Characterization of Mechanical Properties of Thin Films by Nanoindentation Technique and Finite Element Simulation

2002 ◽  
Author(s):  
Zhaohui Shan ◽  
Suresh K. Sitaraman
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Strain Hardening Exponent ◽  
Plastic Properties ◽  
Titanium Thin Film ◽  
Nanoindentation Technique ◽  
Element Simulation ◽  
Titanium Thin Films

Titanium thin films have been widely used in microelectronics due to their good adhesion to substrates, such as Silicon wafer and Quartz. However, mechanical behavior of Titanium thin films has not been well characterized. This paper presents a methodology that combines the nanoindentation technique and finite element modeling to characterize the mechanical (elastic and plastic) properties of thin film with its application on Titanium thin film deposited on silicon substrate. The results show that the elastic properties (Young’s modulus) of the Titanium thin film does not change much from the bulk Titanium, and the plastic properties (yield stress and strain hardening exponent) of the Titanium thin film are higher than those of bulk Titanium. This method is also applicable for the study of mechanical properties of other thin films and small volume materials.

Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films

1992 ◽  
Vol 7 (6) ◽  
pp. 1553-1563 ◽  
Author(s):  
Martha K. Small ◽  
W.D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Material Properties ◽  
Deformation Behavior ◽  
Initial Conditions ◽  
Standard Technique ◽  
Bulge Test ◽  
The Finite Element Method

Since its first application to thin films in the 1950's the bulge test has become a standard technique for measuring thin film mechanical properties. While the apparatus required for the test is simple, interpretation of the data is not. Failure to recognize this fact has led to inconsistencies in the reported values of properties obtained using the bulge test. For this reason we have used the finite element method to model the deformation behavior of a thin film in a bulge test for a variety of initial conditions and material properties. In this paper we will review several of the existing models for describing the deformation behavior of a circular thin film in a bulge test, and then analyze these models in light of the finite element results. The product of this work is a set of equations and procedures for analyzing bulge test data that will improve the accuracy and reliability of this technique.

The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films

2008 ◽  
Vol 587-588 ◽  
pp. 839-843 ◽  
Author(s):  
Carlos W. Moura e Silva ◽  
Jose R.T. Branco ◽  
Marta C. Oliveira ◽  
Jorge M. Antunes ◽  
Albano Cavaleiro
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element ◽  
Stainless Steel ◽  
Elastic Modulus ◽  
Finite Element Simulation ◽  
Gas Mixtures ◽  
Element Simulation ◽  
Si Doped ◽  
Si Content

In this work, Si-doped DLC films were deposited on stainless steel (316SS) and polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.% SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30 GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the loading curve which was interpreted by finite element simulation and nanoscratching techniques.

scholarly journals The elastic-plastic properties of an anti-icing coating on an aluminum alloy: Experimental and numerical approach

2021 ◽  
Vol 30 (1) ◽  
pp. 1-8
Author(s):  
Wei Zhang ◽  
Sheng-Li Lv ◽  
Xiaosheng Gao ◽  
Tirumalai S. Srivatsan
Keyword(s):  
Finite Element ◽  
Finite Element Simulation ◽  
Numerical Approach ◽  
Nanoindentation Test ◽  
Strain Hardening Exponent ◽  
Plastic Properties ◽  
Elastic Plastic ◽  
Element Simulation ◽  
Nanoindentation Experiment ◽  
Numerical Finite Element

Abstract In this paper, an attempt is made to describe the method that combines the results obtained from nanoindentation experiment with finite element simulation to determine or establish the elastic-plastic properties of a super-hydrophobic anti-icing coating. The nanoindentation test was conducted and elastic properties of the coating, to include elastic modulus and hardness were obtained. The plastic properties, to include yield stress, monotonic strength coefficient and monotonic strain hardening exponent, were obtained using an inverse, iterative method of experimental measurement in synergism with finite element simulation. This approach, which is a combination of experimental data obtained from the nanoindentation test and results obtained from numerical finite element simulation, was found to be effective for determining mechanical properties of the chosen coating.

Method for Determining the Plastic Properties of Metallic Materials by Instrumented Indentation with Dual Pyramidal Indenters

2014 ◽  
Vol 941-944 ◽  
pp. 1445-1452
Author(s):  
Wei Chen ◽  
De Jun Ma ◽  
Jia Liang Wang ◽  
Yong Huang
Keyword(s):  
Finite Element ◽  
Yield Strength ◽  
Strain Hardening ◽  
Engineering Application ◽  
Strain Hardening Exponent ◽  
Metallic Materials ◽  
Instrumented Indentation ◽  
Plastic Properties ◽  
Functional Relationships ◽  
Element Simulation

Method for determining the plastic properties of metallic materials was proposed based on the functional relationships between representative stress, representative strain and nominal hardness which were established with the aid of dimensional analysis and finite element simulation. The errors of 0.2% yield strength and strain hardening exponent of five engineering metals were from-17.1% to 15.4% and from -0.125 to 0.11, respectively,which satisfied the need of engineering application and verified the effectiveness of the method.

