Mechanism Study of Contact Corrosion in Unpatterned Metal Wafer

1996 ◽  
Author(s):  
C.-H. Chang ◽  
Y.-S. Huang ◽  
H.-W. Chang
Keyword(s):  
Resistance Mechanism ◽  
Metal Corrosion ◽  
Mechanism Study ◽  
Chain Reaction ◽  
Influence Of Water ◽  
New Type ◽  
Metal Materials ◽  
Barrier Metal ◽  
Metal Etching ◽  
Wafer Edge

Abstract A new type metal corrosion, which occurred at contact hole of unpatterned metal wafer, is presented. This type of corrosion is strongly related to wafer queue time from metal sputtering to metal etching, it is thought to be due to chain reaction of chlorine from environmental results., fluorine from wafer edge and moisture desorbed by undermetal dielectric (ILD). Moreover, all corrosion sites accompany with poor metal stepcoverage that is caused by either large seams in W plug or rough ILD surface. Experimental results are presented which show the influence of water desorbed by different ILD materials, capability of water barrier with different barrier metal materials and post W etchback (WEB) thermal treatment on corrosion resistance. Mechanism are proposed to explain the formation of corrosion on unpatterned metal.

Failure Types & Analysis In Cu Process Development of Design-Rule 0.18μm CPU

2001 ◽  
Author(s):  
DongKwon Jeong ◽  
JuHyeon Ahn ◽  
SangIn Lee ◽  
JooHyuk Chung ◽  
ByungLyul Park ◽  
...  
Keyword(s):  
Process Improvement ◽  
Process Development ◽  
Metal Corrosion ◽  
Pass Rate ◽  
Design Rule ◽  
The Novel ◽  
Corrosion Loss ◽  
Barrier Metal ◽  
Development State ◽  
Failure Types

Abstract This paper presents the problems, the solutions, and the development state of the novel 0.18 μm Cu Metal Process through failure analysis of the Alpha CPU under development at Samsung Electronics. The presented problems include : “Via Bottom Lifting” induced by the Cu Via void, “Via Bottom dissociation” due to the IMD stress, “Via side dissociation” due to the poor formation of the Barrier Metal, “Via short/not-open failure” due to the IMD lifting, and Cu metal Corrosion/Loss. The analysis was carried out on the Via Contact Test Chain Patterns, using the “Electron (ION) Charge Up” method. After carefully analyzing each of the failure types, process improvement efforts followed. As a result, the pass rate of the via contact Rc was brought up from a mere 20% to 95%, and the device speed higher than 1.1 GHz was achieved, which surpasses the target speed of 1 GHz.

scholarly journals Enzyme catalysis as a chain reaction

1991 ◽  
Vol 279 (3) ◽  
pp. 855-861 ◽  
Author(s):  
S E Szedlacsek ◽  
R G Duggleby ◽  
M O Vlad
Keyword(s):  
Reaction Mechanism ◽  
Kinetic Mechanism ◽  
Point Of View ◽  
Simple Type ◽  
Chain Reaction ◽  
Proposed Model ◽  
New Type ◽  
A Chain ◽  
Theoretical Considerations ◽  
Classical Mechanism

A new type of enzyme kinetic mechanism is suggested by which catalysis may be viewed as a chain reaction. A simple type of one-substrate/one-product reaction mechanism has been analysed from this point of view, and the kinetics, in both the transient and the steady-state phases, has been reconsidered. This analysis, as well as literature data and theoretical considerations, shows that the proposed model is a generalization of the classical ones. As a consequence of the suggested mechanism, the expressions, and in some cases even the significance of classical constants (Km and Vmax.), are altered. Moreover, this mechanism suggests that, between two successive enzyme-binding steps, more than one catalytic act could be accomplished. The reaction catalysed by alcohol dehydrogenase was analysed, and it was shown that this chain-reaction mechanism has a real contribution to the catalytic process, which could become exclusive under particular conditions. Similarly, the mechanism of glycogen phosphorylase is considered, and two partly modified versions of the classical mechanism are proposed. They account for both the existing experimental facts and suggest the possibility of chain-reaction pathways for any polymerase.

