TEM Analysis of Wear of Ti/TiN Multi-Layer Coating in Ball-on-Disc Test

2009 ◽  
Vol 409 ◽  
pp. 123-127 ◽  
Author(s):  
Łukasz Major ◽  
Jerzy Morgiel
Keyword(s):  
Ion Beam ◽  
Multilayer Coating ◽  
Wear Test ◽  
Layer By Layer ◽  
Tem Analysis ◽  
Thin Foils ◽  
Transmission Electron ◽  
Ball Diameter ◽  
Focus Ion Beam ◽  
Ball On Disc

The wear mechanisms of Ti/TiN eight layered coatings ( =250nm) were investigated with ball-on-disc test. The coatings were obtained by hybrid pulsed laser deposition (PLD) technique. The wear test was done using Al2O3 ball-on-disc test at 1N/2000 cycles. Thin foils for TEM observations were cut from wear track using a Quanta 200 3D FIB (Focus Ion Beam) equipped with an Omniprobe lift-up system. The microstructure investigations were performed with the TECNAI G2 SuperTWIN FEG (200kV) transmission electron microscope. At the start of the wear the load applied to Al2O3 ball resulted in pushing-in of the coating into substrate causing its grooving of the shape corresponding to the ball diameter. The lining of the crater required strong coating deformation, which was plastic within Ti and mostly brittle in TiN layers. The vertical cracks in TiN were indeed stopped at the TiN/Ti interfaces, but reopen in lying below TiN layers. In applied wear conditions the continuity of Ti layers prevails over cracking of the TiN layers and resulted in layer-by-layer wear of investigated multilayer coating.

scholarly journals A Novel Sample Preparation Method for Frontside Inspection of GaN Devices after Backside Analysis

2021 ◽  
Author(s):  
Tony Colpaert ◽  
Stefaan Verleye
Keyword(s):  
Electron Microscopy ◽  
Sample Preparation ◽  
Preparation Method ◽  
Ion Beam ◽  
Sample Preparation Method ◽  
Tem Analysis ◽  
Transmission Electron ◽  
Die Surface ◽  
Emission Microscopy ◽  
Focus Ion Beam

Abstract Frontside die inspection by Scanning Electron Microscopy (SEM) is critical to investigate failures that appear dispersed over the GaN die surface and that will be very difficult to localize by the typical Focus Ion Beam (FIB) or Transmission Electron Microscopy (TEM) analysis. Frontside sample preparation is; however, extremely challenging if the device was already subjected to sample preparation for backside Photo Emission Microscopy (PEM). In this paper, a novel sample preparation method is presented where all front side layers are removed and only the 5μm GaN die is left for inspection.

Interfacial Reactions during Explosive Bonding

2014 ◽  
Vol 783-786 ◽  
pp. 1476-1481 ◽  
Author(s):  
Henryk Paul
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Dislocation Structure ◽  
Energy Dispersive Spectrometry ◽  
Ion Beam ◽  
Intermetallic Phases ◽  
Thin Foils ◽  
Transmission Electron ◽  
Focus Ion Beam ◽  
Beam Technique

The layers near the interface of explosively welded plates were investigated by means of microscopic observations, mostly with the use of transmission electron microscopy (and Focus Ion Beam technique for the thin foils preparation) equipped with energy dispersive spectrometry. The metal compositions based on steels and Ti, Zr, Ta or Cu, were analyzed. The study was focused on the identification of the intermetallic phases inside the melted zones, the possible interdiffusion between the bonded metals and the changes in the dislocation structure.

TEM Sample Preparation Tricks for Advanced DRAMs

2015 ◽  
Author(s):  
Ching Shan Sung ◽  
Hsiu Ting Lee ◽  
Jian Shing Luo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Characterization Of Materials

Abstract Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for process evaluation and failure analysis in the integrated circuit (IC) industry as device shrinkage continues. It is well known that a high quality TEM sample is one of the keys which enables to facilitate successful TEM analysis. This paper demonstrates a few examples to show the tricks on positioning, protection deposition, sample dicing, and focused ion beam milling of the TEM sample preparation for advanced DRAMs. The micro-structures of the devices and samples architectures were observed by using cross sectional transmission electron microscopy, scanning electron microscopy, and optical microscopy. Following these tricks can help readers to prepare TEM samples with higher quality and efficiency.

