scholarly journals Increasing the mean grain size in copper films and features

2008 ◽  
Vol 23 (3) ◽  
pp. 642-662 ◽  
Author(s):  
K. Vanstreels ◽  
S.H. Brongersma ◽  
Zs. Tokei ◽  
L. Carbonell ◽  
W. De Ceuninck ◽  
...  

A new grain-growth mode is observed in thick sputtered copper films. This new grain-growth mode, also referred to in this work as super secondary grain growth (SSGG) leads to highly concentric grain growth with grain diameters of many tens of micrometers, and drives the system toward a {100} texture. The appearance, growth dynamics, final grain size, and self-annealing time of this new grain-growth mode strongly depends on the applied bias voltage during deposition of these sputtered films, the film thickness, the post-deposition annealing temperature, and the properties of the copper diffusion barrier layers used in this work. Moreover, a clear rivalry between this new growth mode and the regularly observed secondary grain-growth mode in sputtered copper films was found. The microstructure and texture evolution in these films is explained in terms of surface/interface energy and strain-energy density minimizing driving forces, where the latter seems to be an important driving force for the observed new growth mode. By combining these sputtered copper films with electrochemically deposited (ECD) copper films of different thickness, the SSGG growth mode could also be introduced in ECD copper, but this led to a reduced final SSGG grain size for thicker ECD films. The knowledge about the thin-film level is used to also implement this new growth mode in small copper features by slightly modifying the standard deposition process. It is shown that the SSGG growth mode can be introduced in narrow structures, but optimizations are still necessary to further increase the mean grain size in features.

1994 ◽  
Vol 343 ◽  
Author(s):  
J. A. Floro ◽  
C. V. Thompson

ABSTRACTAbnormal grain growth is characterized by the lack of a steady state grain size distribution. In extreme cases the size distribution becomes transiently bimodal, with a few grains growing much larger than the average size. This is known as secondary grain growth. In polycrystalline thin films, the surface energy γs and film/substrate interfacial energy γi vary with grain orientation, providing an orientation-selective driving force that can lead to abnormal grain growth. We employ a mean field analysis that incorporates the effect of interface energy anisotropy to predict the evolution of the grain size/orientation distribution. While abnormal grain growth and texture evolution always result when interface energy anisotropy is present, whether secondary grain growth occurs will depend sensitively on the details of the orientation dependence of γi.


2017 ◽  
Vol 898 ◽  
pp. 1459-1467
Author(s):  
Guo Ping Li ◽  
Wen Chen ◽  
Li Hui Sun ◽  
Feng Hua Luo ◽  
Yong Du ◽  
...  

Pre-alloyed Fe/Mo powder was manufactured by water atomization method with different molybdenum contents of 1.6%, 2.21%, 2.87%, 4.34%, 6.5% (in wt. %),respectively, and this powder was used as binder to fabricate TiC steel-bonded carbide. The mean grain size of the ball milled powders was smaller because of the increase of hardness and brittleness due to the existence of molybdenum in Fe/Mo pre-alloyed powder TiC phase grew slowly and uniformly owning to the uniform distribution and low activity of molybdenum as a result of the adding method (compared with the adding method of pure metallic molybdenum powder), whereas the abnormal grain growth was suppressed. Results showed that the microstructure of the alloy was finer obviously and the density, hardness, strength and impact toughness of the alloy all increased to some extent.


2014 ◽  
Vol 685 ◽  
pp. 22-26
Author(s):  
Yan Liu ◽  
Kai Wang ◽  
Yang Liu ◽  
Jian Ming Wang

A kind of HSLA steel is designed in this experiment. The thermal stability second phase particles which would not be dissolved or aggregated at high temperature will be expected by means of adding calcium and magnesium into the steel in the form of Si-Ca alloy and Mg-Zr alloy, respectively. The effect of calcium and magnesium addition on the cast microstructure grain size of HSLA steel was analysed. The grain size of the cast microstructure in each sample was measured by the metalloscope observation method. The results show that a large amount of oxides generated from the adding Ca and Mg elements into the steel can accelerate the nucleation and refrain the grain growth, so the grains are refined. In the process of improving temperature, the oxides of Ca and Mg elements located in the interior of austenite can accelerate the nucleation and impede the grain growth. Almost every grain becomes finer after adding Ca and Mg elements. When adding 5wt% Mg, the mean grain size is the smallest, 0.712 mm, while the biggest grain size is 1.115mm in raw steel. The grain size in Mg 5wt% steel is refined by 36.1% in contrast with the raw steel. According to the adding amounts of Ca and Mg elements in experimental steel, the range of the mean grain size is from 0.712 mm to 0.975 mm.


1995 ◽  
Vol 398 ◽  
Author(s):  
R. A. Ristau ◽  
K. Barmak ◽  
D. W. Hess ◽  
K. R. Coffey ◽  
M. A. Parker ◽  
...  

ABSTRACTOrdering and grain growth have been studied in a 10 nm thick CoPt alloy film of equiatomic composition annealed in the temperature range 550–700°C by quantifying ordered domain size, volume fraction ordered, grain size, and grain size distribution. Ordering occurs by nucleation and growth of Ll0 ordered domains, with a mean size of 3 nm at 550°C and 19 nm at 700°C. The volume percent ordered shows a dramatic increase from <y1% to approximately 28% between the two extremes of annealing temperature. The mean grain size of the as-deposited films is 5 nm and the entire film is face-centered cubic. Upon annealing in the temperature range 550–600°C, the mean grain size reaches a stagnation limit of 27 nm and the grain size distribution is log-normal. Grain growth resumes beyond 600°C and the mean grain size reaches as high as 55 nm at 700°C. The increase in the coercivity of the annealed films follows the increase in the ordered fraction more closely than the increase in grain size. The shape of the M-H loop shows evidence of coupling between the magnetically hard (ordered) and soft (disordered) regions.


