Elucidation of an Isopropyl Alcohol (IPA) Adsorption Phenomenon on a Wafer Surface for Achieving an Ultra-Clean and IPA-Saving Drying Process in the Batch Cleaning System

2012 ◽  
Vol 187 ◽  
pp. 79-82
Author(s):  
Yoshiya Hagimoto ◽  
Tomoki Tetsuka ◽  
Hayato Iwamoto ◽  
Hironobu Hyakutake ◽  
Hiroshi Tanaka
Keyword(s):  
High Performance ◽  
Great Influence ◽  
Wafer Surface ◽  
Drying Process ◽  
Supply Rate ◽  
Adsorption Phenomenon ◽  
Cleaning System ◽  
Drying Technology ◽  
Drying Conditions ◽  
And Control

Displacing the water remaining on a wafer surface by using condensed IPA improves the effectiveness of IPA-based drying techniques. Although this drying technology has been used for years, recent device technologies have needed extremely high-performance drying processes. We characterized an IPA adsorption phenomenon on a wafer surface by using the batch cleaning system and determined the appropriate drying conditions. Our results revealed that the IPA supply rate had a great influence on watermark formation. This can be prevented by increasing the IPA supply rate because the rapid increase of IPA concentration in the remaining water on wafer surface suppresses the dissolution of silicon into water. Through both understanding of an IPA adsorption on a wafer surface and control of the drying condition, an ultra-clean and IPA-saving drying process with a watermark-free performance for future device technologies can be achieved.

Influence of Ammonia Gas Ambient in IPA Drying Process of the Single Wafer Cleaning System

2012 ◽  
Vol 195 ◽  
pp. 231-234 ◽  
Author(s):  
Yoshiya Hagimoto ◽  
Hayato Iwamoto ◽  
Yosuke Kawabuchi ◽  
Teruomi Minami
Keyword(s):  
High Performance ◽  
Isopropyl Alcohol ◽  
Defect Formation ◽  
Wafer Surface ◽  
Drying Process ◽  
Ammonia Gas ◽  
Wafer Cleaning ◽  
Cleaning System ◽  
Drying Techniques ◽  
Silicon Wafer Cleaning

High-performance drying techniques using IPA (isopropyl alcohol) are widely used in the silicon wafer cleaning process. IPA-based drying techniques help prevent the formation of watermarks because they effectively displace any water remaining on a wafer surface. They are thus frequently used in the single wafer cleaning system for advanced devices in which ultra-clean process performance is required. However, as devices are becoming physically smaller, the formation of extremely small defects during cleaning has become a serious problem. It is therefore important to elucidate the mechanism of the defect formation and to take measures to prevent it for future device technologies in which small-size defects can be killer defects during production. In this paper, we performed experiments focused on the process chamber atmosphere in IPA drying of the single wafer cleaning system and describe the mechanism of the defect formation.

scholarly journals Reduction of Polycyclic Aromatic Hydrocarbons (PAHs) in Sesame Oil Using Cellulosic Aerogel

Foods ◽  
2021 ◽  
Vol 10 (3) ◽  
pp. 644
Author(s):  
Do-Yeong Kim ◽  
Boram Kim ◽  
Han-Seung Shin
Keyword(s):  
Polycyclic Aromatic Hydrocarbons ◽  
Aromatic Hydrocarbons ◽  
High Performance ◽  
Oil Quality ◽  
Acid Value ◽  
Quality Parameters ◽  
Sesame Oil ◽  
Miscanthus Sinensis ◽  
Polycyclic Aromatic ◽  
And Control

The effect of cellulosic aerogel treatments used for adsorption of four polycyclic aromatic hydrocarbons (PAHs)—benzo[a]anthracene, chrysene, benzo[b]fluoranthene, and benzo[a]pyrene [BaP])—generated during the manufacture of sesame oil was evaluated. In this study, eulalia (Miscanthus sinensis var. purpurascens)-based cellulosic aerogel (adsorbent) was prepared and used high performance liquid chromatography with fluorescence detection for determination of PAHs in sesame oil. In addition, changes in the sesame oil quality parameters (acid value, peroxide value, color, and fatty acid composition) following cellulosic aerogel treatment were also evaluated. The four PAHs and their total levels decreased in sesame oil samples roasted under different conditions (p < 0.05) following treatment with cellulosic aerogel. In particular, highly carcinogenic BaP was not detected after treatment with cellulosic aerogel. Moreover, there were no noticeable quality changes in the quality parameters between treated and control samples. It was concluded that eulalia-based cellulosic aerogel proved suitable for the reduction of PAHs from sesame oil and can be used as an eco-friendly adsorbent.

