scholarly journals Journal of Microelectromechanical Systems

2021 ◽  
Vol 30 (6) ◽  
pp. C2-C2
Keyword(s):  
Microelectromechanical Systems

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation

2006 ◽  
Vol 4 ◽  
pp. 288-305
Author(s):  
A.B. Migranov
Keyword(s):  
Virtual Environment ◽  
Microelectromechanical Systems ◽  
Testing And Debugging ◽  
Development Perspective

The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.

Embedded Microelectromechanical Systems (MEMS) for Measuring Strain in Composites

2000 ◽  
Vol 19 (4) ◽  
pp. 268-277 ◽  
Author(s):  
CHARLES HAUTAMAKI ◽  
SHAYNE ZURN ◽  
SUSAN C. MANTELL ◽  
DENNIS L. POLLA
Keyword(s):  
Microelectromechanical Systems

scholarly journals Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Anton Melnikov ◽  
Hermann A. G. Schenk ◽  
Jorge M. Monsalve ◽  
Franziska Wall ◽  
Michael Stolz ◽  
...  
Keyword(s):  
Finite Element ◽  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Dynamic Performance ◽  
Major Step ◽  
Element Analysis ◽  
Electrostatic Actuators ◽  
Voltage Range ◽  
Drive Voltage ◽  
Depth Analysis

AbstractElectrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

Stability of Ring-Type MEMS Gyroscopes Subjected to Stochastic Angular Speed Fluctuation

2017 ◽  
Vol 139 (4) ◽  
Author(s):  
Samuel F. Asokanthan ◽  
Soroush Arghavan ◽  
Mohamed Bognash
Keyword(s):  
Angular Velocity ◽  
Degrees Of Freedom ◽  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Operating Conditions ◽  
System Stability ◽  
System Response ◽  
Ring Type ◽  
Mems Gyroscopes ◽  
The Stability

Effect of stochastic fluctuations in angular velocity on the stability of two degrees-of-freedom ring-type microelectromechanical systems (MEMS) gyroscopes is investigated. The governing stochastic differential equations (SDEs) are discretized using the higher-order Milstein scheme in order to numerically predict the system response assuming the fluctuations to be white noise. Simulations via Euler scheme as well as a measure of largest Lyapunov exponents (LLEs) are employed for validation purposes due to lack of similar analytical or experimental data. The response of the gyroscope under different noise fluctuation magnitudes has been computed to ascertain the stability behavior of the system. External noise that affect the gyroscope dynamic behavior typically results from environment factors and the nature of the system operation can be exerted on the system at any frequency range depending on the source. Hence, a parametric study is performed to assess the noise intensity stability threshold for a number of damping ratio values. The stability investigation predicts the form of threshold fluctuation intensity dependence on damping ratio. Under typical gyroscope operating conditions, nominal input angular velocity magnitude and mass mismatch appear to have minimal influence on system stability.

scholarly journals Review on stationary phases and coating methods of MEMs gas chromatography columns

2020 ◽  
Vol 39 (1) ◽  
pp. 247-259
Author(s):  
Liu Yang ◽  
Molin Qin ◽  
Junchao Yang ◽  
Genwei Zhang ◽  
Jiana Wei
Keyword(s):  
Gas Chromatography ◽  
Microelectromechanical Systems ◽  
Stationary Phases ◽  
Preparation Methods ◽  
Site Analysis ◽  
Advantages And Disadvantages ◽  
Coating Methods ◽  
On Line ◽  
Inorganic Adsorbents ◽  
Gas Chromatography Columns

Abstract Gas chromatography (GC) is an important and widely used technique for separation and analysis in the field of analytical chemistry. Micro gas chromatography has been developed in response to the requirement for on-line analysis and on-site analysis. At the core of micro gas chromatography, microelectromechanical systems (MEMs) have the advantages of small size and low power consumption. This article introduces the stationary phases of micro columns in recent years, including polymer, carbon materials, silica, gold nanoparticles, inorganic adsorbents and ionic liquids. Preparation techniques ranging from classical coating to unusual sputtering of stationary phases are reviewed. The advantages and disadvantages of different preparation methods are analyzed. The paper introduces the separation characteristics and application progress of MEMs columns and discusses possible developments.

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

2021 ◽  
pp. 105678952110339
Author(s):  
Jiaxing Cheng ◽  
Zhaoxia Li
Keyword(s):  
Damage Mechanics ◽  
Microelectromechanical Systems ◽  
Mechanical Performance ◽  
Damage Model ◽  
Irreversible Damage ◽  
Damage Behavior ◽  
Thermal Actuators ◽  
Long Term Performance ◽  
Term Performance

Effective numerical analysis is significant for the optimal design and reliability evaluation of MEMS, but the complexity of multi-physical field couplings and irreversible damage accumulation in long-term performance make the analysis difficult. In the present paper, the continuum damage mechanics method is used to develop a creep damage model and conduct long-term performance analysis for MEMS thermal actuators with coupled thermo-mechanical damage behavior. The developed damage model can make a connection between the material deterioration due to microstructure changes and the macroscopic responses (the change of thermo-mechanical performance or structure failure). The numerical simulations of coupled thermo-mechanical behavior in long-term performance are implemented using the finite element method, which is validated through comparison with previous literature. The numerical results demonstrate that the proposed damage model and numerical method can provide effective assessment in the long-term performance of MEMS thermal actuators.

scholarly journals Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 902
Author(s):  
Hussamud Din ◽  
Faisal Iqbal ◽  
Byeungleul Lee
Keyword(s):  
Microelectromechanical Systems ◽  
Reduction Rate ◽  
Design Technique ◽  
Matching Method ◽  
Mems Gyroscope ◽  
Mode Split ◽  
The Cross ◽  
The Individual ◽  
Cross Axis ◽  
Ratio Matching

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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