Fluorinated SiO2 Films For Interlayer Dielectrics In Quarter-Micron Ulsi Multilevel Interconnections

1995 ◽  
Vol 381 ◽  
Author(s):  
Tetsuya Homma

AbstractFluorinated SiO2 films for use as interlayer dielectrics in ULSI multilevel interconnections are investigated. The interlayer dielectric film properties and their formation techniques have to meet the following requirements: (1) a low dielectric constant, (2) a high planarization capability, (3) a high capability for narrow gap filling, and (4) a low deposition temperature for low residual stress. To satisfy these requirements, three technologies have been investigated. They are: (i) a fluorinated SiO2 (SiOF) film by room temperature chemical vapor deposition (RTCVD-SiOF) using fluorotrialkoxysilane (FTAS) and pure water as gas sources, (ii) a room temperature liquid phase deposition (LPD) SiO2 film, and (iii) a fluorinated spin-on-glass (SOG) film by fluorotrialkoxysilane vapor treatment (FAST-SOG). The dielectric constant for SiO2 films can be reduced to 3.7 at 1 MHz by the RTCVD and LPD techniques. Although the FAST and RTCVD techniques cannot achieve full planarization, the LPD technique can achieve both global and local planarization because this technique has high capability for selective SiO2 film deposition. The RTCVD, FAST and LPD techniques have shown the possibility to reduce the film formation temperature to room temperature by catalytic reactions, resulting in low residual stress. Other properties of the RTCVD-SiOF, LPD-SiO2 and FAST-SOG films are good enough for the interlayer dielectric film application. The LPD-SiO2 film shows higher endurance properties to moisture than the RTCVD-SiOF and FAST-SOG films.

1997 ◽  
Vol 476 ◽  
Author(s):  
P. H. Townsend ◽  
S. J. Martin ◽  
J. Godschalx ◽  
D. R. Romer ◽  
D. W. Smith ◽  
...  

AbstractA novel polymer has been developed for use as a thin film dielectric in the interconnect structure of high density integrated circuits. The coating is applied to the substrate as an oligomeric solution, SiLK*, using conventional spin coating equipment and produces highly uniform films after curing at 400 °C to 450 °C. The oligomeric solution, with a viscosity of ca. 30 cPs, is readily handled on standard thin film coating equipment. Polymerization does not require a catalyst. There is no water evolved during the polymerization. The resulting polymer network is an aromatic hydrocarbon with an isotropie structure and contains no fluorine.The properties of the cured films are designed to permit integration with current ILD processes. In particular, the rate of weight-loss during isothermal exposures at 450 °C is ca. 0.7 wt.%/hour. The dielectric constant of cured SiLK has been measured at 2.65. The refractive index in both the in-plane and out-of-plane directions is 1.63. The flow characteristics of SiLK lead to broad topographic planarization and permit the filling of gaps at least as narrow as 0.1 μm. The glass transition temperature for the fully cured film is greater than 490 °C. The coefficient of thermal expansivity is 66 ppm/°C below the glass transition temperature. The stress in fully cured films on Si wafers is ca. 60 MPa at room temperature. The fracture toughness measured on thin films is 0.62 MPa m ½. Thin coatings absorb less than 0.25 wt.% water when exposed to 80% relative humidity at room temperature.


2002 ◽  
Vol 734 ◽  
Author(s):  
Alok Nandini U. Roy ◽  
Zubin P. Patel ◽  
A. Mallikarjunan ◽  
H. Bakhru ◽  
T.-M. Lu

ABSTRACTThin films of Ultra-Low K materials such as Xerogel (K=1.76) and MSQ (K=2.2) were implanted with argon, neon, nitrogen, carbon and helium with 2 × 1015 cm−2 and 1 × 1016 cm−2 dose at energies varying from 20 to 50 keV at room temperature. In this work we showed that the surface hardness of the porous films is improved five times as compared to the as-deposited porous films sacrificing the dielectric constant up to 15% after implantation (e.g., from 1.76 to 2.0). The hardness persists after 450 °C annealing. It is also shown that implantation can prevent the penetration of chemical gases such as CVD precursors in the Ultra-Low K dielectrics during a CVD process.


2011 ◽  
Vol 8 (1) ◽  
pp. 71-76
Author(s):  
Viplav Duth Shukla ◽  
CH. Anjaneyulu

Anodization of zircaloy-4 in 0.1 M sulphamic acid has been carried out. Kinetics of anodic oxidation of zircaloy-4 has been studied at a constant current density of 8 mA/cm2and at room temperature. Thickness estimates were made from capacitance data. The plots of formation voltagevs. time, reciprocal capacitancevs. time, reciprocal capacitancevs. formation voltage and thicknessvs. formation voltage were drawn and rate of formation, current efficiency and differential field were calculated. The addition of solvent (ethylene glycol) showed better kinetic results. For 25%, 50% and 75% aquo-glycolic media, the dielectric constant values are low leading to a marked improvement in the kinetics. In 80% ethylene glycol, though the dielectric constant value of solution is less, the kinetics was slow which may be attributed to the fact that the electrolyte becomes highly non-polar. Improvement in the kinetics of oxide film formation was observed by the addition of millimolar concentration of anions (CO32-, SO42-, PO43-). The presence of phosphate ions improved the kinetics of anodization to better extent.


