scholarly journals A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 178
Author(s):  
Lei Li ◽  
Hanbiao Liu ◽  
Mingyu Shao ◽  
Chicheng Ma
Keyword(s):  
Resonance Frequency ◽  
Microelectromechanical Systems ◽  
Frequency Stabilization ◽  
Stochastic Dynamic ◽  
Driving Voltage ◽  
Harmonic Load ◽  
Resonant Structure ◽  
Mass Detection ◽  
Resonant Sensors ◽  
Nonlinear Force

Frequency stabilization can overcome the dependence of resonance frequency on amplitude in nonlinear microelectromechanical systems, which is potentially useful in nonlinear mass sensor. In this paper, the physical conditions for frequency stabilization are presented theoretically, and the influence of system parameters on frequency stabilization is analyzed. Firstly, a nonlinear mechanically coupled resonant structure is designed with a nonlinear force composed of a pair of bias voltages and an alternating current (AC) harmonic load. We study coupled-mode vibration and derive the expression of resonance frequency in the nonlinear regime by utilizing perturbation and bifurcation analysis. It is found that improving the quality factor of the system is crucial to realize the frequency stabilization. Typically, stochastic dynamic equation is introduced to prove that the coupled resonant structure can overcome the influence of voltage fluctuation on resonance frequency and improve the robustness of the sensor. In addition, a novel parameter identification method is proposed by using frequency stabilization and bifurcation jumping, which effectively avoids resonance frequency shifts caused by driving voltage. Finally, numerical studies are introduced to verify the mass detection method. The results in this paper can be used to guide the design of a nonlinear sensor.

scholarly journals Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

2014 ◽  
Author(s):  
Karim M. Masri ◽  
Mohammad I. Younis
Keyword(s):  
Shooting Method ◽  
Electrode Configuration ◽  
Mass Detection ◽  
Order Model ◽  
Response Curves ◽  
Reduced Order ◽  
Resonant Sensors ◽  
The Third ◽  
Higher Order Modes ◽  
Multi Mode

We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.

Nano Carbon 1D and 2D Nanomechanical Resonators

2014 ◽  
Vol 1693 ◽  
Author(s):  
Jaesung Lee ◽  
Philip X.-L. Feng ◽  
Anupama B. Kaul
Keyword(s):  
Resonance Frequency ◽  
Carbon Deposition ◽  
Chemical Vapor ◽  
Noise Spectrum ◽  
Nanoelectromechanical Systems ◽  
Mass Detection ◽  
One Dimensional ◽  
Noise Measurements ◽  
Nano Carbon ◽  
Grown Graphene

ABSTRACTWe demonstrate one-dimensional (1D) and two-dimensional (2D) resonant nanoelectromechanical systems (NEMS) derived from nano carbon materials, where the resonance frequency and the quality (Q) factor of the devices are measured experimentally using ultrasensitive optical interferometry. The 1D nano carbon resonators are formed using carbon nanofibers (CNFs) which are synthesized using a plasma-enhanced chemical vapor deposition (PECVD) process, while the 2D nanocarbon resonators are based on CVD grown graphene. The CNFs are prototyped into few-μm-long cantilever-shaped 1D resonators, where the resonance frequency and Qs are extracted from measurements of the undriven thermomechanical noise spectrum. The thermomechanical noise measurements yield resonances in the ∼3–15 MHz range, with Q of ∼200–800. Significant changes in resonance characteristics are observed due to electron beam induced amorphous carbon deposition on the CNFs, which suggests that 1D CNF resonators have strong prospects for ultrasensitive mass detection. We also present NEMS resonators based on 2D graphene nanomembranes, which exhibit robust undriven thermomechanical resonances for the extraction of ultrasmall strain levels.

Inverse Eigenmode Method for Identifying and Locating Added Mass in Mechanically Diverse Coupled Microresonantor Arrays

2011 ◽  
Author(s):  
Aldo A. J. Glean ◽  
John A. Judge ◽  
Joseph F. Vignola
Keyword(s):  
Resonance Frequency ◽  
Frequency Shift ◽  
Mode Shape ◽  
Added Mass ◽  
Inverse Eigenvalue Problem ◽  
Single Frequency ◽  
Mass Detection ◽  
Detection Scheme ◽  
Shift Method ◽  
Inverse Eigenvalue

