Ta/low-κ CMP with Colloidal Silica Particles

2003 ◽  
Vol 767 ◽  
Author(s):  
Patrice Beaud ◽  
Didier Bouvet ◽  
Pierre Fazan ◽  
Eric Jacquinot ◽  
Hiroyuki Aoki ◽  
...  
Keyword(s):  
Colloidal Silica ◽  
Dielectric Materials ◽  
Silica Particles ◽  
Integration Scheme ◽  
Force Microscopy ◽  
Atomic Force ◽  
Key Issues ◽  
Cu Interconnect ◽  
The Impact ◽  
Monodisperse Colloidal Silica

AbstractLow-κ/Cu interconnect integration achievement is one of the key issues for the future sub-100 nm technologies. Nowadays, no definitive integration scheme has been reported. Low-κ integration is especially difficult because the trench/via etching and CMP processes can damage its properties. In the present work, we present results on different materials that could be used in such integration. We focused our study on the barrier (Ta/TaN) and on a low-κ material (dense and porous), that is a spin-on-dielectric (SOD) of the methylsilsesquioxane (MSQ) type. CMP slurries were made from monodisperse colloidal silica particles. In a first approach, the slurries compositions mainly differed by their pH and abrasive characteristics. The particle size ranged from 12 to 80 nm, with a pH varying between 2 and 11. The sensitivity of the Ta/TaN and low-κ removal rates will also be reported. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) of the different films were carried out in order to evaluate the impact of CMP on their surface quality. Measurements did not show any surface degradation or/and scratches, and no delamination has been observed. Post-CMP κ value measurements have been carried out to highlight possible damage on the low-ê dielectric materials.

scholarly journals Extracellular Vesicles Analysis in the COVID-19 Era: Insights on Serum Inactivation Protocols towards Downstream Isolation and Analysis

Cells ◽  
2021 ◽  
Vol 10 (3) ◽  
pp. 544
Author(s):  
Roberto Frigerio ◽  
Angelo Musicò ◽  
Marco Brucale ◽  
Andrea Ridolfi ◽  
Silvia Galbiati ◽  
...  
Keyword(s):  
Extracellular Vesicles ◽  
Analytical Techniques ◽  
Heat Inactivation ◽  
Force Microscopy ◽  
Atomic Force ◽  
Droplet Pcr ◽  
Detergent Treatment ◽  
Routine Procedures ◽  
The Impact ◽  
Mirna Content

Since the outbreak of the COVID-19 crisis, the handling of biological samples from confirmed or suspected SARS-CoV-2-positive individuals demanded the use of inactivation protocols to ensure laboratory operators’ safety. While not standardized, these practices can be roughly divided into two categories, namely heat inactivation and solvent-detergent treatments. These routine procedures should also apply to samples intended for Extracellular Vesicles (EVs) analysis. Assessing the impact of virus-inactivating pre-treatments is therefore of pivotal importance, given the well-known variability introduced by different pre-analytical steps on downstream EVs isolation and analysis. Arguably, shared guidelines on inactivation protocols tailored to best address EVs-specific requirements will be needed among the analytical community, yet deep investigations in this direction have not yet been reported. We here provide insights into SARS-CoV-2 inactivation practices to be adopted prior to serum EVs analysis by comparing solvent/detergent treatment vs. heat inactivation. Our analysis entails the evaluation of EVs recovery and purity along with biochemical, biophysical and biomolecular profiling by means of a set of complementary analytical techniques: Nanoparticle Tracking Analysis, Western Blotting, Atomic Force Microscopy, miRNA content (digital droplet PCR) and tetraspanin assessment by microarrays. Our data suggest an increase in ultracentrifugation (UC) recovery following heat treatment; however, it is accompanied by a marked enrichment in EVs-associated contaminants. On the other hand, solvent/detergent treatment is promising for small EVs (<150 nm range), yet a depletion of larger vesicular entities was detected. This work represents a first step towards the identification of optimal serum inactivation protocols targeted to EVs analysis.