1994 ◽  
Vol 337 ◽  
Author(s):  
Brian C. Auman

ABSTRACTThe mechanical, thermal, electrical and moisture absorption properties of a series of fluorinated, highly rod-like polyimides and copolyimides are reported. Copolymerization with appropriate flexibilizing comonomers resulted in improved elongations versus those of the highly rod-like homopolymers while maintaining, to a large extent,the other desirable properties of the backbone. These materials are considered prime candidates for interlayer dielectric due to their excellent combination of properties.


Author(s):  
Д.Л. Байдаков

Методом химического нанесения из растворов халькогенидных стекол в н-бутиламине получены многокомпонентные халькогенидные пленки CuI-As2Se3, CuI-PbI2-As2Se3, CuI-SbI3-As2Se3, CuI-SbI3-PbI2-As2Se3. Синтез многокомпонентных медьсодержащих халькогенидных стекол, использовавшихся для нанесения пленок, проводили методом вакуумной плавки в кварцевых ампулах при температуре 400…950 °С и остаточном давлении не более 0,13 Па. Закалку стекол производили от 600 °С в воду со льдом с разливом расплава в ампуле. Навеску стекла размельчали в порошок и кипятили в н-бутиламине до полного растворения. Для предотвращения процессов окисления, нанесение и отжиг пленок проводили в атмосфере химически инертного азота. Подложку помещали на устройство для вращения, наносили на нее раствор и вращали подложку со скоростью несколько тысяч оборотов в минуту. Отжиг пленок проводили при температуре 100 °С в течение 1 ч. Измерение электропроводности полученных пленок проводили на постоянном и переменном токе в зависимости от значений электропроводности в температурном интервале 20…100 °С. Измерение коэффициентов диффузии проводили абсорбционным методом. Из диффузионных экспериментов определены значения коэффициентов диффузии катионов изотопа 110mAg в медьсодержащих халькогенидных пленках. Установлено, что значения коэффициентов диффузии ионов Ag+ в химически нанесенных пленках и исходных стеклах практически не различаются. Аналогию значений коэффициентов диффузии изотопа 110mAg в халькогенидных стеклах и пленках на их основе можно объяснить сохранением полимерной сетки связей халькогенидных стекол при их растворении в органических основаниях (аминах). В процессе нанесения и формирования пленок полимерная (макромолекулярная) структура раствора халькогенидных стекол сохраняется. The method of chemical deposition from solutions of chalcogenide glasses in n-butyl amine obtained multicomponent chalcogenide films CuI-As2Se3, CuI-PbI2-As2Se3, CuI-SbI3-As2Se3, CuI-SbI3-PbI2-As2Se3. Synthesis of copper multicomponent chalcogenide glasses, used for film deposition was carried out by vacuum melting in quartz ampoule at a temperature of 400…950 °C and a residual pressure of not more than 0.13 Pa. The temperature of glass produced from the 600 °C to the ice water spill of the melt in the ampoule. Weigh glass comminuted to a powder and heated in n-butylamine until complete dissolution. To prevent oxidation, deposition and annealing of the films was carried out in an atmosphere of nitrogen chemically inert. The substrate is placed on a device for rotating, it was applied to the solution and the substrate was rotated at a speed of several thousand revolutions per minute. Annealing of the films was carried out at 100 °C for 1 hour. Measurement of the electrical conductivity of the obtained films was conducted at a constant current and variable depending on the conductivity values ​​in the temperature range from 20 to 100 °C. Measurement of diffusion coefficients was performed according to the absorption method. From diffusion experiments, the values ​​of the diffusion coefficients 110mAg isotope cations in copper chalcogenide films. It was found that the values ​​of the diffusion coefficients of the ions Ag+ in a chemically deposited films and the original glasses are indistinguishable. The analogy of the diffusion coefficient values ​​110mAg isotope in chalcogenide glasses and films based on them can be attributed to the preservation of the polymer network connections chalcogenide glasses when dissolved in organic bases (amines). During application and film formation the polymer (macromolecular) structure of chalcogenide glasses of the solution is maintained.


Author(s):  
Gyuseung Han ◽  
In Won Yeu ◽  
Kun Hee Ye ◽  
Seung-Cheol Lee ◽  
Cheol Seong Hwang ◽  
...  

Through DFT calculations, a Be0.25Mg0.75O superlattice having long apical Be–O bond length is proposed to have a high bandgap (>7.3 eV) and high dielectric constant (∼18) at room temperature and above.


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