scholarly journals Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

Sensors ◽  
2021 ◽  
Vol 21 (16) ◽  
pp. 5513
Author(s):  
Changhe Sun ◽  
Yufei Liu ◽  
Bolun Li ◽  
Wenqu Su ◽  
Mingzhang Luo ◽  
...  
Keyword(s):  
Pupil Size ◽  
Optical Devices ◽  
Linear Control ◽  
Cmos Process ◽  
Driving Voltage ◽  
Micro Electro Mechanical Systems ◽  
Scanning Mirror ◽  
Rotation Transformation ◽  
Piezoelectric Mems ◽  
Mechanical Rotation

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great demand for numerous optoelectronic applications. However, the existing actuation strategies are severely limited for poor compatibility with CMOS process, non-linear control, insufficient mirror size and small angular travel. In this paper, a novel, particularly efficient ScAlN-based piezoelectric MEMS mirror with a pupil size of 10 mm is presented. The MEMS mirror consists of a reflection mirror plate, four meandering springs with mechanical rotation transformation, and eight right-angle trapezoidal actuators designed in Union Jack-shaped form. Theoretical modeling, simulations and comparative analysis have been investigated for optimizing two different device designs. For Device A with a 1 mm-length square mirror, the orthogonal and diagonal static tilting angles are ±36.2°@200 VDC and ±36.2°@180 VDC, respectively, and the dynamic tilting angles increases linearly with the driving voltage. Device B with a 10 mm-length square mirror provides the accessible tilting angles of ±36.0°@200 VDC and ±35.9°@180 VDC for horizontal and diagonal actuations, respectively. In the dynamic actuation regime, the orthogonal and diagonal tilting angles at 10 Hz are ±8.1°/Vpp and ±8.9°/Vpp, respectively. This work confirmed that the Union Jack-shaped arrangement of trapezoidal actuators is a promising option for designing powerful optical devices.

MEMS Scanning Mirror with Vertical Comb Actuator Based on Latching Technique

2013 ◽  
Vol 712-715 ◽  
pp. 2202-2205
Author(s):  
Qing Hua Chen ◽  
Yan Mei Li ◽  
Ying Jun Chen ◽  
Wen Gang Wu
Keyword(s):  
Small Variation ◽  
Optical Switches ◽  
Silicon On Insulator ◽  
Driving Voltage ◽  
Micro Electro Mechanical Systems ◽  
Scanning Angle ◽  
Scanning Mirror ◽  
Batch Fabrication ◽  
Mechanical Spring ◽  
Novel Design

A MEMS(Micro-Electro-Mechanical Systems) scanning mirror with vertical comb actuator was designed, modeled, fabricated and tested, which can be widely applied in scanning micromirrors, optical switches, and variable capacitors. Purposive latching has been successfully applied to the batch fabrication of vertical comb actuators made of silicon on insulator (SOI). The manufacturing process is introduced, and a novel design of latching structure and mechanical spring is also presented. The latching of microstructures is enabled in a controlled manner and significantly reduces the distance between the combs, reducing the driving voltage. The prototype microactuators operate at the driving voltage of 28 Vdc with 9.6 optical angle. A reliability test on an unpackaged actuator with more than 100 million cycles of operation showed extremely small variation in the scanning angle and the driving voltage, showing no sign of degradation in the induced latching interface or the microstructures.

An Optical Diffraction Microphone with Active Grating Diaphragm

2005 ◽  
Vol 872 ◽  
Author(s):  
Kazuhiro Suzuki ◽  
Hideyuki Funaki ◽  
Yujiro Naruse
Keyword(s):  
Electrostatic Force ◽  
Complementary Metal Oxide Semiconductor ◽  
Metal Oxide Semiconductor ◽  
Optical Diffraction ◽  
Oxide Semiconductor ◽  
Cmos Process ◽  
Sound Waves ◽  
Micro Electro Mechanical Systems ◽  
Light Waves ◽  
Arbitrary Frequency

AbstractWe present a new conceptual active optical microphone based on complementary metal-oxide semiconductor (CMOS) - micro electro mechanical systems (MEMS) micromachining techniques. The diaphragm of the microphone has a diffracting grating fabricated by the CMOS process with only a small number of post-processes. The active microphone actuates the diaphragm on an arbitrary frequency by electrostatic force, and detects sound waves by the light waves. From the verification experiment result, this active microphone was able to perform advanced functions, such as the amplifier effect and the detection of phase information of sound waves.