Advanced high-performance processing tools for diagnostics and control in fusion devices

2021 ◽  
Vol 170 ◽  
pp. 112529
Author(s):  
N. Cruz ◽  
A.J.N. Batista ◽  
J.M. Cardoso ◽  
B.B. Carvalho ◽  
P.F. Carvalho ◽  
...  
Keyword(s):  
High Performance ◽  
Diagnostics And Control ◽  
And Control

scholarly journals Detection of Antimicrobial Residues in Poultry Litter: Monitoring a Risk through a Selective and Sensitive HPLC–MS/MS Method

Animals ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 1399
Author(s):  
Karina Yévenes ◽  
Ekaterina Pokrant ◽  
Lina Trincado ◽  
Lisette Lapierre ◽  
Nicolás Galarce ◽  
...  
Keyword(s):  
High Performance ◽  
Limit Of Detection ◽  
Poultry Litter ◽  
Chromatography Tandem Mass Spectrometry ◽  
Antimicrobial Residues ◽  
Field Samples ◽  
Liquid Chromatography Tandem Mass ◽  
Commercial Poultry ◽  
Agriculture Fertilizer ◽  
And Control

Tetracyclines, sulphonamides, and quinolones are families of antimicrobials (AMs) widely used in the poultry industry and can excrete up to 90% of AMs administrated, which accumulate in poultry litter. Worryingly, poultry litter is widely used as an agriculture fertilizer, contributing to the spread AMs residues in the environment. The aim of this research was to develop a method that could simultaneously identify and quantify three AMs families in poultry litter by high-performance liquid chromatography–tandem mass spectrometry (HPLC–MS/MS). Samples of AMs free poultry litter were used to validate the method according to 657/2002/EC and VICH GL49. Results indicate that limit of detection (LOD) ranged from 8.95 to 20.86 μg kg−1, while limits of quantitation (LOQ) values were between 26.85 and 62.58 µg kg−1 of tetracycline, 4-epi-tetracycline, oxytetracycline, 4-epi-oxytetracycline, enrofloxacin, ciprofloxacin, flumequine, sulfachloropyridazine, and sulfadiazine. Recoveries obtained ranged from 93 to 108%. The analysis of field samples obtained from seven commercial poultry flocks confirmed the adequacy of the method since it detected means concentrations ranging from 20 to 10,364 μg kg−1. This provides us an accurate and reliable tool to monitor AMs residues in poultry litter and control its use as agricultural fertilizer.

scholarly journals A Novel Fast-Locking ADPLL Based on Bisection Method

Electronics ◽  
2021 ◽  
Vol 10 (12) ◽  
pp. 1382
Author(s):  
Xiaoying Deng ◽  
Huazhang Li ◽  
Mingcheng Zhu
Keyword(s):  
High Performance ◽  
Tuning Range ◽  
Frequency Control ◽  
Control Word ◽  
Cmos Process ◽  
Bisection Method ◽  
Reference Frequency ◽  
Wide Tuning Range ◽  
Cascade Structure ◽  
And Control

Based on the idea of bisection method, a new structure of All-Digital Phased-Locked Loop (ADPLL) with fast-locking is proposed. The structure and locking method are different from the traditional ADPLLs. The Control Circuit consists of frequency compare module, mode-adjust module and control module, which is responsible for adjusting the frequency control word of digital-controlled-oscillator (DCO) by Bisection method according to the result of the frequency compare between reference clock and restructure clock. With a high frequency cascade structure, the DCO achieves wide tuning range and high resolution. The proposed ADPLL was designed in SMIC 180 nm CMOS process. The measured results show a lock range of 640-to-1920 MHz with a 40 MHz reference frequency. The ADPLL core occupies 0.04 mm2, and the power consumption is 29.48 mW, with a 1.8 V supply. The longest locking time is 23 reference cycles, 575 ns, at 1.92 GHz. When the ADPLL operates at 1.28 GHz–1.6 GHz, the locking time is the shortest, only 9 reference cycles, 225 ns. Compared with the recent high-performance ADPLLs, our design shows advantages of small area, short locking time, and wide tuning range.

scholarly journals Simultaneously controlling heat conduction and infrared absorption with a textured dielectric film to enhance the performance of thermopiles

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Yunqian He ◽  
Yuelin Wang ◽  
Tie Li
Keyword(s):  
Heat Conduction ◽  
Infrared Absorption ◽  
High Performance ◽  
Performance Enhancement ◽  
Dielectric Film ◽  
Great Influence ◽  
Thermal Conductance ◽  
Molding Process ◽  
Absorption Properties

AbstractThe heat conduction and infrared absorption properties of the dielectric film have a great influence on the thermopile performance. Thinning the dielectric film, reducing its contact area with the silicon substrate, or adding high-absorptivity nanomaterials has been proven to be effective in improving thermopiles. However, these methods may result in a decrease in the structural mechanical strength and increases in the fabrication complexity and cost. In this work, a new performance-enhancement strategy for thermopiles by simultaneously controlling the heat conduction and infrared absorption with a TExtured DIelectric (TEDI) film is developed and presented. The TEDI film is formed in situ by a simple hard-molding process that is compatible with the fabrication of traditional thermopiles. Compared to the control FLat DIelectric (FLDI) film, the intrinsic thermal conductance of the TEDI film can be reduced by ~18–30%, while the infrared absorption can be increased by ~7–13%. Correspondingly, the responsivity and detectivity of the fabricated TEDI film-based thermopile can be significantly enhanced by ~38–64%. An optimized TEDI film-based thermopile has achieved a responsivity of 156.89 V·W−1 and a detectivity of 2.16 × 108 cm·Hz1/2·W−1, while the response time constant can remain <12 ms. These results exhibit the great potential of using this strategy to develop high-performance thermopiles and enhance other sensors with heat transfer and/or infrared absorption mechanisms.

