Material Properties of Coherent Tin Films
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AbstractIn this paper, material properties of low pressure, metallic mode Coherent TiN and poison mode Coherent TiN have been examined. The material properties include resistivity, crystal orientation, stress, lattice spacing, density, texture, atomic composition, bonding, roughness, hydrogen content, and grain size. Various analytical tools have been used to analyze the TiN films.
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2004 ◽
Vol 11
(04n05)
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pp. 433-442
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2014 ◽
Vol 610
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pp. 1002-1020
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2012 ◽
Vol 581-582
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pp. 777-781
2016 ◽
Vol 37
(3)
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pp. 289-292
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