Carbon Materials and Their Modified Materials for Lithium Ion Battery Anodes : A Comprehensive Review

2021 ◽  
Author(s):  
Qiaoyu feng ◽  
Xueye Chen
Keyword(s):  
Electrical Conductivity ◽  
Carbon Materials ◽  
Negative Electrode ◽  
Lithium Ion ◽  
Lithium Ions ◽  
New Type ◽  
Metal Materials ◽  
Negative Electrode Material ◽  
Poor Stability ◽  
Carbon Based

<p>As a negative electrode material for lithium ion batteries (LIBs), carbon has a higher cycle life and higher safety. However, it has poor electrical conductivity, low charging and discharging platform, and poor stability of layered structure. Some carbon materials are complicated to make such as synthetic graphene, and the shape is difficult to control. Metal materials have good electrical conductivity, but due to the rapid volume expansion of lithium ions during the cycle of insertion and extraction, the electrodes are extremely quickly crushed and accompanied by extremely rapid capacity decay. Scholars have combined the advantages of carbon and metal materials to create a new type of carbon-based composite material. This article outlines the use of carbon based composite materials as lithium-ion electrodes to improve battery performance.</p>

scholarly journals Molecular Epidemiology of Rhodococcus equi Based on traA, vapA, and vapB Virulence Plasmid Markers

2007 ◽  
Vol 196 (5) ◽  
pp. 763-769 ◽  
Author(s):  
Alain A Ocampo-Sosa ◽  
Deborah A Lewis ◽  
Jesús Navas ◽  
Frances Quigley ◽  
Raquel Callejo ◽  
...  
Keyword(s):  
Polymerase Chain Reaction ◽  
Molecular Typing ◽  
Rhodococcus Equi ◽  
Virulence Plasmid ◽  
Chain Reaction ◽  
Gene Markers ◽  
Typing System ◽  
New Type ◽  
Polymerase Chain ◽  
Related Plasmid

AbstractMolecular typing of the actinomycete Rhodococcus equi is insufficiently developed, and little is known about the epidemiology and transmission of this multihost pathogen. We report a simple, reliable polymerase chain reaction typing system for R. equi based on 3 plasmid gene markers: traA from the conserved conjugal transfer machinery and vapA and vapB, found in 2 different plasmid subpopulations. This “TRAVAP” typing scheme classifies R. equi into 4 categories: traA+/vapA+B−, traA+/vapA−B+, traA+/vapAB−, and traA−/vapAB− (plasmidless). A TRAVAP survey of 215 R. equi strains confirmed the strong link between vapA (traA+/vapA+B− plasmids) and horse isolates and revealed other host-related plasmid associations: between traA+/vapA−B+ and pigs and between traA+/vapAB−—a new type of R. equi plasmid—and cattle. Plasmidless strains were more frequent among isolates from nonpathological specimens. All plasmid categories were common in human isolates, which possibly reflects the predominantly opportunistic nature of R. equi infection in this host and a zoonotic origin.

Carbon Materials and Their Modified Materials for Lithium Ion Battery Anodes : A Comprehensive Review

2021 ◽  
Author(s):  
Qiaoyu feng ◽  
Xueye Chen
Keyword(s):  
Electrical Conductivity ◽  
Carbon Materials ◽  
Negative Electrode ◽  
Lithium Ion ◽  
Lithium Ions ◽  
New Type ◽  
Metal Materials ◽  
Negative Electrode Material ◽  
Poor Stability ◽  
Carbon Based

<p>As a negative electrode material for lithium ion batteries (LIBs), carbon has a higher cycle life and higher safety. However, it has poor electrical conductivity, low charging and discharging platform, and poor stability of layered structure. Some carbon materials are complicated to make such as synthetic graphene, and the shape is difficult to control. Metal materials have good electrical conductivity, but due to the rapid volume expansion of lithium ions during the cycle of insertion and extraction, the electrodes are extremely quickly crushed and accompanied by extremely rapid capacity decay. Scholars have combined the advantages of carbon and metal materials to create a new type of carbon-based composite material. This article outlines the use of carbon based composite materials as lithium-ion electrodes to improve battery performance.</p>

