Designing Thermally Actuated Bimorph as Energy Harvester

2019 ◽  
Vol 6 (1-2) ◽  
pp. 29-38
Author(s):  
Satyam Bhuyan
Keyword(s):  
Energy Harvester ◽  
Microelectromechanical Systems ◽  
Waste Heat ◽  
Piezoelectric Materials ◽  
Radiant Energy ◽  
Energy Generation ◽  
Mems Devices ◽  
Mechanical Motion ◽  
Thermally Actuated ◽  
Working Device

Abstract Microelectromechanical systems (MEMS) are micrometre-size systems that are capable of transforming electrical signals to mechanical signals. In this paper, the use of MEMS devices as a method for harvesting waste heat is explored. A background for the technology and methods is discussed and a method proposed for a working device based upon a thermally heated bimorph actuated by waste radiation alone is investigated. A chopper interrupts the radiant energy inducing an oscillation in the bimorph temperature and thus creates a mechanical motion which can be taken advantage of using piezoelectric materials. Difficulties in harvesting radiant energy with this method are highlighted and suggestions for non-passive energy generation are made based on the outlined principles.

scholarly journals Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

2020 ◽  
Vol 6 (1) ◽  
Author(s):  
Chen Wang ◽  
Xiaoxiao Song ◽  
Weidong Fang ◽  
Fang Chen ◽  
Ioannis Zeimpekis ◽  
...  
Keyword(s):  
Genetic Algorithm ◽  
Degrees Of Freedom ◽  
Microelectromechanical Systems ◽  
Computation Time ◽  
High Sensitivity ◽  
Mems Devices ◽  
Mechanical Motion ◽  
Parameter Mismatch ◽  
Mems Accelerometer ◽  
Large Bandwidth

AbstractThis paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved.

Design Optimization of Low Power and Low Frequency Vibration Based MEMS Energy Harvester

2013 ◽  
Vol 475-476 ◽  
pp. 1624-1628
Author(s):  
Hasnizah Aris ◽  
David Fitrio ◽  
Jack Singh
Keyword(s):  
Low Power ◽  
Energy Harvester ◽  
Piezoelectric Materials ◽  
Geometry Optimization ◽  
Low Frequency ◽  
Substrate Thickness ◽  
Power Harvesting ◽  
Low Frequency Vibration ◽  
Length Width ◽  
Development And Utilization

The development and utilization of different structural materials, optimization of the cantilever geometry and power harvesting circuit are the most commonly methods used to increase the power density of MEMS energy harvester. This paper discusses the cantilever geometry optimization process of low power and low frequency of bimorph MEMS energy harvester. Three piezoelectric materials, ZnO, AlN and PZT are deposited on top and bottom of the cantilever Si substrate. This study focuses on the optimization of the cantilevers length, width, substrate thickness and PZe thickness in order to achieve lower than 600 Hz of resonant frequency. The harvested power for this work is in the range of 0.02 ~ 194.49 nW.

Optimization of spiral-shaped piezoelectric energy harvester using Taguchi method

2017 ◽  
Vol 24 (19) ◽  
pp. 4484-4491 ◽  
Author(s):  
R Tikani ◽  
L Torfenezhad ◽  
M Mousavi ◽  
S Ziaei-Rad
Keyword(s):  
Taguchi Method ◽  
Energy Harvester ◽  
Piezoelectric Materials ◽  
Mechanical Energy ◽  
Experimental Investigations ◽  
Optimum Level ◽  
Low Frequencies ◽  
Piezoelectric Energy ◽  
Resonance Frequencies ◽  
Design Values

Nowadays, environmental energy resources, especially mechanical vibrations, have attracted the attention of researchers to provide energy for low-power electronic circuits. A common method for environmental mechanical energy harvesting involves using piezoelectric materials. In this study, a spiral multimode piezoelectric energy harvester was designed and fabricated. To achieve wide bandwidth in low frequencies (below 15 Hz), the first three resonance frequencies of the beam were designed to be close to each other. To do this, the five lengths of the substrate layer were optimized by the Taguchi method, using an L27 orthogonal array. Each experiment of the Taguchi method was then simulated in ANSYS software. Next, the optimum level of each design variable was obtained. A test rig was then constructed based on the optimum design values and some experimental investigations were conducted. A good correlation was observed between measured and the finite element results.

