Effect of CMP Pad Exposure to Aqueous Media on the Pad Properties. Part 1. Dynamic Mechanical and Modulated DSC Analysis
Keyword(s):
AbstractSoaking of polyurethane-based CMP pad in oxide slurry, de-ionized water, and pH buffer solution, and its effect on thermal and mechanical properties of the pads was studied using Dynamic Mechanical Analysis and Modulated Differential Scanning Calorimetry. Pad softening due to soaking was established, and softening mechanisms are discussed. Diffusion of the aqueous medias to polyurethane pad was described using Fickian diffusion model.
2012 ◽
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pp. 558-565
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pp. 2684-2689
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