A Methodology to Reduce Ion Beam Induced Damage in TEM Specimens Prepared by FIB

2002 ◽  
Author(s):  
Chin Kai Liu ◽  
Chi Jen. Chen ◽  
Jeh Yan.Chiou ◽  
David Su
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Tem Analysis ◽  
Sensitive Issue ◽  
Transmission Electron

Abstract Focused ion beam (FIB) has become a useful tool in the Integrated Circuit (IC) industry, It is playing an important role in Failure Analysis (FA), circuit repair and Transmission Electron Microscopy (TEM) specimen preparation. In particular, preparation of TEM samples using FIB has become popular within the last ten years [1]; the progress in this field is well documented. Given the usefulness of FIB, “Artifact” however is a very sensitive issue in TEM inspections. The ability to identify those artifacts in TEM analysis is an important as to understanding the significance of pictures In this paper, we will describe how to measure the damages introduced by FIB sample preparation and introduce a better way to prevent such kind of artifacts.

TEM Characterization of As-Deposited and Annealed Ni/Al Multilayer Thin Film

2010 ◽  
Vol 16 (6) ◽  
pp. 662-669 ◽  
Author(s):  
S. Simões ◽  
F. Viana ◽  
A.S. Ramos ◽  
M.T. Vieira ◽  
M.F. Vieira
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Cross Section ◽  
Ion Beam ◽  
Microstructural Characterization ◽  
Multilayer Thin Films ◽  
Tem Analysis ◽  
Plan View ◽  
Transmission Electron

AbstractReactive multilayer thin films that undergo highly exothermic reactions are attractive choices for applications in ignition, propulsion, and joining systems. Ni/Al reactive multilayer thin films were deposited by dc magnetron sputtering with a period of 14 nm. The microstructure of the as-deposited and heat-treated Ni/Al multilayers was studied by transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) in plan view and in cross section. The cross-section samples for TEM and STEM were prepared by focused ion beam lift-out technique. TEM analysis indicates that the as-deposited samples were composed of Ni and Al. High-resolution TEM images reveal the presence of NiAl in small localized regions. Microstructural characterization shows that heat treating at 450 and 700°C transforms the Ni/Al multilayered structure into equiaxed NiAl fine grains.

Analysis of the Intermetallic Compound Formed in Hot Dip Aluminized Steel

2006 ◽  
Vol 15-17 ◽  
pp. 159-163 ◽  
Author(s):  
Kee Hyun Kim ◽  
Benny van Daele ◽  
Gustaaf Van Tendeloo ◽  
Yong Sug Chung ◽  
Jong Kyu Yoon
Keyword(s):  
Intermetallic Compound ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Liquid Aluminium ◽  
Thin Specimen ◽  
Tem Analysis ◽  
X Ray ◽  
Cell Parameters ◽  
Transmission Electron ◽  
Aluminized Steel

A hot dip aluminising process was carried out with a 1mm steel sheet dipped into the Al-10at.% Si melt in an automatic hot-dip simulator. When steel and liquid aluminium are in contact with each other, a thin intermetallic compound (IMC) is formed between the steel and the aluminium. The analysis and identification of the formation mechanism of the IMC is needed to manufacture the application products. Energy dispersive X-ray spectroscopy (EDX) and electron probe microanalysis (EPMA) are normally used to identify the phases of IMC. In the Al-Fe-Si system, numerous compounds with only slight differences in composition are formed. Consequently, EDX and EPMA are insufficient to confirm exactly the thin IMC with multiphases. In this study, transmission electron microscopy (TEM) analysis combined with EDX was used. The TEM sample was prepared with focused ion beam (FIB) sampling. The FIB lift-out technology is used to slice a very thin specimen with minimum contamination for TEM analysis. It is clearly shown that the IMC consists of Al-27 at. % Fe-10 at. % Si and is identified as Al8Fe2Si with a hexagonal unit cell (space group P63/mmc). The cell parameters are a= 1.2404nm and c= 2.6234nm.

scholarly journals Effect of Cryogenic Treatment on Microstructure and Wear Resistance of Carburized 20CrNi2MoV Steel