Wide Bandwidth Piezoelectric MEMS Energy Harvesting

2013 ◽  
Vol 1556 ◽  
Author(s):  
Ruize Xu ◽  
Sang-Gook Kim
Keyword(s):  
Structural Design ◽  
Microelectromechanical Systems ◽  
Piezoelectric Materials ◽  
Ambient Vibration ◽  
Wide Bandwidth ◽  
Frequency Spectra ◽  
Energy Harvesters ◽  
Reasonable Cost ◽  
Continuous Power ◽  
Near Future

ABSTRACTPiezoelectric Microelectromechanical Systems (MEMS) has been proven to be an attractive technology for harvesting small energy from the ambient vibration. Recent advancements in piezoelectric materials and harvester structural design, individually or in combination, have improved MEMS energy harvesters to achieve high enough power density, compactness and ultra wide bandwidth, bringing us closer towards battery-less autonomous sensors systems and networks in near future. Among the breakthroughs, non-linear resonating beam for wide bandwidth resonance is the key development to enable robust operation of MEMS energy harvesters over the unpredictable and uncontrollable frequency spectra of ambient vibration. We expect that a coin size harvester will be able to harvest about 100μW continuous power at below 100 Hz and less than 0.5 g input vibration and at reasonable cost.

Microsensors, MEMS and NEMS Based Complex Adaptive Smart Devices and Systems

2001 ◽  
Author(s):  
Vijay K. Varadan
Keyword(s):  
Self Assembly ◽  
Communication Systems ◽  
Microelectromechanical Systems ◽  
System Level ◽  
Smart Devices ◽  
Mems Devices ◽  
Wafer Level ◽  
Sensors And Actuators ◽  
Complex Adaptive ◽  
Microelectronics Industry

Abstract The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sizes now down at the sub micron level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and MicroElectroMechanical Systems (MEMS). This effort offers the promise of: 1. Increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed for the IC and microelectronics industry. Examples include micro stereo lithographic and micro molding techniques. 2. Developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines. 3. Development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation. 4. Development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems.

MEMS-Enabled Smart Beam-Steering Antennas

2014 ◽  
pp. 183-203
Author(s):  
Hadi Mirzajani ◽  
Habib Badri Ghavifekr ◽  
Esmaeil Najafi Aghdam
Keyword(s):  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Beam Steering ◽  
Smart Antennas ◽  
Phase Shifters ◽  
Rapid Rate ◽  
Mems Devices ◽  
Batch Fabrication ◽  
Mems Technology ◽  
Smart Beam

In recent years, Microelectromechanical Systems (MEMS) technology has seen a rapid rate of evolution because of its great potential for advancing new products in a broad range of applications. The RF and microwave devices and components fabricated by this technology offer unsurpassed performance such as near-zero power consumption, high linearity, and cost effectiveness by batch fabrication in respect to their conventional counterparts. This chapter aims to give an in-depth overview of the most recently published methods of designing MEMS-based smart antennas. Before embarking into the different techniques of beam steering, the concept of smart antennas is introduced. Then, some fundamental concepts of MEMS technology such as micromachining technologies (bulk and surface micromachining) are briefly discussed. After that, a number of RF MEMS devices such as switches and phase shifters that have applications in beam steering antennas are introduced and their operating principals are completely explained. Finally, various configurations of MEMS-enabled beam steering antennas are discussed in detail.