This paper summarizes a numerical analysis of an eigenmode-based approach for ultrasensitive mass detection via coupled microcantilevers. Mass detection using microcantilevers typically entails the observation of shifts in resonance frequency. Recently, detection systems have been proposed in which multiple cantilever sensors are coupled, either directly or by attachment to a single shuttle mass. Once sensors are coupled, however, mass adsorption on a single sensor alters all eigenmodes of the system. Thus, one disadvantage of the frequency-shift method in such cases is the need for strong mode localization, such that the shift of a single frequency can be associated with a mass change on a specific sensor. The consequent requirement for weak coupling limits the number of microcantilevers that can occupy a specific frequency band. The proposed eigenmode-based detection scheme involves solving the inverse eigenvalue problem to identify added mass, and can be used in cases where more than one eigenfrequency has shifted significantly. The method requires a single measured mode shape and corresponding natural frequency, selected from among those where a shift was observed. The fidelity of the identification of added mass and its location depends on the ability to accurately measure the mode shape, and on the amplitude with which each cantilever vibrates in the chosen mode (in modes without strong localization, multiple cantilevers respond with significant amplitude). Simulation results are presented that quantify, as a function of measurement noise, the ability of the method to accurately identify the cantilever(s) where mass adheres. In cases in which the resonance frequency-shift method is inappropriate due to non-localized modes, the inverse eigenvalue method proposed here can be used to identify both the amount and location of the added mass.

Force Control of Linear Motor Stages for Microassembly

2003 ◽  
Author(s):  
Jason J. Gorman ◽  
Nicholas G. Dagalakis
Keyword(s):  
Force Control ◽  
Microelectromechanical Systems ◽  
Linear Motor ◽  
Dynamic Friction ◽  
Nonlinear Friction ◽  
Ripple Effects ◽  
Micro Scale ◽  
Working Volume ◽  
Nonlinear Force ◽  
Force Ripple

The microassembly of microelectromechanical systems from various micro-components requires the development of many new robotic capabilities. One of these capabilities is force control for handling micro-scale components with force control resolution on the order of micronewtons. In this paper, the force control of linear motor stages is discussed with application to the microassembly of MEMS. Linear motor stages provide an attractive solution for microassembly robots because they have a large working volume and can achieve high-precision positioning. However, the nonlinear friction and force ripple effects inherent in linear stages provide an obstacle to the required level of force control. A model of a single motor stage has been developed including dynamic friction effects. Based on this model, a robust nonlinear force controller has been designed to meet the microassembly requirements. The controller has been tested in simulation to demonstrate its effectiveness.

scholarly journals MEMS resonator mass loading noise model: The case of bimodal adsorbing surface and finite adsorbate amount

2021 ◽  
Vol 34 (3) ◽  
pp. 367-380
Author(s):  
Ivana Jokic ◽  
Olga Jaksic ◽  
Milos Frantlovic ◽  
Zoran Jaksic ◽  
Koushik Guha
Keyword(s):  
Microelectromechanical Systems ◽  
Noise Model ◽  
Stable Operation ◽  
Mass Loading ◽  
Mems Devices ◽  
Design Development ◽  
Resonant Sensors ◽  
Mems Resonator ◽  
Novel Approach ◽  
Adsorption Desorption

Modeling of adsorption and desorption in microelectromechanical systems (MEMS) generally is crucial for their optimization and control, whether it is necessary to decrease the adsorption-desorption influence (thus ensuring stable operation of ultra-precise micro and nanoresonators) or to increase it (and enhancing in this manner the sensitivity of chemical and biological resonant sensors). In this work we derive and use analytical mathematical expressions to model stochastic fluctuations of the mass adsorbed on the MEMS resonator (mass loading noise). We consider the case where the resonator surface incorporates two different types of binding sites and where non-negligible depletion of the adsorbate occurs in a closed resonator chamber. We arrive at a novel expression for the power spectral density of mass loading noise in resonators and prove the necessity of its application in cases when resonators are exposed to low adsorbate concentrations. We use the novel approach presented here to calculate the resonator performance. In this way we ensure optimization of these MEMS devices and consequentially abatement of adsorption-desorption noise-caused degradation of their operation, both in the case of micro/nanoresonators and resonant sensors. This work is intended for a general use in the design, development and optimization of different MEMS systems based on mechanical resonators, ranging from the RF components to chemical and biological sensors.

scholarly journals An Inverted L Antenna with a Parasitic Structure for RFID Tag

2014 ◽  
Vol 1 ◽  
pp. 63-70
Author(s):  
Salvador Ricardo Meneses-González ◽  
José Luis Lopez-Bonilla
Keyword(s):  
Resonance Frequency ◽  
Experimental Tests ◽  
Simulation Software ◽  
Antenna Design ◽  
Design Parameters ◽  
Resonant Structure ◽  
Rfid Tag

An inverted L antenna altered by a parasitic resonant structure is designed for RFID tag. In order to determine the performance of varying design parameters on impedance and resonance frequency, HFSS simulation software and experimental tests are carried out. This way, the focus of this work is RFID tag antenna design based on the structure above mentioned.

