Resolving Difficult Multilayer Film Structure by Transmission Electron Microscopy

The structure of polycrystalline Zn3P2 films has been studied for 1- to 2-μm-thick vacuum-deposited films on glass substrates. Transmission electron microscopy and X-ray diffraction techniques have been used to obtain a detailed, quantitative analysis of the film structure. The initial growth consists of small (≤ 10 nm), randomly oriented grains. As the film thickness increases, the growth of crystallites with the {220} planes oriented approximately parallel to the substrate is favoured, and a columnar structure develops along with a highly preferred orientation. This structure has been observed directly by transmission electron microscopy of thin cross sections of the films. The size of the grains at the free surface increases with the film thickness, reaching approximately 200–300 nm when the film is 1 μm thick. The effects of substrate temperature and low-energy (0.5–2 keV) electron bombardment of the film during growth have also been studied. Neither substrate temperature nor electron bombardment appear to have a major effect on the film structure. The primary effect of electron bombardment appears to be the creation of preferred nucleation sites on the substrate.

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Statistical Tomography of 3D Thin Film Structure using Transmission Electron Microscopy

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany ◽

10.1007/978-3-540-85226-1_184 ◽

2008 ◽

pp. 367-368

Author(s):

E. Spiecker ◽

V. Radmilovic ◽

U. Dahmen

Keyword(s):

Thin Film ◽

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Film Structure ◽

Thin Film Structure ◽

Transmission Electron

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Phase Transformations in Co/Nb and Co/Zr Multilayer Film Stacks.

MRS Proceedings ◽

10.1557/proc-230-73 ◽

1991 ◽

Vol 230 ◽

Author(s):

J. C. Lin ◽

R. A. Hoffman

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Phase Transformations ◽

Multilayer Film ◽

Isothermal Annealing ◽

Ion Beam ◽

Equilibrium Phase ◽

Stable Configuration ◽

Ion Beam Mixing ◽

Transmission Electron

AbstractIon-beam mixing and isothermal annealing techniques were applied to induce phase transformations in Co/Nb and Co/Zr multilayer film stacks. Transmission electron microscopy(TEM) and x-ray diffraction(XRD) were used to characterize the microstructure of the films. Interfacial morphology and chemistry of the films were examined by Rutherford backscattering spectrometry(RBS) and cross-section transmission electron microscopy(XTEM). The formation of amorphous phases was found in both systems by either technique. A comparison of the phase transformation mechanisms induced by ion-beam mixing and isothermal annealing is given. The thermodynamic and kinetic factors controlling the phase formation and stability are discussed. For the isothermal annealing, the final stable configuration is predicted by equilibrium phase diagrams.

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Structure of composition-modulated Cu/Ni thin films prepared by electrodeposition

Journal of Materials Research ◽

10.1557/jmr.1989.0755 ◽

1989 ◽

Vol 4 (4) ◽

pp. 755-758 ◽

Cited By ~ 18

Author(s):

J. Yahalom ◽

D. F. Tessier ◽

R. S. Timsit ◽

A. M. Rosenfeld ◽

D. F. Mitchell ◽

...

Keyword(s):

Thin Film ◽

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Cross Section ◽

Film Structure ◽

Composition Modulation ◽

Transmission Electron ◽

Electron Energy Loss ◽

Multilayered Thin Films

Copper/nickel multilayered thin-films prepared by electrodeposition have been examined in cross section by electron energy loss spectroscopy and high-resolution transmission electron microscopy. The results of the examinations provide the first direct experimental evidence of the large composition modulation across successive layers in the thin-film structure and the coherent nature of Cu/Ni interfaces.

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Transmission Electron Microscopy Observation of Constrained Crystallization in a-Si:H/a-SiNx:H Multilayer Film

MRS Proceedings ◽

10.1557/proc-358-839 ◽

1994 ◽

Vol 358 ◽

Author(s):

Xinfan Huang ◽

Weihua Shi ◽

Kunji Chen ◽

Shidong Yu ◽

Duan Feng

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Multilayer Film ◽

Laser Annealing ◽

Annealing Treatment ◽

Multilayer Structures ◽

Lattice Image ◽

Transmission Electron ◽

Ion Laser ◽

Average Size

ABSTRACTThe constrained crystallization in a-Si:H/a-SiNx:H multilayer structures by Ar ion laser annealing treatment has been studied by high-resolution transmission electron microscopy (HRTEM) and Raman scattering. HRTEM photograph shows that the a-Si:H layers crystallize without disturbing the multilayer structures and that the interfaces after the crystallization are atomically smooth and uniform. The lattice image of the Si crystallites arrayed one by one can be seen clearly in Si layers and the average size is roughly equal to the thickness of Si layer. The thermodynamics of constrained crystallization within multilayer structures has been discussed.

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Effects of Annealing on The Structure of Ta2N Thin Films Deposited on Al2O3

MRS Proceedings ◽

10.1557/proc-357-195 ◽

1994 ◽

Vol 357 ◽

Cited By ~ 2

Author(s):

James E. Angelo ◽

N.R. Moody ◽

S.K. Venkataraman ◽

W.W. Gerberich

Keyword(s):

Thin Film ◽

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Film Structure ◽

Orthorhombic Structure ◽

Epitaxial Relationship ◽

Thin Film Structure ◽

Transmission Electron ◽

Deposition Conditions

AbstractThe microstructure of Ta2N thin films deposited by d.c. magnetron sputtering on (1120) surface of Al2O3 is investigated using transmission electron microscopy. The effects of exposing the thin film structure to a 600°C air environment are also explored. It will be shown that under the standard deposition conditions, stresses exist in the thin film structure which leads to the formation of a textured structure in the as-deposited Ta2N. Exposure of the thin film structure to an air environment transforms the Ta2N to Ta2O5 in the orthorhombic structure. In addition, evidence for a epitaxial relationship between the Ta2O5 and Al2O3 will be presented.