Metals ◽  
2018 ◽  
Vol 8 (10) ◽  
pp. 808 ◽  
Author(s):  
Binzhou Li ◽  
Changsheng Li ◽  
Yu Wang ◽  
Xin Jin
Keyword(s):  
Electron Microscopy ◽  
Wear Resistance ◽  
Sliding Wear ◽  
Cryogenic Treatment ◽  
Wear Test ◽  
Deep Cryogenic Treatment ◽  
Transmission Electron ◽  
Conventional Heat Treatment ◽  
Carburizing Process ◽  
Ball On Disc

This paper investigated the response of carburized 20CrNi2MoV steel to cryogenic treatment including microstructure and wear resistance. Two cryogenic treatment methods including cryogenic treatment at −80 °C (CT) and deep cryogenic treatment at −196 °C (DCT) as well as conventional heat treatment (CHT) were carried out after carburizing process. Scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray diffractometry (XRD) were employed for microstructure characterization. The wear resistance was investigated by ball-on-disc sliding wear test on a multi-functional tribometer. The results show that the wear resistance of the experimental steel has been improved by 17% due to CT and by 25.5% due to DCT when compared to CHT. This significant improvement in wear resistance after cryogenic treatment is attributed to the microstructural changes including the finer martensitic structure, the reduction of retained austenite and the development of fine and more numerous carbides. Among these factors, the precipitation of fine carbides plays a more prominent role in enhancing wear resistance.

scholarly journals Facile synthesis and thermoluminescence properties of nano bio-ceramic β-Ca2P2O7:Dy phosphor irradiated with 75 meV C6+ ion beam

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Karan Kumar Gupta ◽  
S . J. Dhoble ◽  
Aleksander R. Krupski
Keyword(s):  
Electron Microscopy ◽  
Glow Curve ◽  
Ion Beam ◽  
Wet Chemical Method ◽  
Facile Synthesis ◽  
Tem Analysis ◽  
Host Matrix ◽  
Transmission Electron ◽  
Wet Chemical ◽  
Beam Dosimetry

AbstractDy3+ doped β-Ca2P2O7 phosphor has been synthesized using wet chemical method. The scanning electron microscopy (SEM) and transmission electron microscopy (TEM) analysis confirmed the formation of β-Ca2P2O7:Dy nano-phosphors. However, photoluminescence (PL) study was carried out to confirm the presence of dopant ion in the host matrix of β-Ca2P2O7:Dy material. Thermoluminescence (TL) glow curves of β-Ca2P2O7 were recorded for different concentrations of Dy3+ after exposure to various fluences of C6+ ion beam (75 meV). TL sensitivity of β-Ca2P2O7:Dy3+ (0.1 mol%) phosphor was 3.79 times more than commercially available CaSO4:Dy3+. TRIM code based on the Monte Carlo simulation was used to calculate the absorbed doses, ion range and main energy loss. Glow curve de-convolution (GCD) method was used to determine the number of TL peaks and their trapping parameters. The wide linear response of β-Ca2P2O7 nanoparticles along with high stability of TL glow curve makes this nanomaterial a good candidate for C6+ ion beam dosimetry.

TEM FIB Lift-Out of Mount Saint Helens Volcanic Ash

1999 ◽  
Vol 5 (S2) ◽  
pp. 908-909
Author(s):  
J.L. Drown-MacDonald ◽  
B.I. Prenitzer ◽  
T.L. Shofner ◽  
L.A. Giannuzzi
Keyword(s):  
Cross Sections ◽  
Volcanic Ash ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Tem Analysis ◽  
Plan View ◽  
Transmission Electron ◽  
Silver Paint

Focused Ion Beam (FIB) specimen preparation for both scanning and transmission electron microscopy (SEM and TEM respectively) has seen an increase in usage over the past few years. The advantage to the FIB is that site specific cross sections (or plan view sections) may be fabricated quickly and reproducibly from numerous types of materials using a finely focused beam of Ga+ ions [1,2]. It was demonstrated by Prenitzer et al. that TEM specimens may be acquired from individual Zn powder particles by employing the FIB LO specimen preparation technique [3]. In this paper, we use the FIB LO technique to prepare TEM specimens from Mount Saint Helens volcanic ash.Volcanic ash from Mount Saint Helens was obtained at the Microscopy and Microanalysis 1998 meeting in Atlanta. TEM analysis of the ash was performed using the FIB lift out technique [1]. Ash powders were dusted onto an SEM sample stud that had been coated with silver paint.

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