Energy harvesting using an array of multifunctional resonators

2012 ◽  
Vol 24 (2) ◽  
pp. 168-179 ◽  
Author(s):  
Kota Mikoshiba ◽  
James M Manimala ◽  
CT Sun
Keyword(s):  
Energy Harvesting ◽  
Kinetic Energy ◽  
Resonance Frequency ◽  
Band Gap ◽  
Vibration Isolation ◽  
Microelectromechanical Systems ◽  
Stop Band ◽  
Unit Cell ◽  
External Work ◽  
Local Resonance

Energy harvesting from structural vibrations using an array of multifunctional resonators based on the theory of locally resonant materials is demonstrated. Such locally resonant structures exhibit a stop band for elastic wave propagation. The band gap frequency range depends on the local resonance frequency of the microstructure. One method to realize this is through the use of an array of embedded resonators where the external work done is stored as kinetic energy of the internal mass when the forcing frequency is close to the local resonance frequency. This mechanism can be used to harvest energy by converting the kinetic energy into electrical energy, thus bestowing a multifunctional utility to the structure. We use a spring-loaded magnet enclosed in a capped poly(methyl methacrylate) tube equipped with copper coils to create a unit cell that acts both as a resonator and as a linear generator. Experiments on a serial array of seven unit cells exhibit a band gap between 146.5 (local resonance frequency) and 171 Hz with a peak voltage generation of 3.03 V at steady state. The continuous effective power generated by a single unit cell across a 1-Ω load resistor is 36 mW, indicating the feasibility of constructing vibration isolation structures that can power simple electronic and microelectromechanical systems devices. The applicability of using the device as a transducer to measure the local resonance frequency and the global resonance frequency of the structure is also discussed.

scholarly journals A biomimetic accelerometer inspired by the cricket's clavate hair

2014 ◽  
Vol 11 (97) ◽  
pp. 20140438 ◽  
Author(s):  
H. Droogendijk ◽  
M. J. de Boer ◽  
R. G. P. Sanders ◽  
G. J. M. Krijnen
Keyword(s):  
Resonance Frequency ◽  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Detection Threshold ◽  
Gravitational Acceleration ◽  
Noise Levels ◽  
Short Term ◽  
Directional Response ◽  
System A ◽  
Short Term Adaptation

Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. An analytical model is presented for the design of the accelerometer, and guidelines are derived to reduce responsivity due to flow-induced contributions to the accelerometer's output. Measurements show that this microelectromechanical systems (MEMS) hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 ms −2 and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations and a low responsivity to airflow. Further, the accelerometer's physical limits with respect to noise levels are addressed and the possibility for short-term adaptation of the sensor to the environment is discussed.

Analysis of the Application of Piezoelectric Ceramic Material in the De-Icing Technique of the Aircrafts

2017 ◽  
Vol 730 ◽  
pp. 580-586
Author(s):  
Qing Ying Li ◽  
Yong Jiu Zhu
Keyword(s):  
Resonance Frequency ◽  
Ceramic Material ◽  
Piezoelectric Ceramic ◽  
Piezoelectric Ceramics ◽  
Ceramic Materials ◽  
Design Parameters ◽  
Driving Voltage ◽  
Driving Frequency ◽  
Simulation And Experiment ◽  
Design Factors

The application of piezoelectric ceramic material in de-icing technique of aircrafts is presented in numerical simulation and experiment methods. Firstly, the ice properties are introduced briefly as the evaluation of device design. Then, modal simulation of the testing skin of NACA 0030 is performed to determine the position where the piezoelectric ceramics fix. The resonance frequency as the driving frequency in the experiment is calculated in harmonic analysis with the actuators bonding on the testing skin model. Moreover, piezoelectric de-icing rig is fabricated as the modeling results. It is shown that the driving frequency agrees well with the calculated resonance frequency, and the ice can be removed when the driving frequency is 1530 Hz and the driving voltage is 650 V. In addition, design factors as material properties, size of the ceramics, and excitation voltage are discussed. From the numerical calculation, the stress will vary with different piezoelectric ceramic materials and sizes of the ceramics. It will decrease with the increase of thickness of the piezoelectric ceramics, but increase linearly with the increase of the voltage. Therefore it is considerable to choose design parameters for piezoelectric de-icing systems.

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