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Concentric Metallic-Piezoelectric Microtube Arrays

MRS Proceedings ◽

10.1557/proc-1071-f01-07 ◽

2008 ◽

Vol 1071 ◽

Cited By ~ 6

Author(s):

Hongjin Fan ◽

S. Kawasaki ◽

J. M. Gregg ◽

A. Langner ◽

T. Leedham ◽

...

Keyword(s):

Thin Film ◽

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Inkjet Printing ◽

Layer Structure ◽

Film Structure ◽

Elemental Mapping ◽

Porous Si ◽

X Ray ◽

Transmission Electron

AbstractTrilayer concentric metallic-piezoelectric-metallic microtubes are fabricated by infiltrating porous Si templates with sol precursors. LaNiO3 (LNO) is used as the inner and outer electrode material and PbZrTiO3 (PZT) is the middle piezoelectric layer. Structure of the microtubes is characterized in details using scanning and transmission electron microscopy which are equipped with energy dispersive X-ray spectroscopy for elemental mapping. The hysteresis of a trilayered thin film structure of LNO-PZT-LNO is shown. This trilayered tubes might find applications in inkjet printing.

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Techniques for Transmission Electron Microscopy of Fiber-Matrix Interfaces in Aluminum Alloy-Boron Composites by Ion Erosio

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100065079 ◽

1971 ◽

Vol 29 ◽

pp. 204-205

Author(s):

G. G. Shaw

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Aluminum Alloy ◽

Electron Beam ◽

Pure Aluminum ◽

Ion Milling ◽

Transmission Electron ◽

Fiber Matrix ◽

Ion Erosion ◽

Row Of Fibers

The morphology and composition of the fiber-matrix interface can best be studied by transmission electron microscopy and electron diffraction. For some composites satisfactory samples can be prepared by electropolishing. For others such as aluminum alloy-boron composites ion erosion is necessary.When one wishes to examine a specimen with the electron beam perpendicular to the fiber, preparation is as follows: A 1/8 in. disk is cut from the sample with a cylindrical tool by spark machining. Thin slices, 5 mils thick, containing one row of fibers, are then, spark-machined from the disk. After spark machining, the slice is carefully polished with diamond paste until the row of fibers is exposed on each side, as shown in Figure 1.In the case where examination is desired with the electron beam parallel to the fiber, preparation is as follows: Experimental composites are usually 50 mils or less in thickness so an auxiliary holder is necessary during ion milling and for easy transfer to the electron microscope. This holder is pure aluminum sheet, 3 mils thick.

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Direct Observation of Heat Exchanger Deposits by Cross Sectioning

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100061835 ◽

1967 ◽

Vol 25 ◽

pp. 364-365

Author(s):

R. W. Anderson ◽

D. L. Senecal

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Heat Exchanger ◽

Direct Observation ◽

Cross Sections ◽

Preparation Method ◽

Specimen Preparation ◽

Flowing Water ◽

Transmission Electron ◽

Deposit Layer

A problem was presented to observe the packing densities of deposits of sub-micron corrosion product particles. The deposits were 5-100 mils thick and had formed on the inside surfaces of 3/8 inch diameter Zircaloy-2 heat exchanger tubes. The particles were iron oxides deposited from flowing water and consequently were only weakly bonded. Particular care was required during handling to preserve the original formations of the deposits. The specimen preparation method described below allowed direct observation of cross sections of the deposit layers by transmission electron microscopy.The specimens were short sections of the tubes (about 3 inches long) that were carefully cut from the systems. The insides of the tube sections were first coated with a thin layer of a fluid epoxy resin by dipping. This coating served to impregnate the deposit layer as well as to protect the layer if subsequent handling were required.

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Phase Transformations in Ti-7w/oMo-3w/oMe Alloy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100052584 ◽

1974 ◽

Vol 32 ◽

pp. 514-515

Author(s):

S. Fujishiro

Keyword(s):

Electron Microscopy ◽

Mechanical Properties ◽

Transmission Electron Microscopy ◽

Tensile Strength ◽

Mechanical Processing ◽

Ray Method ◽

X Ray ◽

Transmission Electron ◽

Water Quench ◽

Alpha Beta

The mechanical properties of three titanium alloys (Ti-7Mo-3Al, Ti-7Mo- 3Cu and Ti-7Mo-3Ta) were evaluated as function of: 1) Solutionizing in the beta field and aging, 2) Thermal Mechanical Processing in the beta field and aging, 3) Solutionizing in the alpha + beta field and aging. The samples were isothermally aged in the temperature range 300° to 700*C for 4 to 24 hours, followed by a water quench. Transmission electron microscopy and X-ray method were used to identify the phase formed. All three alloys solutionized at 1050°C (beta field) transformed to martensitic alpha (alpha prime) upon being water quenched. Despite this heavily strained alpha prime, which is characterized by microtwins the tensile strength of the as-quenched alloys is relatively low and the elongation is as high as 30%.

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