A Renewal Weakest-Link Model of Strength Distribution of Polycrystalline Silicon MEMS Structures

2019 ◽  
Vol 86 (8) ◽  
Author(s):  
Zhifeng Xu ◽  
Roberto Ballarini ◽  
Jia-Liang Le
Keyword(s):  
Experimental Data ◽  
Polycrystalline Silicon ◽  
Microelectromechanical Systems ◽  
Strength Distribution ◽  
Material Strength ◽  
Mems Devices ◽  
Efficient Computation ◽  
Weakest Link ◽  
Large Size ◽  
The Stability

Experimental data have made it abundantly clear that the strength of polycrystalline silicon (poly-Si) microelectromechanical systems (MEMS) structures exhibits significant variability, which arises from the random distribution of the size and shape of sidewall defects created by the manufacturing process. Test data also indicated that the strength statistics of MEMS structures depends strongly on the structure size. Understanding the size effect on the strength distribution is of paramount importance if experimental data obtained using specimens of one size are to be used with confidence to predict the strength statistics of MEMS devices of other sizes. In this paper, we present a renewal weakest-link statistical model for the failure strength of poly-Si MEMS structures. The model takes into account the detailed statistical information of randomly distributed sidewall defects, including their geometry and spacing, in addition to the local random material strength. The large-size asymptotic behavior of the model is derived based on the stability postulate. Through the comparison with the measured strength distributions of MEMS specimens of different sizes, we show that the model is capable of capturing the size dependence of strength distribution. Based on the properties of simulated random stress field and random number of sidewall defects, a simplified method is developed for efficient computation of strength distribution of MEMS structures.

scholarly journals Stability Improvement of Flexible Shallow Shells Using Neutron Radiation

Materials ◽  
2020 ◽  
Vol 13 (14) ◽  
pp. 3187
Author(s):  
Anton V. Krysko ◽  
Jan Awrejcewicz ◽  
Irina V. Papkova ◽  
Vadim A. Krysko
Keyword(s):  
Temperature Field ◽  
Neutron Irradiation ◽  
Microelectromechanical Systems ◽  
Neutron Radiation ◽  
Middle Surface ◽  
Aviation Industry ◽  
Irradiation Effect ◽  
Structural Members ◽  
Mems Devices ◽  
Shallow Shells

Microelectromechanical systems (MEMS) are increasingly playing a significant role in the aviation industry and space exploration. Moreover, there is a need to study the neutron radiation effect on the MEMS structural members and the MEMS devices reliability in general. Experiments with MEMS structural members showed changes in their operation after exposure to neutron radiation. In this study, the neutron irradiation effect on the flexible MEMS resonators’ stability in the form of shallow rectangular shells is investigated. The theory of flexible rectangular shallow shells under the influence of both neutron irradiation and temperature field is developed. It consists of three components. First, the theory of flexible rectangular shallow shells under neutron radiation in temperature field was considered based on the Kirchhoff hypothesis and energetic Hamilton principle. Second, the theory of plasticity relaxation and cyclic loading were taken into account. Third, the Birger method of variable parameters was employed. The derived mathematical model was solved using both the finite difference method and the Bubnov–Galerkin method of higher approximations. It was established based on a few numeric examples that the irradiation direction of the MEMS structural members significantly affects the magnitude and shape of the plastic deformations’ distribution, as well as the forces magnitude in the shell middle surface, although qualitatively with the same deflection the diagrams of the main investigated functions were similar.

Spray-on thermoelectric energy harvester

MRS Advances ◽  
2018 ◽  
Vol 4 (15) ◽  
pp. 851-855 ◽  
Author(s):  
Robert E. Peale ◽  
Seth Calhoun ◽  
Nagendra Dhakal ◽  
Isaiah O. Oladeji ◽  
Francisco J. González
Keyword(s):  
Thin Films ◽  
Power Generation ◽  
Energy Harvester ◽  
Waste Heat ◽  
Spray Deposition ◽  
Electrical Energy ◽  
Seebeck Coefficients ◽  
Thermoelectric Energy ◽  
P Type ◽  
Energy From Waste

AbstractThermoelectric (TE) thin films have promise for harvesting electrical energy from waste heat. We demonstrate TE materials and thermocouples deposited by aqueous spray deposition on glass. The n-type material was CdO doped with Mn and Sn. Two p-type materials were investigated, namely PbS with co-growth of CdS and doped with Na and Na2CoO4. Seebeck coefficients, resistivity, and power generation for thermocouples were characterized.

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