scholarly journals Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment

2019 ◽  
Vol 11 (17) ◽  
pp. 4795 ◽  
Author(s):  
Gyujin Park ◽  
Changhee Lee

A numerical study was conducted on the thermal performance of a large-area hot plate specifically designed as a heating and cooling tool for thermal nanoimprint lithography processes. The hot plate had the dimensions 240 mm × 240 mm × 20 mm, in which a series of cartridge heaters and cooling holes were installed. Stainless steel was selected to endure the high molding pressures. To examine the hot plate’s abnormal thermal behavior, ANSYS Fluent V15.0, which is commercial CFD code, was used to perform computational analysis. A numerical model was employed to predict the thermal behavior of the hot plate in both the heating and cooling phases. To conduct the thermal design of a large-area hot plate for nanoimprint equipment, we selected the model to be studied and proposed a cooling model using both direct and indirect cooling methods with and without heat pipes. In addition, we created a small hot plate and performed experimental and computational analyses to confirm the validity of the proposed model. This study also analyzed problems that may occur in the stage prior to the large-area expansion of the hot plate. In the case of a stainless steel (STS304) hot plate for large-area hot plate expansion, the heat pipes were inserted in the direction of the cartridge heaters to address the problems that may occur when expanding the hot plate into a large area. As a result, the heating rate was 40 °C/min and the temperature uniformity was less than 1% of the maximum working temperature of 200 °C. For cooling, when considering pressure and using air as the coolant for the ends, a cooling rate of 20 °C/min and thermal performance of less than 13.2 °C (less than 7%) based on the maximum temperature were obtained. These results were similar to the experimental results.

2019 ◽  
Vol 9 (15) ◽  
pp. 3100
Author(s):  
Gyujin Park ◽  
Changhee Lee

A numerical study is conducted on the thermal performance of a large-area hot plate specifically designed as a heating and cooling tool for thermal nanoimprint lithography processes. The hot plate has the dimensions 240 mm × 240 mm × 20 mm, in which a series of cartridge heaters and cooling holes are installed. Stainless steel has been selected to endure the high molding pressures. A numerical model based on ANSYS Fluent is employed to predict the thermal behavior of the hot plate in both the heating and cooling phases. The proportional–integral–derivative (PID) thermal control of the device is modeled by adding user defined functions. The results of the numerical computations demonstrate that the use of cartridge heaters provides sufficient heat-up performance and the active liquid cooling in the cooling holes provides the required cool-down performance. However, a crucial technical issue is raised, namely that the proposed design poses a large temperature non-uniformity in the steady heating phase and in the transient cooling phase. As a remedy, a new hot plate in which heat pipes are installed in the cooling holes is considered. The numerical results show that the installation of heat pipes could enhance the temperature uniformity both in the heating and cooling phases.


Author(s):  
Souheyla Khaldi ◽  
A. Nabil Korti ◽  
Said Abboudi

AbstractThis article provides numerical study of the solar chimney (SC) assembled with a reversed absorber and packed bed for the indirect-mode solar dryer. The present study was designed to determine the effects of using the SC in three configuration and physical proprieties of the packed (thickness and porosity) on the dynamic and thermal behavior of airflow. The results reveal that (1) using SC without storage material can increase the maximum mass flow rate up to 5%. However, integrating a storage material in the SC can improve the mass flow rate up to 32% during nighttime; (2) the use of a packed bed can decrease the crops temperature fluctuation until about 76% and increase the operating time of the solar dryer up to 12.5 hours rather than 10 hours in the case without packed bed; (3) increasing the porosity from 0.1 to 0.8 can increase the maximum temperature by about 10°C.


Author(s):  
Fadi A. Ghaith ◽  
Ahmed S. Izhar

This paper aims to enhance the thermal performance of an industrial shell-and-tube heat exchanger utilized for the purpose of cooling raw natural gas by means of mixture of Sales gas. The main objective of this work is to provide an optimum and reliable thermal design of a single-shelled finned tubes heat exchanger to replace the existing two- shell and tube heat exchanger due to the space limitations in the plant. A comprehensive thermal model was developed using the effectiveness-NTU method. The shell-side and tube-side overall heat transfer coefficient were determined using Bell-Delaware method and Dittus-Boelter correlation, respectively. The obtained results showed that the required area to provide a thermal duty of 1.4 MW is about 1132 m2 with tube-side and shell-side heat transfer coefficients of 950 W/m2K and 495 W/m2K, respectively. In order to verify the obtained results generated from the mathematical model, a numerical study was carried out using HTRI software which showed a good match in terms of the heat transfer area and the tube-side heat transfer coefficient.


2020 ◽  
Vol 24 (5 Part B) ◽  
pp. 3329-3336
Author(s):  
Chaoyi Wan

In the present study, the thermal behavior of a power battery cooling structure employing copper rods, and heat pipes was compared. The influences of flow rate and inlet temperature of coolant, as well as input power were discussed by numerical methods. The numerical computation results showed that heat pipe could significantly augment the heat transfer of the battery cooling system than the copper rod. Within the scope of this study, the heat pipe reduced the maximum temperature by 41.6-60.9%. The distributions of temperature ratios on the battery surface, together with the heat flux as soon as streamlines around the heat pipe condenser was also illustrated.


2019 ◽  
Vol 7 (1) ◽  
pp. 43-53
Author(s):  
Abbas Jassem Jubear ◽  
Ali Hameed Abd

The heat sink with vertically rectangular interrupted fins was investigated numerically in a natural convection field, with steady-state heat transfer. A numerical study has been conducted using ANSYS Fluent software (R16.1) in order to develop a 3-D numerical model.  The dimensions of the fins are (305 mm length, 100 mm width, 17 mm height, and 9.5 mm space between fins. The number of fins used on the surface is eight. In this study, the heat input was used as follows: 20, 40, 60, 80, 100, and 120 watts. This study focused on interrupted rectangular fins with a different arrangement and angle of the fins. Results show that the addition of interruption in fins in various arrangements will improve the thermal performance of the heat sink, and through the results, a better interruption rate as an equation can be obtained.


Author(s):  
Rama R. Goruganthu ◽  
David Bethke ◽  
Shawn McBride ◽  
Tom Crawford ◽  
Jonathan Frank ◽  
...  

Abstract Spray cooling is implemented on an engineering tool for Time Resolved Emission measurements using a silicon solid immersion lens to achieve high spatial resolution and for probing high heat flux devices. Thermal performance is characterized using a thermal test vehicle consisting of a 4x3 array of cells each with a heater element and a thermal diode to monitor the temperature within the cell. The flip-chip packaged TTV is operated to achieve uniform heat flux across the die. The temperature distribution across the die is measured on the 4x3 grid of the die for various heat loads up to 180 W with corresponding heat flux of 204 W/cm2. Using water as coolant the maximum temperature differential across the die was about 30 °C while keeping the maximum junction temperature below 95 °C and at a heat flux of 200 W/cm2. Details of the thermal performance of spray cooling system as a function of flow rate, coolant


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