Defect termination on crystalline silicon surfaces by hydrogen for improvement in the passivation quality of catalytic chemical vapor-deposited SiNxand SiNx/P catalytic-doped layers

2016 ◽  
Vol 55 (2S) ◽  
pp. 02BF09 ◽  
Author(s):  
Trinh Cham Thi ◽  
Koichi Koyama ◽  
Keisuke Ohdaira ◽  
Hideki Matsumura
Keyword(s):  
Crystalline Silicon ◽  
Chemical Vapor ◽  
Silicon Surfaces ◽  
Chemical Vapor Deposited

Improved Passivation of a-Si:H / c-Si Interfaces Through Film Restructuring

2008 ◽  
Vol 1066 ◽  
Author(s):  
Michael Zanoni Burrows ◽  
U. K. Das ◽  
S. Bowden ◽  
S. S. Hegedus ◽  
R. L. Opila ◽  
...  
Keyword(s):  
Hydrogen Bonding ◽  
Surface Passivation ◽  
Crystalline Silicon ◽  
Silicon Surfaces ◽  
Initial Surface ◽  
Effective Lifetime ◽  
Bonding Structure ◽  
First Time ◽  
Post Deposition

ABSTRACTThe as-deposited passivation quality of amorphous silicon films on crystalline silicon surfaces is dependent on deposition conditions and resulting hydrogen bonding structure. However the initial surface passivation can be significantly improved by low temperature post-deposition anneal. For example an improvement in effective lifetime from 780 μsec as-deposited to 2080 μsec post-anneal is reported in the present work. This work probes the hydrogen bonding environment using monolayer resolution Brewster angle transmission Fourier transform infrared spectroscopy of 100 Å thick films. It is found that there is significant restructuring at the a-Si:H / c-Si interface upon annealing and a gain of mono-hydride bonding at the c-Si surface is detected. Calculations show an additional 3.56 − 4.50 × 1014 cm−2 mono-hydride bonding at c-Si surface due to annealing. The estimation of the surface hydride oscillator strength in transmission mode is reported for the first time to be 7.2 × 10−18 cm on Si (100) surface and 7.5 × 10−18 cm on Si (111).

Ge Growth on Nanostructured Silicon Surfaces

2005 ◽  
Vol 862 ◽  
Author(s):  
Ganesh Vanamu ◽  
Abhaya K. Datye ◽  
Saleem H. Zaidi
Keyword(s):  
Electron Microscopy ◽  
Dislocation Density ◽  
Full Width Half Maximum ◽  
Defect Density ◽  
Chemical Vapor ◽  
Silicon Surfaces ◽  
X Ray Diffraction ◽  
Etch Pit ◽  
Transmission Electron

AbstractWe report highest quality Ge epilayers on nanoscale patterned Si structures. 100% Ge films of 10 μm are deposited using chemical vapor deposition. The quality of Ge layers was examined using scanning electron microscopy (SEM), transmission electron microscopy (TEM), and high-resolution x-ray diffraction (HRXRD) measurements. The defect density was evaluated using etch pit density measurements. We have obtained lowest dislocation density (5×105 cm-2) Ge films on the nanopatterned Si structures. The full width half maximum peaks of the reciprocal space maps of Ge epilayers on the nanopatterned Si showed 93 arc sec. We were able to get rid of the crosshatch pattern on the Ge surface grown on the nanopatterned Si. We also showed that there is a significant improvement of the quality of the Ge epilayers in the nanopatterned Si compared to an unpatterned Si. We observed nearly three-order magnitude decrease in the dislocation density in the patterned compared to the unpatterned structures. The Ge epilayer in the patterned Si has a dislocation density of 5×105 cm-2 as compared to 6×108 cm-2 for unpatterned Si.

High-quality graphene transfer via directional etching of metal substrates

Nanoscale ◽  
2019 ◽  
Vol 11 (34) ◽  
pp. 16001-16006 ◽  
Author(s):  
Xuewei Zhang ◽  
Zehao Wu ◽  
Haoran Zheng ◽  
Qiancheng Ren ◽  
Zhenxing Zou ◽  
...  
Keyword(s):  
Chemical Vapor ◽  
High Quality ◽  
Metal Substrates ◽  
Cu Substrate ◽  
Chemical Vapor Deposited ◽  
Graphene Transfer

The quality of chemical-vapor-deposited graphene can be significantly improved by directional removal of the underlying Cu substrate.

Sign in / Sign up

Export Citation Format

Share Document