Origin of Voids at the Interface of Wafer Bonded Sapphire on Sapphire

2000 ◽  
Vol 654 ◽  
Author(s):  
Stephan Senz ◽  
Pascal Kopperschmidt ◽  
Nikolai Dimitri Zakharov

AbstractTwo sapphire (Al2O3, r-cut) wafers were bonded at room temperature. The bonding energy increased during heating up to 1100 °C. The interface was investigated by plan-view and cross-section TEM. The bonding strength after heating to 1100 °C is similar to the bulk bonding strength. A high density of voids at the bonded interface was observed. The voids are elongated along the interface in a pancake shape. The surfaces are low index planes. The volume inside the voids is higher than expected from a model, where a hydrophobic initial bonding is assumed. The strength of initial bonding and the free volume at the interface can be understood, if the sapphire surfaces are hydrophilic and covered by several monolayers of water during initial bonding. During annealing the water diffuses out along the bonded interface and a free volume remains.

Metals ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 607
Author(s):  
A. I. Alateyah ◽  
Mohamed M. Z. Ahmed ◽  
Yasser Zedan ◽  
H. Abd El-Hafez ◽  
Majed O. Alawad ◽  
...  

The current study presents a detailed investigation for the equal channel angular pressing of pure copper through two regimes. The first was equal channel angular pressing (ECAP) processing at room temperature and the second was ECAP processing at 200 °C for up to 4-passes of route Bc. The grain structure and texture was investigated using electron back scattering diffraction (EBSD) across the whole sample cross-section and also the hardness and the tensile properties. The microstructure obtained after 1-pass at room temperature revealed finer equiaxed grains of about 3.89 µm down to submicrons with a high density of twin compared to the starting material. Additionally, a notable increase in the low angle grain boundaries (LAGBs) density was observed. This microstructure was found to be homogenous through the sample cross section. Further straining up to 2-passes showed a significant reduction of the average grain size to 2.97 µm with observable heterogeneous distribution of grains size. On the other hand, increasing the strain up to 4-passes enhanced the homogeneity of grain size distribution. The texture after 4-passes resembled the simple shear texture with about 7 times random. Conducting the ECAP processing at 200 °C resulted in a severely deformed microstructure with the highest fraction of submicron grains and high density of substructures was also observed. ECAP processing through 4-passes at room temperature experienced a significant increase in both hardness and tensile strength up to 180% and 124%, respectively.


2013 ◽  
Vol 544 ◽  
pp. 321-325
Author(s):  
De Tian Wan ◽  
Yi Wang Bao ◽  
Xiao Gen Liu ◽  
Yuan Tian ◽  
Run Run Li

Ti3SiC2-Al2O3joint with strong interface has potential high temperature applications because it combines with the merits of hard ceramics and soft ceramics. The safety is strongly dependent on the interfacial bonding strength between Ti3SiC2and Al2O3. In this work, the cross-section method was suggested to evaluate the tensile and shear bonding strength for Ti3SiC2-Al2O3joint from room temperature to 800 °C in air. A novel testing fixture made of SiC was designed and machined to avoid the bending stress at the bonding surface during the testing process. It is indicated that the measured shear bonding strength is usually higher than tensile bonding strength for Ti3SiC2-Al2O3joint. Both the tensile and shear bonding strength are decreased with the increment of testing temperatures. At 800 °C, the tensile and shear bonding strength are declined to be about 43.15% and 45.02% compared with those at room temperature, relatively. The mechanism for the strong interface between Ti3SiC2and Al2O3is also discussed.


1997 ◽  
Vol 482 ◽  
Author(s):  
N. Wang ◽  
K. K. Fung ◽  
P. Yu ◽  
Z. K. Tang ◽  
G. K. L. Wong ◽  
...  