scholarly journals Optimization and Design of Integrated Space Target

2017 ◽  
Vol 11 (1) ◽  
pp. 125-140
Author(s):  
Mingxi Xue
Keyword(s):  
Detection System ◽  
Echo Signal ◽  
Micro Electro Mechanical Systems ◽  
Design And Optimization ◽  
Scanning Mirror ◽  
Laser Driver ◽  
Driver Circuit ◽  
Processing Module ◽  
Laser Module ◽  
Space Target

Background & Objective: The design and optimization of laser detection system based on MEMS (Micro-electro Mechanical Systems) scanning mirror is presented in the paper. According to requirements of application, it adopts the laser module to design the laser driver circuit, and the designed modulation circuit can satisfy the actual needs. Method: The designed information processing module is composed of the echo receiving module, signal amplification and filter circuit module, and the synchronous circuit of measuring angle and distance, etc. Conclusion: It gives out the distance decoding method and explores the method of capturing echo signal, which can fast and accurately calculate the distance and azimuth information of scanning.

scholarly journals Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Sensors ◽  
2020 ◽  
Vol 20 (11) ◽  
pp. 3162
Author(s):  
Malar Chellasivalingam ◽  
Hassan Imran ◽  
Milind Pandit ◽  
Adam M. Boies ◽  
Ashwin A. Seshia
Keyword(s):  
Amplitude Ratio ◽  
Diesel Soot ◽  
Health Concern ◽  
Fine Particulates ◽  
Micro Electro Mechanical Systems ◽  
Soot Particles ◽  
Condensation Particle Counter ◽  
Mems Resonators ◽  
Weakly Coupled ◽  
Piezoelectric Mems

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument.

scholarly journals Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 862 ◽  
Author(s):  
Fabrizio Cerini ◽  
Silvia Adorno
Keyword(s):  
Signal To Noise Ratio ◽  
Element Model ◽  
Simulation Platform ◽  
Signal To Noise ◽  
Micro Electro Mechanical Systems ◽  
Lumped Element ◽  
Mems Microphones ◽  
Piezoelectric Mems ◽  
Noise Ratio ◽  
Lumped Element Model

A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.

scholarly journals Design of Signal Generators Using Active Elements Developed in I3T25 CMOS Technology Single IC Package for Illuminance to Frequency Conversion

Sensors ◽  
2020 ◽  
Vol 20 (4) ◽  
pp. 1198
Author(s):  
Roman Sotner ◽  
Jan Jerabek ◽  
Ladislav Polak ◽  
Vilem Kledrowetz ◽  
Roman Prokop
Keyword(s):  
Integrated Circuit ◽  
Frequency Conversion ◽  
Supply Voltage ◽  
Schmitt Trigger ◽  
Cmos Technology ◽  
Bias Current ◽  
Oxide Semiconductor ◽  
Cmos Process ◽  
Driving Voltage ◽  
Ic Package

This paper presents a compact and simple design of adjustable triangular and square wave functional generators employing fundamental cells fabricated on a single integrated circuit (IC) package. Two solutions have electronically tunable repeating frequency. The linear adjustability of repeating frequency was verified in the range between 17 and 264 kHz. The main benefits of the proposed generator are the follows: A simple adjustment of the repeating frequency by DC bias current, Schmitt trigger (threshold voltages) setting by DC driving voltage, and output levels in hundreds of mV when the complementary metal-oxide semiconductor (CMOS) process with limited supply voltage levels is used. These generators are suitable to provide a simple conversion of illuminance to frequency of oscillation that can be employed for illuminance measurement and sensing in the agriculture applications. Experimental measurements proved that the proposed concept is usable for sensing of illuminance in the range from 1 up to 500 lx. The change of illuminance within this range causes driving of bias current between 21 and 52 μA that adjusts repeating frequency between 70 and 154 kHz with an error up to 10% between the expected and real cases.

