Hot Press Sintering Behavior of Nano-Sized AlN Powders
Aluminum nitride (AlN) is a stoichiometric compound with the hexagonal wurtzite structure. AlN has excellent thermal conductivity and good properties as electronic insulator. It displays good mechanical resistance up to elevated temperatures and is resistant against corrosion by molten metals. Bulk AlN may therefore be used as a refractory structural material as well as a substrate for high power microelectronic devices. However, it is very difficult for sintering high-density AlN at lower temperature than 1800°C. Nano-sized AlN powders were sintered by hot press sintering at low temperature of 1500~1700°C and mechanical properties were investigated. β-AlN and β-Al2O3 were detected when the sintering temperature is 1600°C. The phase transition β-AlN to α-AlN was discovered at a 1700°C sintering temperature. Relative density and average grain size were increasing with the increasing of sintering temperature, and fracture form is intercrystalline crack in 1500°C and transcrystalline crack in 1700°C. 97.3% relative density and 850nm average grain size were deserved at 1700°C.