Structuring of Silicon Wafer Surfaces on the Sub-100 nm Scale by Hydrogen Plasma Treatments

2003 ◽  
Vol 788 ◽  
Author(s):  
R. Job ◽  
Y. Ma ◽  
A. G. Ulyashin
Keyword(s):  
Hydrogen Plasma ◽  
Structural Defects ◽  
Process Conditions ◽  
Force Microscopy ◽  
Czochralski Silicon ◽  
Atomic Force ◽  
Nano Structures ◽  
Plasma Treatments ◽  
The Impact ◽  
Wafer Surfaces

ABSTRACTHydrogen plasma treatments applied on standard Czochralski silicon (Cz Si) wafers cause a structuring of the surface regions on the sub-100 nm scale, i.e. a thin ‘nano-structured’ Si layer is created up to a depth of ∼ 150 nm. The formation of the ‘nano-structures’ and their evolution in dependence on the process conditions was studied. The impact of post-hydrogenation annealing on the morphology of the structural defects was studied up to 1200 °C. The H-plasma treated and annealed samples were analyzed at surface and sub-surface regions by scanning electron microscopy (SEM), atomic force microscopy (AFM), and μ-Raman spectroscopy.

scholarly journals Deswelling Induced Morphological Changes in Dual pH and Temperature Responsive Ultra-Low Crosslinked Poly (N-Isopropyl Acrylamide)-Co-Acrylic Acid Microgels

2018 ◽  
Author(s):  
Molla Islam ◽  
Maddie Tumbarello ◽  
Andrew Lyon
Keyword(s):  
Light Scattering ◽  
Acrylic Acid ◽  
Morphological Changes ◽  
Scattering Data ◽  
Ionization State ◽  
Force Microscopy ◽  
Temperature Responsive ◽  
Atomic Force ◽  
Isopropyl Acrylamide ◽  
The Impact

<div>We demonstrated the deswelling induced morphological change in dual pH and Temperature responsive ultra-low crosslinked Poly (N-isopropyl acrylamide)-co-acrylic acid microgels. The responsivity with pH and temperature were studied by light scattering and atomic force microscopy. Light scattering data suggest that at pH 4.5 the microgels undergo multiple transitions associated with collapse of pNIPAm-rich segments and repulsion between the AAc-rich segments. The evolution of punctate structures around the periphery or throughout the whole microgels at pH 4.5 and 6.5 respectively was revealed by AFM, further illustrating the heterogeneous deswelling present in the ionized copolymer microgels.</div><div>The impact of this study and understanding how ionization state of copolymer dictates the overall structural properties of microgels will widen our understanding for their applications in biotechnology</div><div><b><br></b></div>

scholarly journals Effects of suspended micro- and nanoscale particles on zooplankton functional diversity of drainage system reservoirs at an open-pit mine

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Anna Maria Goździejewska ◽  
Monika Gwoździk ◽  
Sławomir Kulesza ◽  
Mirosław Bramowicz ◽  
Jacek Koszałka
Keyword(s):  
Functional Diversity ◽  
Drainage System ◽  
Open Pit ◽  
Nanoscale Particles ◽  
X Ray ◽  
Force Microscopy ◽  
Suspension Parameters ◽  
Atomic Force ◽  
Size Of Particles ◽  
The Impact

Abstract Water from mining drainage is turbid because of suspensions. We tested the hypothesis that the chemical composition as well as shape and size of particles in suspensions of natural origin affect the density and functional diversity of zooplankton. The suspensions were analyzed with atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), and optical microscopy. Elements found in the beidellite clays were also identified in the mineral structure of the particles. As the size of the microparticles decreased, the weight proportions of phosphorus, sulfur, and chlorine increased in the suspensions. These conditions facilitated the biomass growth of large and small microphages and raptorials. As the size of the nanoparticles decreased, the shares of silicon, aluminum, iron, and magnesium increased. These conditions inhibited raptorials the most. Ecosystem functionality was the highest with intermediate suspension parameters, which were at the lower range of the microphase and the upper range of the nanophase. The functional traits of zooplankton demonstrate their potential for use as sensitive indicators of disruptions in aquatic ecosystems that are linked with the presence of suspensions, and they facilitate gaining an understanding of the causes and scales of the impact of suspensions.

