A High-Order Sigma-Delta Modulator Applied in Micro-Accelerometer
In this paper a high-order sigma-delta modulator applied in micro-accelerometer is designed. The modulator chooses the distributed feedback structure. And the signal bandwidth is 500Hz, the oversampling ratio is 250 and sampling frequency is 250KHz. By the MATLAB Simulink simulation, when the input signal is 1g, and the signal frequency is 250Hz, the simulation result is that the noise level is-160dBV at the signal frequency in the ideal situation. And when considering the non-ideal factors, the simulation result shows that the noise level at the input accelerated signal is 20dBV higher than the ideal. The overall circuit was implemented under 0.5 um CMOS process and simulated in Cadence Spectre. The final simulation results show that the signal to noise ratio (SNR) is 97.1dB.