TSV technology embedding high density capacitors for Advanced 3D packaging solutions
TSV is one of the key technologies for 3D integration . TSVs co-integrated with passives including high density capacitors enable highly integrated heterogeneous solutions required because of the smaller size of the electronic modules . Even if there is still a lot to do , significant progress has already been done on the process , on the testability , on the performances of these smart interposers .The major progress is in the adoption of the technology .In this paper we'll expose some examples where the adoption was driven by cost, performances & miniaturization. Emphasis will be placed on the performances of the new generation of 3D Silicon capacitors, using key enabling technology like ALD and amazing architecture that allow impressive capacitance density increase.