AbstractWe have studied the microstructures of lasing and non-lasing ZnO films on sapphire in plan-view and cross-section by transmission electron microscopy (TEM). While ZnO films in general are made up of cloumnar close-packed c-axis misoriented nanocrystals, the misorientation in nonlasing film, typically 5°, is considerably larger than lasing film, typically less than 1°. A rather high density of pinholes or nanotubes is associated with the highly misoriented films. The misorientation between adjacent grains is taken up by grain boundary dislocations. Room temperature lasing films contain a high density of threading boundary edge dislocations, in excess of 1010 cm−2. But faceting in the columnar nanocrystals is not well developed so that the grain boundaries are not clearly visible. Tilting of (0001) lattice planes between grains originating from substrate surface step and growth fault step, however, has been observed in high resolution electron microscopy (HREM) images.


Author(s):  
M. H. Rhee ◽  
W. A. Coghlan

Silicon is believed to be an almost perfectly brittle material with cleavage occurring on {111} planes. In such a material at room temperature cleavage is expected to occur prior to any dislocation nucleation. This behavior suggests that cleavage fracture may be used to produce usable flat surfaces. Attempts to show this have failed. Such fractures produced in semiconductor silicon tend to occur on planes of variable orientation resulting in surfaces with a poor surface finish. In order to learn more about the mechanisms involved in fracture of silicon we began a HREM study of hardness indent induced fractures in thin samples of oxidized silicon.Samples of single crystal silicon were oxidized in air for 100 hours at 1000°C. Two pieces of this material were glued together and 500 μm thick cross-section samples were cut from the combined piece. The cross-section samples were indented using a Vicker's microhardness tester to produce cracks. The cracks in the samples were preserved by thinning from the back side using a combination of mechanical grinding and ion milling.


AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025120
Author(s):  
C. Stanford ◽  
M. J. Wilson ◽  
B. Cabrera ◽  
M. Diamond ◽  
N. A. Kurinsky ◽  
...  

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 431
Author(s):  
Giorgio Turri ◽  
Scott Webster ◽  
Michael Bass ◽  
Alessandra Toncelli

Spectroscopic properties of neodymium-doped yttrium lithium fluoride were measured at different temperatures from 35 K to 350 K in specimens with 1 at% Nd3+ concentration. The absorption spectrum was measured at room temperature from 400 to 900 nm. The decay dynamics of the 4F3/2 multiplet was investigated by measuring the fluorescence lifetime as a function of the sample temperature, and the radiative decay time was derived by extrapolation to 0 K. The stimulated-emission cross-sections of the transitions from the 4F3/2 to the 4I9/2, 4I11/2, and 4I13/2 levels were obtained from the fluorescence spectrum measured at different temperatures, using the Aull–Jenssen technique. The results show consistency with most results previously published at room temperature, extending them over a broader range of temperatures. A semi-empirical formula for the magnitude of the stimulated-emission cross-section as a function of temperature in the 250 K to 350 K temperature range, is presented for the most intense transitions to the 4I11/2 and 4I13/2 levels.


2021 ◽  
Author(s):  
Hazem Abouelleil ◽  
Pierre Colon ◽  
Christophe Jeannin ◽  
Alexis Goujat ◽  
Nina Attik ◽  
...  

2010 ◽  
Vol 16 (6) ◽  
pp. 662-669 ◽  
Author(s):  
S. Simões ◽  
F. Viana ◽  
A.S. Ramos ◽  
M.T. Vieira ◽  
M.F. Vieira

AbstractReactive multilayer thin films that undergo highly exothermic reactions are attractive choices for applications in ignition, propulsion, and joining systems. Ni/Al reactive multilayer thin films were deposited by dc magnetron sputtering with a period of 14 nm. The microstructure of the as-deposited and heat-treated Ni/Al multilayers was studied by transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) in plan view and in cross section. The cross-section samples for TEM and STEM were prepared by focused ion beam lift-out technique. TEM analysis indicates that the as-deposited samples were composed of Ni and Al. High-resolution TEM images reveal the presence of NiAl in small localized regions. Microstructural characterization shows that heat treating at 450 and 700°C transforms the Ni/Al multilayered structure into equiaxed NiAl fine grains.


