Multi-Component Coatings Formation on Polycathode Magnetron Sputtering Systems
The results of experiments aimed at obtaining multi-component coatings, having a wider range of properties compared to single-component coatings, are provided. The process of formation of coating based on multi-component alloy Co (18...20%)-Cr (5...7%)-Al (0.3...0.4%)-Y(0.2...0.5) was studied. The chemical composition and thickness of the coating as well as the state of the transition layer were also studied. The results of electron probing and X-ray fluorescence microanalysis of obtained coatings are provided. This paper also demonstrates that the properties of surface microrelief are determined by the conditions of coating formation; that each sample of coating has similar sets of chemical elements, that their concentration depends on the precipitation conditions, chemical elements are equally distributed along the thickness of samples, and the diffusion zone of coating materials and substrate is almost non-existent. The low content of substrate material was found in obtained coatings. As the coating thickness increased, the content of substrate material decreased sharply.