and chemistry, based on experience with plasma etching applications for silicon technology, which can be used as building blocks for technology development are described.

PLASMA ETCHING PROCESSES FOR GIGAHERTZ SILICON INTEGRATED CIRCUITS (Part 2)

1991 ◽  
Vol 02 (01n02) ◽  
pp. 45-88 ◽  
Author(s):  
A.M. VOSHCHENKOV
Keyword(s):  
Integrated Circuits ◽  
Plasma Etching ◽  
Historical Perspective ◽  
Original Work ◽  
Preceding Paper ◽  
Chemical Processing ◽  
Silicon Technology ◽  
Silicon Integrated Circuits ◽  
Wet Chemical ◽  
Basic Characteristics

In the preceding paper of this series, “Fundamentals of plasma etching for silicon technology (Part 1)”,1 a historical perspective of the evolution of plasma etching, its relationship to lithography needs, basic characteristics of plasma etching, advantages over wet chemical processing, and a practical viewpoint of the underlying fundamental concepts of plasma physics and chemistry were presented. In this paper, original work in plasma etcher design and a variety of process applications to multigigahertz rate silicon technology as practiced in Bell Laboratories, Holmdel, are described.

scholarly journals Analysis of the basic characteristics of demographic dynamics in the Czech Republic regions

2007 ◽  
Vol 55 (6) ◽  
pp. 55-64
Author(s):  
Jaroslav Dufek
Keyword(s):  
Population Growth ◽  
Regression Function ◽  
Reciprocal Relationship ◽  
The Czech Republic ◽  
Demographic Dynamics ◽  
Basic Characteristics ◽  
Demographic Dynamic ◽  
South Moravia ◽  
Relationship Of ◽  
The Relationship

The work deals with the evaluation of an achieved level of the basic characteristics of the demographic dynamic in the regions in 2005, dividing regions to homogenous groups always according to pairs of indicators having logical relationship between each other. As a pair characterizing population migration were selected a rate of marriages – divorces, marriages – births, births – mortalities, immigrations – emigrations, natural population growth – immigration population growth. According to a direction of the research intention a special attention was paid to South Moravia region and to Vysočina region. According to an expected reciprocal relationship of the rate of marriages – births the regression function was determined including a correlative index (I = 0,739*), confirming and quantifying the relationship.

scholarly journals Two-step hybrid process of movable part inside glass substrate using ultrafast laser

2021 ◽  
Vol 9 (1) ◽  
Author(s):  
Jeongtae Kim ◽  
Sung-Il Kim ◽  
Yeun-Ho Joung ◽  
Jiyeon Choi ◽  
Chiwan Koo
Keyword(s):  
Glass Substrate ◽  
Hybrid Process ◽  
Direct Writing ◽  
Microfluidic Mixer ◽  
Glass Substrates ◽  
Potential Applications ◽  
Wet Chemical ◽  
Laser Induced Etching ◽  
Relationship Of ◽  
The Relationship

AbstractWe demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching. To obtain an influence by the optical characteristics of a glass substrate when fabricating a 3D microstructure using the SLE, we analyzed the relationship of their dimensions between the designed and the fabricated devices. Two 3D microfluidic devices are designed and fabricated on glass substrates as the demonstrations of the hybrid process: a 3D microfluidic valve device with a movable plug and a 3D microfluidic mixer with a rotatable impeller and multilayer microchannels. The valving plug and the impeller of each device are successfully moved and rotated. The smallest structure is a pillar of the impeller device, and its size is 29 μm (diameter) × 277 μm (height). We expect this study to be extended to potential applications in 3D glass microfabrication and microfluidic systems.

scholarly journals Self Regulation and Online Sexual Behavior Among University Students

2020 ◽  
Vol 5 (12) ◽  
pp. 250-256
Author(s):  
Norsimah Dasan ◽  
Mohd Mahadzir Rahimi Mohamed Nawi ◽  
Mohamad Nazri Ismail
Keyword(s):  
University Students ◽  
Sexual Behaviour ◽  
Technology Development ◽  
Pearson Correlation ◽  
Self Regulation ◽  
Simple Random Sampling ◽  
Information Communication ◽  
The Difference ◽  
Relationship Of ◽  
The Relationship

The urge of information communication technology development stimulates university students with various sexual-oriented materials and can lead them into premarital relationship. Self regulation believed as one of the factors that help an individual to control themselves and plan action to avoid online sexual behaviour. Therefore, this research is meant to determine the level of self regulation and online sexual behaviour, the difference of self regulation and online sexual behaviour based on gender, and the relationship of self regulation and online sexual among university students.  The sample involved was 882 students selected using simple random sampling. Data analyses was conducted using SPSS 25.0 software. Descriptive analyses show an average level of self regulation, while online sexual behaviour was found at low level. Inference analyses using t-test indicates differences between online sexual behaviour between male and female students, while no significant differences in self regulations based on gender. Pearson correlation analyses founded that; self regulation has a significance relationship with online sexual behaviour among university students. The results of this research give input to students and university to improve student self regulation and develop rules that can control online sexual behaviour.