Finite Element Simulation of Indentation Behavior of thin Films

1991 ◽  
Vol 239 ◽  
Author(s):  
D. T. Madsen ◽  
R. J. Giovinazzo ◽  
J. E. Ritter
Keyword(s):  
Thin Films ◽  
Finite Element Analysis ◽  
Finite Element ◽  
Finite Element Simulation ◽  
Compliant Coating ◽  
Element Analysis ◽  
Plastic Properties ◽  
Element Simulation ◽  
Pile Up ◽  
Measured Hardness

ABSTRACTNanoindentation experiments are now widely used to study the elastic and plastic properties of thin films. Simulation of these experiments has been performed using finite element analysis. Results show the large influence that pile-up or sink-in behavior have on hardness calculations. Results also show that a compliant substrate significantly affects the measured hardness of a stiffer coating. The measured hardness of a compliant coating is less effected by a stiffer substrate.

Numerical study on the measurement of thin film mechanical properties by means of nanoindentation

2001 ◽  
Vol 16 (10) ◽  
pp. 2974-2982 ◽  
Author(s):  
Xi Chen ◽  
Joost J. Vlassak
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Finite Element Method ◽  
Finite Element ◽  
Numerical Study ◽  
Substrate Effect ◽  
The Finite Element Method ◽  
Effect Factor ◽  
A New Technique

Nanoindentation is a technique commonly used for measuring thin film mechanical properties such as hardness and stiffness. In this study, we used the finite element method to investigate the effect of substrate and pileup on hardness and stiffness measurements of thin film systems. We define a substrate effect factor and construct a map that may be useful in the interpretation of indentation measurements when it is not possible to make indentations shallow enough to avoid the influence of the substrate on the measurements. A new technique for measuring mechanical properties of thin films by nanoindentation is suggested at the end of this article.

Study on Welding Deformation and Residual Stress of H-Section Beam Based on Finite Element Method

2017 ◽  
Vol 753 ◽  
pp. 305-309 ◽  
Author(s):  
Xu Lu
Keyword(s):  
Mechanical Properties ◽  
Residual Stress ◽  
Finite Element ◽  
Source Parameters ◽  
Welding Process ◽  
Steel Structure ◽  
Bottom Plate ◽  
Welding Deformation ◽  
Element Simulation ◽  
Main Components

The welding H-section beam has good mechanical properties with its superior structure. So they become the main components of steel structure and have been widely used. In this paper, the welded H-section beam is used as the research object. The finite element simulation model is established. The heat source parameters are determined. The deformation of the steel due to the welding process is studied. The results show that the bottom plate and the bottom plate inward bending is about 2.32mm cause by welding process. The residual stress can reach 400MPa.

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Single Layer ◽  
Beam Theory ◽  
New Technique ◽  
Young’S Moduli ◽  
Silicon Micromachining ◽  
A New Technique

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

scholarly journals Influence of the Mechanical Properties of Elastoplastic Materials on the Nanoindentation Loading Response

Materials ◽  
2020 ◽  
Vol 13 (21) ◽  
pp. 4842
Author(s):  
Huanping Yang ◽  
Wei Zhuang ◽  
Wenbin Yan ◽  
Yaomian Wang
Keyword(s):  
Mechanical Properties ◽  
Finite Element Method ◽  
Finite Element ◽  
The Other ◽  
Equivalent Model ◽  
Strain Hardening Exponent ◽  
Mechanical Parameters ◽  
The Finite Element Method ◽  
Fem Simulations ◽  
Elastoplastic Materials

The nanoindentation loading response of elastoplastic materials was simulated by the finite element method (FEM). The influence of the Young’s modulus E, yield stress σy, strain hardening exponent n and Poisson’s ratio ν on the loading response was investigated. Based on an equivalent model, an equation with physical meaning was proposed to quantitatively describe the influence. The calculations agree well with the FEM simulations and experimental results in literature. Comparisons with the predictions using equations in the literature also show the reliability of the proposed equation. The investigations show that the loading curvature C increases with increasing E, σy, n and ν. The increase rates of C with E, σy, n and ν are different for their different influences on the flow stress after yielding. It is also found that the influence of one of the four mechanical parameters on C can be affected by the other mechanical parameters.

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