Protective Coating Based on Organic Silicon Polymer of Ladder Structure Nanostructured with Alkoxysilane

2020 ◽  
Vol 992 ◽  
pp. 580-584
Author(s):  
V.Yu. Chukhlanov ◽  
O.G. Selivanov ◽  
N.V. Chukhlanova
Keyword(s):  
Atomic Force Microscopy ◽  
Physical Properties ◽  
Protective Coating ◽  
Silicon Oxide ◽  
Polymer Composition ◽  
Orthosilicic Acid ◽  
Force Microscopy ◽  
Atomic Force ◽  
Destruction Kinetics ◽  
The Impact

New materials based on oligooxidridsilmethylensiloxysilane nanostructured with ethyl ester of orthosilicic acid – tetraethoxysilane have been studied in the research. Tetraethoxysilane introduction into the composition is supposed to cause its decomposition up to nanoparticles of silicon oxide. The alkoxysilane hydrolytic destruction kinetics and the impact of the composition and nature of the polymer composition components on the physical properties have been studied. Atomic force microscopy was used to study the structurization kinetics of the polymer composition. The composition hydrophobicity was determined by the edge wetting angle. To study the adhesion characteristics of the obtained material, the method of disc separation from the substrate has been used. The relative rigidity has been determined by a pendulum device M3. Atomic force microscopy revealed the presence of nanoscale neoplasms (at average of one hundred twenty per one square micrometer) in diameter from two to five nanometers in the surface structure of the composition, modified with tetraethoxysilane. Herewith the physical properties of the material change: rigidity increases, the edge angle of wetting increases as well. The studied nanostructured compositions can also be applied. For example – they can be used as a protective coating with a set of special properties, such as high hydrophobicity.

scholarly journals Characterisation of InGaN by Photoconductive Atomic Force Microscopy

Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1794 ◽  
Author(s):  
Thomas Weatherley ◽  
Fabien Massabuau ◽  
Menno Kappers ◽  
Rachel Oliver
Keyword(s):  
Atomic Force Microscopy ◽  
Cross Sections ◽  
Indium Content ◽  
Light Emitting ◽  
Force Microscopy ◽  
Turn On ◽  
Atomic Force ◽  
Voltage Curve ◽  
Current Voltage Curve ◽  
The Impact

Nanoscale structure has a large effect on the optoelectronic properties of InGaN, a material vital for energy saving technologies such as light emitting diodes. Photoconductive atomic force microscopy (PC-AFM) provides a new way to investigate this effect. In this study, PC-AFM was used to characterise four thick (∼130 nm) In x Ga 1 − x N films with x = 5%, 9%, 12%, and 15%. Lower photocurrent was observed on elevated ridges around defects (such as V-pits) in the films with x ≤ 12 %. Current-voltage curve analysis using the PC-AFM setup showed that this was due to a higher turn-on voltage on these ridges compared to surrounding material. To further understand this phenomenon, V-pit cross sections from the 9% and 15% films were characterised using transmission electron microscopy in combination with energy dispersive X-ray spectroscopy. This identified a subsurface indium-deficient region surrounding the V-pit in the lower indium content film, which was not present in the 15% sample. Although this cannot directly explain the impact of ridges on turn-on voltage, it is likely to be related. Overall, the data presented here demonstrate the potential of PC-AFM in the field of III-nitride semiconductors.

Formation and Properties of Schottky Diodes on 4H-SiC after High Temperature Annealing with Graphite Encapsulation

2006 ◽  
Vol 527-529 ◽  
pp. 915-918 ◽  
Author(s):  
Y. Wang ◽  
M.K. Mikhov ◽  
B.J. Skromme
Keyword(s):  
High Temperature ◽  
Ideality Factor ◽  
Schottky Diodes ◽  
Extended Defects ◽  
High Temperature Annealing ◽  
Force Microscopy ◽  
Atomic Force ◽  
Current Voltage ◽  
Encapsulation Method ◽  
The Impact

The impact of high temperature annealing using graphite encapsulation (formed by baking photoresist) on the electrical properties of Ni Schottky diodes formed on the annealed surfaces is studied. The surface morphology is also characterized by atomic force microscopy (AFM). Annealing for 10 minutes at temperatures up to 1800 °C with graphite encapsulation actually reduces the high-current ideality factor of the diodes while raising the current-voltage barrier height (linearly extrapolated to unity ideality factor) from 1.453 V to 1.67-1.73 V. Excess leakage current occurs only in a subset of diodes, which are believed to be affected by extended defects. The AFM images show no significant surface roughening, and the graphite can be removed after processing. This encapsulation method is found to be highly effective in preserving the electronic properties of the surface during high temperature annealing.

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