scholarly journals A családi vállalkozások pénzügyi sajátosságai (Specialities of Family Business Finances)

2012 ◽  
pp. 15-24
Author(s):  
Judit Csákné Filep
Keyword(s):  
Family Business ◽  
Financial Management ◽  
Family Businesses ◽  
The Family ◽  
Financial Challenges ◽  
Basic Characteristics ◽  
Relationship Of ◽  
The Relationship

A tanulmány a család és a vállalkozás pénzügyeinek kapcsolata, az utódlás finanszírozásának kérdései, a pénzügyi menedzsment, a hitelfelvétel és eladósodottság, a tőke forrása, a családon kívüli tőkebevonás és az eladás pénzügyi vonatkozásai mentén vizsgálja a családi vállalkozások pénzügyei sajátosságait. Ilyen sajátosságok bőséggel vannak, a családi cégek a nem családiaktól számos vonásukban különböznek, még pénzügyi tekintetben is egyedi jellemzőkkel bírnak. Ezek a pénzügyi ismérvek nem a szektorra jellemző diszfunkcionalitások, hanem a családi cégek alapvető jellemzőiből fakadó üzleti viselkedésmódok. A szerző jelen munkájában arra vállalkozik, hogy rávilágítson a családi vállalkozások pénzügyeinek ismérveire. ______ Family businesses play an important role in every economy of the world’s countries and they differ from non-family ones along several features. They have also unique characteristics in their financial affairs. The author of this work undertakes to highlight that the characteristics of family business finances are not improper functionalities of the sector but unique business behaviours of family businesses stemming from their basic characteristics. The study examines the peculiarities of family business finances along the relationship of financial affairs of the family and the business, the financial challenges of succession, the financial management, the source of the borrowing and the capital, the indebtedness and the financial aspects of selling.

Six Social Elements in Search of an Essence

2017 ◽  
Author(s):  
Roger Giner-Sorella
Keyword(s):  
Human Nature ◽  
Moral Disengagement ◽  
Building Blocks ◽  
Helping Behavior ◽  
Abstract Concepts ◽  
Human Relationships ◽  
Human Essence ◽  
Human Uniqueness ◽  
Relationship Of ◽  
The Relationship

This chapter examines the six elements of sociality and highlights some common and interrelated themes that emerge from the previous section. One such theme, for which the authors take different positions, is the relationship of “animality” to the human essence. Other important facets of humanity are discussed: moral disengagement, human nature, and human uniqueness. The chapter considers how abstract concepts such as morality and justice offer ways in which to reflect upon the more basic building blocks of human relationships such as punishment and helping. Different motivations and reactions concerning helping behavior are proposed to have roots in uniquely human phenomena such as gratitude and self-regard.

VOLUNTEERISM AND SELF-ESTEEM OF YOUNG PEOPLE

2007 ◽  
Vol 41 (01n02) ◽  
pp. 39-64
Author(s):  
FRANCIS WING-LIN LEE ◽  
BOBY MOON-CHEUNG CHIM
Keyword(s):  
Hong Kong ◽  
Young People ◽  
Building Blocks ◽  
Self Esteem ◽  
Control Group ◽  
Relationship Of ◽  
The Relationship

Studies on the relationship of volunteerism and self-esteem of young people have been scarcely conducted in Hong Kong. This paper reports such a study. Conceptually, Borba's five building blocks of self-esteem — Security, Selfhood, Affiliation, Competence and Mission — were employed in this study. Based on the concepts of the five building blocks, a measuring inventory was developed. Some 218 young respondents, who had more than a year of volunteer experience, were invited to complete a questionnaire. Their responses were compared to a control group of 129 young respondents who had no volunteer experience. The findings indicate that volunteer experience of young people can promote their self-esteem. Based on the findings, some recommendations on working with young people in order to promote their volunteerism and directions of further studies are suggested.

scholarly journals A Quest to Prohibit Immoral Inventions? An Analysis of Law and Policy in Human Biotechnology

2021 ◽  
Vol 3 (3) ◽  
pp. 61-65
Author(s):  
Kun Shao
Keyword(s):  
Intellectual Property ◽  
Property Rights ◽  
Intellectual Property Rights ◽  
Rapid Evolution ◽  
Law And Policy ◽  
Patent Systems ◽  
Relationship Of ◽  
The Relationship

This paper consists of an identification and analysis of the place of, and role of ethics play, in the various patent systems currently in force in Europe. As for the rapid evolution of biotechnology advances, it is significant to observe the response from legislators and the measures put in place to address the further issues. Contemporaneously, this work aims to act as a commentary on the relationship of biotechnology with intellectual property rights, and on the role played in this respect by law.

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