Cycling Times of Thin-Film NiTi on Si
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AbstractThe thermo-mechanical properties of NiTi are well known for bulk material although its deposition and utilization as a thin film are still in their earliest stages. The deposition of thin-films of Shape Memory Effect NiTi onto Si(100) wafers offers several advantages over bulk NiTi, including fast response times and comparitively large transformation forces, and so is a promising candidate as a micro-actuator for MicroElectroMechanical (MEMS) systems as well as in strain measurements. The response time for a variety of NiTi layers were modelled under different boundary conditions and show response times similar to the acoustic velocities for one micron thick NiTi.
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1988 ◽
Vol 3
(5)
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pp. 931-942
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1992 ◽
Vol 7
(6)
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pp. 1553-1563
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