UHV-TEM imaging of surface reconstructions in B-doped Si
1991 ◽
Vol 49
◽
pp. 618-619
Keyword(s):
A variety of techniques including LEED, STM and RHEED have been used to study surface reconstructions on the silicon <111> surface. Additionally, ultra high vacuum-transmission electron microscopy (UHV-TEM) has been used for a limited number of studies most notably on the 7x7 reconstructed surface. The limiting factor in these studies has been the availability of microscopes capable of in-situ sample preparation and imaging in a UHV environment. The Hitachi UHV-H9000 located at Northwestern University has recently been used to observe several surface reconstructions on a single crystal silicon <111> thin film. Transmission electron diffraction (TED) patterns were obtained for 7x7, and 5x1 surface reconstructions.
1993 ◽
Vol 51
◽
pp. 844-845
Keyword(s):
1989 ◽
Vol 47
◽
pp. 462-463
1993 ◽
Vol 51
◽
pp. 640-641
Keyword(s):
Keyword(s):
Keyword(s):
2004 ◽
Vol 218
(4)
◽
pp. 279-292
◽
1996 ◽
Vol 35
(Part 1, No. 12B)
◽
pp. 6610-6613
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