A Systematic Method for Extracting Structural Parameters from Low Angle X-Ray Reflectivity Measurements on Multilayers
Keyword(s):
X Ray
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AbstractX-ray diffraction is one of the main methods of determining the structure of multilayers. Low angle reflectivity measurements are particulary useful for multilayers containing polycrystalline or amorphous constituents, and for obtaining specific structural data. We present a method based on both kinematic and dynamic scattering calculations, and use it to extract specific structural parameters such as the roughness or diffuseness of the external surface, the thickness of the constituent layers, and the roughness or diffuseness of the internal interfaces. Results are given for a sputtered A1/A12O3 multilayer.
2012 ◽
Vol 76
(4)
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pp. 963-973
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2010 ◽
Vol 24
(30)
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pp. 5973-5985