Bonding strength of Cu/Cu joints using sintering process of micro-sized Cu particles for high-temperature application
Abstract Recently the new SiC power device provides the possibility to develop the next-generation power conversion circuit with high efficiency and high power density. The SiC power device can operate with significant lower power loss and higher operating temperature, which contributes to miniaturization and higher performance of power modules. To assemble these power modules, the high temperature packaging technology such as die attach process is needed. As a die attach process, we have proposed a simple oxidation-reduction bonding (ORB) process to achieve good Cu-to-Cu joints using micro-sized Cu particles. In this study, the effect of the oxidation-reduction process on the surface morphology of Cu particles was evaluated by SEM observation, and the shear strength of the Cu-to-Cu joints was investigated. As a result, the bonding using micro-sized Cu particles was successfully achieved and the shear test results showed that the joints by ORB process had a shear strength of more than 20 MPa.