scholarly journals Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering

Coatings ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 742
Author(s):  
Jian-Fu Tang ◽  
Chun-Hong Huang ◽  
Ching-Yen Lin ◽  
Fu-Chi Yang ◽  
Chi-Lung Chang
Keyword(s):  
Magnetron Sputtering ◽  
Adhesion Strength ◽  
High Power ◽  
High Speed ◽  
Rotation Speed ◽  
High Speed Steel ◽  
Multilayer Coatings ◽  
Tem Analysis ◽  
Adhesion Properties ◽  
Substrate Rotation

We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength.

Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering

2010 ◽  
Vol 66 ◽  
pp. 35-40 ◽  
Author(s):  
Erdem Baskurt ◽  
Tolga Tavşanoğlu ◽  
Yücel Onüralp
Keyword(s):  
Magnetron Sputtering ◽  
High Speed ◽  
Profile Analysis ◽  
High Speed Steel ◽  
X Ray Diffraction ◽  
Dc Magnetron Sputtering ◽  
Cross Sectional ◽  
Methane Flow Rate ◽  
Surface Morphologies ◽  
Sic Films

SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target. 3 types of substrates, AISI M2 grade high speed steel, glass and Si (100) wafer were used in each deposition. The effect of different CH4 flow rates on the microstructural properties and surface morphologies were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. SIMS (Secondary Ion Mass Spectrometer) depth profile analysis showed that the elemental film composition was constant over the whole film depth. XRD (X-Ray Diffraction) results indicated that films were amorphous. Nanomechanical properties of SiC films were also investigated.

Influence of Niobium Dopant on the Corrosion Resistance of a-C:N and a-C:N:H Coatings

2019 ◽  
Vol 823 ◽  
pp. 75-79
Author(s):  
Yen Liang Su ◽  
Sun Hui Yao ◽  
Yi Ru Wu
Keyword(s):  
Corrosion Resistance ◽  
Magnetron Sputtering ◽  
High Speed ◽  
High Speed Steel ◽  
Test Surface ◽  
Nb Dopant ◽  
Sputtering System

Amorphous carbonitride coatings (a-C:N and a-C:N:H) with dopant of niobium (Nb) were deposited on substrates of JIS SKH51 high speed steel (HSS) by a four-target close-field unbalance magnetron sputtering system. Subsequently, they were characterized by GDOS, XRD and XPS, and their corrosion resistance was comparatively evaluated. An electro-chemical tester was used to evaluate the corrosive behavior. An SEM was used to examine the test surface. The results revealed that the Nb dopant provided improvements in the corrosive performance to both the a-C:N and a-C:N:H coatings.

Titanium nitride deposition on hardened high speed steel by reactive magnetron sputtering

1990 ◽  
Vol 190 (2) ◽  
pp. 265-277 ◽  
Author(s):  
M.Y. Al-Jaroudi ◽  
H.T.G. Hentzell ◽  
S.E. Hörnström ◽  
A. Bengtson
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
High Speed ◽  
High Speed Steel ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Research on the Wear Characteristics and Wear Mechanisms of CrAlTiN Coated HSS Tools under Dry Cutting Conditions

2012 ◽  
Vol 562-564 ◽  
pp. 619-622
Author(s):  
Ji Ming Xiao ◽  
Li Jing Bai ◽  
Yan Li ◽  
Jian Ming Zheng ◽  
Qi Long Yuan
Keyword(s):  
Magnetron Sputtering ◽  
Wear Mechanisms ◽  
High Speed ◽  
Complex Shape ◽  
Adhesive Wear ◽  
Cutting Tools ◽  
High Speed Steel ◽  
Dry Cutting ◽  
Wear Characteristics ◽  
The Face

High-speed steel (HSS) turning tools was designed and sharpened according to the angles of the complex shape cutting tools. CrAlTiN coating was deposited using unbalance magnetron sputtering plating technique. By dry turning tests, the wear characteristics and wear mechanisms of the face were investigated. The results show that the face wear of the coated HSS tools is obviously different from that of the uncoated tools, the crater width is smaller, the boundary is jagged and the lowest position is away from the major cutting edge. Adhesive wear and local adhesive wear are the main wear mechanisms.

Development of Multilayer Composition Thin Film Thermocouple Cutting Temperature Sensor Based on Magnetron Sputtering

2009 ◽  
Vol 69-70 ◽  
pp. 515-519 ◽  
Author(s):  
Yun Xian Cui ◽  
Bao Yuan Sun ◽  
W.Y. Ding ◽  
F.D. Sun
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
High Speed ◽  
Cutting Temperature ◽  
High Speed Steel ◽  
Plasma Source ◽  
Cutting Edge ◽  
Static Calibration ◽  
Ecr Plasma ◽  
Thin Film Thermocouple

In the paper, a new multilayer composition thin film thermocouple was developed, which can accurately measure the temperature nearby cutting edge in convenient and fast ways. By means of advanced Twinned microwave ECR plasma source enhanced Radio Frequency (RF) reaction non-balance magnetron sputtering technique, SiO2 insulating film, NiCr/NiSi sensor film and SiO2 protecting film were deposited on the surface HSS substrate. Both static calibration and dynamic calibration were completed. The results showed that the sensor had good performance, good linearity, quick dynamic response, response time constant was 12.7ms. The temperature near the cutting edge in cutting process of aluminum alloy was measured by the developed sensor. The bonding strength between multiple layer film and substrate of high-speed-steel met the presupposed demands.

Sign in / Sign up

Export Citation Format

Share Document