Monitoring Nitride Layer Growth Using Magnetic Sensor
2015 ◽
Vol 69
(1)
◽
pp. 10801
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 97-101
◽
pp. 737-742
◽
Keyword(s):
2011 ◽
Vol 690
◽
pp. 91-94
◽
Keyword(s):
Deposition of Copper Thin Films on Titanium Nitride Layer Prepared by Flow Modulation CVD Technology
2004 ◽
Vol 449-452
◽
pp. 457-460
Keyword(s):
1994 ◽
Vol 27
(6)
◽
pp. 1328-1332
◽
2012 ◽
Vol 59
(2)
◽
pp. 20801
◽
Keyword(s):
1994 ◽
Vol 163-165
◽
pp. 707-712
◽