Pressure-Assisted Sintering of Multilayer Transformer Using LTCC-Compatible NiCuZn-Ferrite and Silver Conductor
A low-fired NiCuZn-ferrite and a new LTCC dielectric material with matched sintering shrinkages and coefficients of thermal expansion were used for integration of magnetic function into LTCC. Silver was used as inner conductor material. Silver diffusion during sintering into the surrounding glassy phase modifies the sintering behaviour of LTCC near the silver conductor and generates warping and delamination of the multilayer. Silver diffusion can be prevented by sintering in nitrogen atmosphere. However, sintering in nitrogen atmosphere causes partial decomposition of NiCuZn-ferrite by reduction of divalent copper oxide (CuO) to cuprite (Cu2O). It was found that diffusion of silver and associated deformation can be highly reduced if a higher heating rate during sintering in air is used. A Defect-free multilayer transformer with several silver conductive layers could be manufactured by pressure-assisted sintering only.