Dependence of copper interconnect electromigration phenomenon on barrier metal materials

2003 ◽  
Vol 43 (9-11) ◽  
pp. 1545-1550 ◽  
Author(s):  
Masashi Hayashi ◽  
Shinji Nakano ◽  
Tetsuaki Wada
Keyword(s):  
Copper Interconnect ◽  
Metal Materials ◽  
Barrier Metal

Prevalence of a Novel Resistance Mechanism to PPO-Inhibiting Herbicides in Waterhemp (Amaranthus tuberculatus)

Weed Science ◽  
2008 ◽  
Vol 56 (3) ◽  
pp. 371-375 ◽  
Author(s):  
Ryan M. Lee ◽  
Aaron G. Hager ◽  
Patrick J. Tranel
Keyword(s):  
Sequence Data ◽  
Resistance Mechanism ◽  
Chain Reaction ◽  
Gene Encoding ◽  
Pcr Marker ◽  
Whole Plant ◽  
Allele Specific ◽  
Amaranthus Tuberculatus ◽  
Polymerase Chain ◽  
Unique Mechanism

Resistance to protoporphyrinogen oxidase (PPO)-inhibiting herbicides in waterhemp has been shown previously to be the result of a unique mechanism. Specifically, a three–base-pair (3-bp) deletion in the PPX2L gene, a gene encoding both plastid- and mitochondria-targeted PPO enzymes, confers herbicide resistance in this species. Furthermore, when this unique mechanism was initially characterized it was presumed that waterhemp contained three PPX genes, PPX1, PPX2S, and PPX2L, and that the resistant biotypes were missing PPX2S. Here, allele testing and examination of genetic sequence data demonstrate that there are likely only two PPX genes in waterhemp, PPX1 and PPX2L. Next, to determine the prevalence of this mechanism of resistance in Illinois waterhemp, we developed an allele-specific polymerase chain reaction (PCR) marker that amplifies only the 3-bp deletion allele, ΔG210, of PPX2L. By utilizing this marker, we show that the ΔG210 PPX2L allele correlated with whole-plant resistance to PPO inhibitors in each of four other waterhemp populations evaluated from Illinois.

Occurrence of clinical isolates ofKlebsiella pneumoniaeharboring chromosomally mediated and plasmid-mediated CTX-M-15 β-lactamase in a Tunisian hospital

2012 ◽  
Vol 58 (9) ◽  
pp. 1099-1103 ◽  
Author(s):  
Chedly Chouchani ◽  
Allaaeddin El Salabi ◽  
Rim Marrakchi ◽  
Nader Abouelkacem ◽  
Timothy R. Walsh
Keyword(s):  
Health Care Professionals ◽  
Resistance Mechanism ◽  
Multidrug Resistant ◽  
Clinical Isolates ◽  
Third Generation ◽  
Chain Reaction ◽  
Resistant Strains ◽  
Polymerase Chain ◽  
The Impact ◽  
Third Generation Cephalosporins

The spread of multidrug-resistant strains of Klebsiella pneumoniae in hospitals is of concern to clinical microbiologists, health care professionals, and physicians because of the impact infections caused by these bacteria have in causing morbidity and mortality. Clinical isolates of K. pneumoniae have been found to show resistance to third-generation cephalosporins as a result of acquiring extended-spectrum β-lactamase-producing genes, such as blaCTX-M. Since little is known about the mechanisms of antibiotic resistance observed in Kasserine hospital, Tunisia, this study was undertaken to investigate the mechanisms by which clinical isolates of K. pneumoniae resist β-lactam antibiotics. Twelve strains of K. pneumoniae were collected from patients admitted to Kasserine hospital; these isolates showed multiresistance phenotypes. Molecular genetics investigations using polymerase chain reaction, S1 digestion, and pulsed-field gel electrophoresisshowed that blaCTX-M-15in association with ISEcp1 is responsible for the resistance of these strains to third-generation cephalosporins. It has been determined that blaCTX-M-15is chromosomally mediated and plasmid mediated, which alarming need for infection control to prevent the outbreak of such a resistance mechanism.

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