2013 ◽  
Vol 395-396 ◽  
pp. 262-265 ◽  
Author(s):  
Hong Mei Cheng ◽  
Chuan Zhen Huang

A Monte Carlo Potts model coupled with sintering pressure for the sintering process of nanocomposite ceramic tool materials is proposed, the relation between grain growth and sintering pressure is presented. The grain growth process at different sintering pressure is investigated in this model, and the effect of sintering pressure on microstructure evolution is discussed, it is found that the mean grain size increases with the increase of sintering pressure during simulation. The results from this simulation are shown to correlate well with the experimental observations.


2007 ◽  
Vol 534-536 ◽  
pp. 1205-1208 ◽  
Author(s):  
Chen Guang Lin ◽  
Guan Sen Yuan

Nano-grained WC-10Co hardmetal can be made by doping a new invented VC-based multi-grain-growth-inhibitor and suitable technical processing. The specifications for quantitative measurement of the grain size of WC in the alloy were investigated. It is very important to obtain the SE images of the alloy with good contrast and clear profile of WC grains by FESEM; then the linear intercept (LI) method was used to quantitatively measure the intercepts of WC grains. When the surveyed intercept numbers of WC grain exceeded 200, the statistic data for the mean grain size of WC were reproduced. The discriminative minimal grain size of used LI method was 12 nm; the maximum intercept of WC grain was 109 nm; the average intercept of WC grains was 45 nm and the corresponding 3D mean grain size of WC was 70 nm which is agreeable with the XRD outcome.


2017 ◽  
Vol 53 (3) ◽  
pp. 263-270
Author(s):  
T.D. Mutava ◽  
L.A. Cornish ◽  
I. Sigalas

The metastable (?Ti) alloy Ti-2.7Al-5.7Fe-6Mo-6V (wt%) was produced by semi-centrifugal casting of blended elemental powders. The phases were identified by X-ray diffraction (XRD), and overall composition was measured by X-ray fluorescence (XRF). The beta transus was determined by differential thermal analysis (DTA) and optical microscopy. The cast alloys were annealed at different temperatures under argon, up to 900oC, where they were in the solution-treated state, and the solution-treated alloys were aged between 400oC and 600oC. The kinetics of grain growth during heat treatment of the as-cast and solution-treated alloys was investigated by metallography, using the grain intercept method. Grain growth depended on whether the matrix was (?Ti) or (?Ti), and on the competing precipitate dissolution, or nucleation and growth processes. The as-cast alloy had a mean grain size of 19 ? 7?m, which increased to 63 ? 21?m after heat treating at 500?C for 2h. The alloy was duplex between 590?C and 800?C, and completely (?Ti) above 800?C. After solution treatment, the mean grain size was 40 ? 16 ?m, which was smaller than at the lower heat treatment temperatures. Following solution treatment, the mean grain size increased with increasing ageing temperature, up to 66 ? 22?m after 2h at 600?C. The growth exponents were lower than the 0.5 for normal grain growth in both cases, and there was an incubation period at 300?C and 400?C when the alloy was not solution-treated. Minimal grain growth was observed close to the beta transus.


2021 ◽  
Vol 56 (19) ◽  
pp. 11237-11247 ◽  
Author(s):  
Johannes Pötschke ◽  
Manisha Dahal ◽  
Mathias Herrmann ◽  
Anne Vornberger ◽  
Björn Matthey ◽  
...  

AbstractDense (Hf, Ta, Nb, Ti, V)C- and (Ta, Nb, Ti, V, W)C-based high-entropy carbides (HEC) were produced by three different sintering techniques: gas pressure sintering/sinter–HIP at 1900 °C and 100 bar Ar, vacuum sintering at 2250 °C and 0.001 bar as well as SPS/FAST at 2000 °C and 60 MPa pressure. The relative density varied from 97.9 to 100%, with SPS producing 100% dense samples with both compositions. Grain size measurements showed that the substitution of Hf with W leads to an increase in the mean grain size of 5–10 times the size of the (Hf, Ta, Nb, Ti, V,)C samples. Vacuum-sintered samples showed uniform grain size distribution regardless of composition. EDS mapping revealed the formation of a solid solution with no intermetallic phases or element clustering. X-ray diffraction analysis showed the structure of mostly single-phase cubic high-entropy carbides. Hardness measurements revealed that (Hf, Ta, Nb, Ti, V)C samples possess higher hardness values than (Ta, Nb, Ti, V, W)C samples.


Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 334
Author(s):  
Aidong Xia ◽  
Jie Yin ◽  
Xiao Chen ◽  
Zhengren Huang ◽  
Xuejian Liu ◽  
...  

In this work, a (SiC-AlN)/ZrB2 composite with outstanding mechanical properties was prepared by using polymer-derived ceramics (PDCs) and hot-pressing technique. Flexural strength reached up to 460 ± 41 MPa, while AlN and ZrB2 contents were 10 wt%, and 15 wt%, respectively, under a hot-pressing temperature of 2000 °C. XRD pattern-evidenced SiC generated by pyrolysis of polycarbosilane (PCS) was mainly composed by 2H-SiC and 4H-SiC, both belonging to α-SiC. Micron-level ZrB2 secondary phase was observed inside the (SiC-AlN)/ZrB2 composite, while the mean grain size (MGS) of SiC-AlN matrix was approximately 97 nm. This unique nano-micron hybrid microstructure enhanced the mechanical properties. The present investigation provided a feasible tactic for strengthening ceramics from PDCs raw materials.


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