scholarly journals Cherry Tomato Drying: Sun versus Convective Oven

Horticulturae ◽  
2021 ◽  
Vol 7 (3) ◽  
pp. 40
Author(s):  
Vincenzo Alfeo ◽  
Diego Planeta ◽  
Salvatore Velotto ◽  
Rosa Palmeri ◽  
Aldo Todaro
Keyword(s):  
Moisture Content ◽  
Initial Moisture Content ◽  
Drying Process ◽  
Drying Time ◽  
Oven Drying ◽  
Sun Drying ◽  
Different Temperatures ◽  
Final Water Content ◽  
Drying Curves ◽  
Drying Conditions

Solar drying and convective oven drying of cherry tomatoes (Solanum lycopersicum) were compared. The changes in the chemical parameters of tomatoes and principal drying parameters were recorded during the drying process. Drying curves were fitted to several mathematical models, and the effects of air temperature during drying were evaluated by multiple regression analyses, comparing to previously reported models. Models for drying conditions indicated a final water content of 30% (semidry products) and 15% (dry products) was achieved, comparing sun-drying and convective oven drying at three different temperatures. After 26–28 h of sun drying, the tomato tissue had reached a moisture content of 15%. However, less drying time, about 10–11 h, was needed when starting with an initial moisture content of 92%. The tomato tissue had high ORAC and polyphenol content values after convective oven drying at 60 °C. The dried tomato samples had a satisfactory taste, color and antioxidant values.

scholarly journals A High-Performance Imaging and Control System for a Micromirror-Based Laser-Scanning Endoscope Device

2006 ◽  
Vol 55 (5) ◽  
pp. 1725-1733 ◽  
Author(s):  
P.G. Papageorgas ◽  
D. Maroulis ◽  
G. Anagnostopoulos ◽  
H. Albrecht ◽  
B. Wagner ◽  
...  
Keyword(s):  
Control System ◽  
High Performance ◽  
Laser Scanning ◽  
And Control

Compensation of the Nonlinear Effect on Anelectro Hydrostatic Cylinder Driver for the Transit and Rotating Motion Using Bilinear System

2014 ◽  
Vol 875-877 ◽  
pp. 2097-2106
Author(s):  
Rai Wung Park
Keyword(s):  
High Performance ◽  
Nonlinear Behavior ◽  
Bilinear System ◽  
Mathematic Model ◽  
Modeling And Control ◽  
Extended Application ◽  
Physical Information ◽  
Complete Form ◽  
And Control ◽  
Operating Points

The transit motion and the rotating motion have highly different effects in a technical systems and have almost nonlinear system behaviors. For the descriptions of their dynamical causes and effects on system, the physical information, which is concerned as a nonlinear mathematic model, has been used. But the corresponding equations are generally not easy to solve in complete form or their solutions are so complicated to see through the coherence. A common way to settle such a problem is to linearize system exactly in a state space or on a operating points with Taylor's series approximately. An advanced method to an approximation is a bilinear system that offers global separations principle. In this paper, an extended application of this theory is given in a modeling and control on the electro hydrostatic cylinder driver with both the transit and rotating motions for the keel system that mostly have not only advantage of high performance, small volume of building and weight but also high nonlinear behavior.

Numerical Simulation of Flow in Imported Steam Turbine Inlet Components with Equilibrated Holes in High Performance

2013 ◽  
Vol 712-715 ◽  
pp. 1263-1267
Author(s):  
Shan Tu ◽  
Shu Ming Wu ◽  
Qi Zhou ◽  
Hong Mei Zhang ◽  
Xiao Qing Zhu
Keyword(s):  
Flow Field ◽  
Steam Turbine ◽  
High Performance ◽  
Optimization Design ◽  
Great Influence ◽  
Control Valve ◽  
Stable Operation ◽  
Valve Seat ◽  
Valve Disc ◽  
Interior Flow

The main inlet component of steam turbine is control valve. The stable operation of the steam turbine control valve is vital for safe and stable operation of the steam turbine and safety production of the power plant. However, due to the complexity of the structure and unsteady characteristics of steam flow in the valve, there is not enough experimental method about the detailed flow characteristics of the area near control valve disc and the inside of the valve chamber up to now. This article is to focus on the simulation of the steam turbine control valve interior flow field which includes the valve pre-inlet channel in different conditions, then find the reasons which caused instability and pressure loss of the control valve by analyzing the flow field details, finally further optimization design. The profile matching of the valve disc and valve seat has a great influence on the interior flow field of control valve, so analysis of the high performance valve disc shape and divergence angle of valve seat is carried out, and the research conclusion is used for guide design and development of the control valve.

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