Microplasma microphones
Keyword(s):
It is shown experimentally that a microplasma created by a microstructured electrode array is sensitive to sound pressure. In this paper, two electrode architectures are used to create the microplasma. The sensitivity of these microplasma microphones, close to 0.4 nA/Pa, is estimated using a waveguide and a calibration method by comparison with a reference microphone. An empirical expression of the acoustic pressure sensitivity of microdischarges is proposed. The predictions of this empirical model are in good agreement with the experimental data.
1989 ◽
Vol 203
(1)
◽
pp. 15-20
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2021 ◽
Vol 23
(07)
◽
pp. 1293-1302
2010 ◽
Vol 123-125
◽
pp. 515-518
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Keyword(s):
Keyword(s):
1991 ◽
Vol 56
(10)
◽
pp. 2020-2029
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