Nanocrystalline silicon film growth morphology control through RF waveform tailoring

2010 ◽  
Vol 43 (41) ◽  
pp. 412001 ◽  
Author(s):  
Erik V Johnson ◽  
Thomas Verbeke ◽  
Jean-Charles Vanel ◽  
Jean-Paul Booth
2021 ◽  
Vol 555 ◽  
pp. 153110
Author(s):  
Kui Liu ◽  
Tan tan ◽  
Xuanpu Zhou ◽  
Nantao Zheng ◽  
Yue Ma ◽  
...  

2008 ◽  
Vol 37 (6) ◽  
pp. 349-355
Author(s):  
A. S. Turtsevich ◽  
O. Yu. Nalivaiko ◽  
V. A. Solodukha ◽  
V. V. Glukhmanchuk ◽  
N. G. Tsirkunova ◽  
...  

2004 ◽  
Vol 338-340 ◽  
pp. 13-18 ◽  
Author(s):  
G.M. Ferreira ◽  
A.S. Ferlauto ◽  
Chi Chen ◽  
R.J. Koval ◽  
J.M. Pearce ◽  
...  

2011 ◽  
Vol 347-353 ◽  
pp. 870-873
Author(s):  
Chun Rong Xue

Nanocrystalline silicon film has become the research hit of today’ s P-V solar technology. It’s optical band gap was controlled through changing the grain size and crystalline volume fraction for the quanta dimension effect. The crystalline volume fraction in nc-Si:H is modulated by varying the hydrogen concentration in the silane plasma. Also, the crystallinity of the material increases with increasing hydrogen dilution ratio, the band tail energy width of the nc-Si:H concurrently decreases. Two sets of nc-Si:H solar cells were made with different layer thicknesss, their electronic and photonic bandgap, absorption coefficient, optical band gap, nanocrystalline grain size(D), and etc have been stuied. In addition, we discussed the relationship between the stress of nc-Si thin films and H2 ratio. At last nc-Si:H solar cells have been designed and prepared successfully in the optimized processing parameters.


2010 ◽  
Vol 59 (7) ◽  
pp. 4901
Author(s):  
Zhang Hong-Wei ◽  
Chen Gai-Rong ◽  
Zhang Li-Wei ◽  
Lu Jing-Xiao ◽  
Wen Shu-Tang

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