RF-MEMS Components for Wireless Transceivers

2012 ◽  
pp. 156-188
Author(s):  
Masoud Baghelani ◽  
Habib Badri Ghavifekr ◽  
Afshin Ebrahimi
Keyword(s):  
Rf Mems ◽  
Mechanical Systems ◽  
Low Power Consumption ◽  
Cmos Process ◽  
Low Loss ◽  
Wireless Transceivers ◽  
Micro Electro Mechanical Systems ◽  
Rf Transceivers ◽  
Power Handling ◽  
On Chip

The application of Micro-Electro-Mechanical-Systems (MEMS) in the fields of radio frequency and microwave is offensively spreading. Nowadays a large amount of scientists and research centers worldwide are involved with development, design, and fabrication of MEMS components for RF applications. RF-MEMS show numerous capabilities for improving the performance of RF transceivers. Their excellent features such as extremely low power consumption, low loss, simple and cheap fabrication process, the ability to work at UHF and SHF frequencies, and compatibility with standard CMOS process make them ideal devices replacing the bulky off-chip components and enhancing the performance of on-chip circuits of transceivers. Therefore they can realize the idea of a transceiver on a chip. The aim of this chapter is to provide a reader with deep information in the field of RF-MEMS, covering their current and possible applications, design, modeling, and simulation. Also their problems such as power handling, packaging, frequency extension, et cetera, are discussed. In addition, this chapter will introduce case studies in RF-MEMS area for researchers.

A Prototype Design of Scanning Mirror Used in MEMS and Its Experimental Verification

2020 ◽  
Vol 13 (6) ◽  
pp. 885-893
Author(s):  
Xianquan Luo ◽  
Junwei Lv
Keyword(s):  
Optimization Design ◽  
Design Method ◽  
Angle Measurement ◽  
Driving Voltage ◽  
Damping Force ◽  
Scanning Mirror ◽  
Analysis Design ◽  
Scanning Range ◽  
Design And Testing ◽  
Prototype Design

Background: The MEMS scanning mirror prototype is a spatial scanning device, which has advantages such as light mass, low drive voltage, large scanning and high angular measurement accuracy. Methods: The MEMS scanning mirror prototype uses the piezoelectric driving principle to drive the micro-structure to realize two-axis scanning. The corner of the MEMS scanning mirror is measured by using a piezoelectric resistance sensor. In the paper, the damping properties of MEMS scanning mirrors have been studied, which deduce the damping force formula of MEMS scanning mirrors. Moreover, the influence of different sizes and structures of MEMS scanning mirrors on the damping force and the amplitude of scanning mirror angles are analyzed, and a structural optimization design method to reduce the driving voltage of MEMS scanning mirrors is proposed. Results: The theoretical analysis, design and testing of piezoelectric driven MEMS scanning microscopes have been carried out. Conclusion: Through related experiments, it is verified that the maximum scanning range and the precision index of angle measurement meet the requirements of the index.

scholarly journals A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

Micromachines ◽  
2019 ◽  
Vol 10 (12) ◽  
pp. 813 ◽  
Author(s):  
Qiang Xu ◽  
Zhanqiang Hou ◽  
Yunbin Kuang ◽  
Tongqiao Miao ◽  
Fenlan Ou ◽  
...  
Keyword(s):  
Tuning Fork ◽  
Automatic Gain Control ◽  
Signal To Noise Ratio ◽  
Gain Control ◽  
Driving Voltage ◽  
Micro Electro Mechanical Systems ◽  
Loop Control ◽  
Detection Technology ◽  
Scale Range ◽  
Bias Instability

In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the vibration beam is critical for performance improvement. As the spindle azimuth increases, the proposed vibration structure generates more driving amplitude and reduces the initial capacitance gap, so as to improve the signal-to-noise ratio (SNR) of the gyroscope. However, after taking the driving amplitude and the driving voltage into consideration comprehensively, the optimized spindle azimuth of the vibration beam is designed in an appropriate range. Then, both wet etching and dry etching processes are applied to its manufacture. After that, the fabricated gyroscope is packaged in a vacuum ceramic tube after bonding. Combining automatic gain control and weak capacitance detection technology, the closed-loop control circuit of the drive mode is implemented, and high precision output circuit is achieved for the gyroscope. Finally, the proposed Micro Electro Mechanical Systems (MEMS) gyroscope system demonstrates a bias instability of 0.589°/h, an angular random walk (ARW) of 0.038°/√h, and a bandwidth of greater than 100 Hz in a full scale range of ± 200°/s at room temperature.

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