1985 ◽  
Vol 25 (01) ◽  
pp. 78-88 ◽  
Author(s):  
T.K. Perkins ◽  
J.A. Gonzalez

Abstract When a cool fluid such as water is injected into a hot reservoir, a growing region of cooled rock is established around the injection well. The rock matrix within the cooled region contracts, and a thermoelastic stress field is induced around the well. For typical waterflooding of a moderately deep reservoir, horizontal earth stresses may be reduced by several hundred psi. If the injection pressure is too high or if suspended solids in the water plug the formation face at the perforations, the formation will be fractured hydraulically. As the fracture grows, the flow system evolves from an essentially circular geometry in the plan view to one characterized more nearly as elliptical. This paper considers thermoelastic stresses that would result from cooled regions of fixed thickness and of elliptical cross section. The stresses for an infinitely thick reservoir have been deduced from information available in public literature. A numerical method has been developed to calculate thermoelastic stresses induced within elliptically shaped regions of finite thickness. Results of these two approaches were combined, and empirical equations were developed to give an approximate but convenient, explicit method for estimating induced stresses. An example problem is given that shows how this theory can be applied to calculate the fracture lengths, bottomhole pressures (BHP's), and elliptical shapes of the flood front as the injection process progresses. Introduction When fluids are injected into a well, such as during waterflooding or other secondary or tertiary recovery processes, the temperatures of the injected fluids are typically cooler than the in-situ reservoir temperatures. A region of cooled rock forms around each injection well, and this region grows as additional fluid is injected. Formation rock within the cooled region contracts, and this leads to a decrease in horizontal earth stress near the injection well. In Ref. 1, the magnitude of the reduction in horizontal earth stress was given for the case of a radially symmetrical cooled region. Another factor, which may occur simultaneously, is the plugging of formation rock by injected solids. There is extensive literature indicating that waters normally available for injection contain suspended solids. Laboratory tests demonstrate that these waters, when injected into formation rocks, can plug the face of the rock or severely limit injectivity. In field operations, injection often simply continues at a BHP that is high enough to initiate and extend hydraulic fractures." The injected fluid then can leak off readily through the large fracture face area. Because of the lowering of horizontal earth stresses that results from cold fluid injection, hydraulic fracturing pressures can be much lower than would be expected for an ordinary low-leakoff hydraulic fracturing treatment. For this reason, the well operator may not be aware that injected fluid is being distributed through an extensive hydraulic fracture. If injection conditions are such that a hydraulic fracture is created, then the flow system will evolve from an essentially circular geometry in the plan view to one characterized more nearly as elliptical. In this paper, thermoelastic stresses for cooled regions of fixed thickness and of elliptical cross section are determined, and a theory of hydraulic fracturing of injection wells is developed. Conditions under which secondary fractures (perpendicular to the primary, main fracture) will open also are discussed. Finally, an example problem is given to illustrate how this theory can be applied to calculate fracture lengths, BHP'S, and elliptical shapes of the flood front as the injection process progresses. Thermoelastic Stresses in Regions of Elliptical Cross Section If fluid of constant viscosity is injected into a line crack (representing a two-wing, vertical hydraulic fracture), the flood front will progress outward. so its outer boundary at any time can be described approximately as an ellipse that is confocal with the line crack. If the injected fluid is at a temperature different from the formation temperature, a region of changed rock temperature with fairly sharply defined boundaries will progress outward from the injection well but lag behind the flood front. The outer boundary of the region of changed temperature also will be elliptical in its plan view and confocal with the line crack (see Fig. 1). Stresses within the region of altered temperature, as well as stress in the surrounding rock, which remains at its initial temperature, will be changed because of the expansion or contraction of the rock within the region of altered temperature. The thermoelastic stresses within an infinitely tall cylinder of elliptical cross section can be determined from information available in the literature. 10 The interior thermoelastic stresses perpendicular and parallel to the major axes of the ellipse are given by Eqs. 1 and 2, respectively. SPEJ P. 78^


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