MEMS Fabrication on LTCC Substrates for RF Applications: Challenges and Perspectives
Abstract Microelectromechanical Systems (MEMS) are often used in transceiver modules, especially for telecommunication and radar applications. In this paper, we present recent progress in the development on a MEMS-on-LTCC process. We focus on the Low Temperature Co-fired Ceramic (LTCC) substrate issues and we present a successful solution for overcoming the substrate challenges through surface pre-treatment using a chemical mechanical surface polishing (CMP) process which allows us to reach the required smoothness for the fabrication of MEMS devices. We discuss various process parameters such as slurry type, rotating pad and rotation speed, and show their impact on the final surface finish. With an optimized process, the maximum roughness was decreased from more than 10μm to less than 0.5 μm over a 640 × 640 μm2 LTCC sample. Also, we present the various MEMS process steps starting with the deposition and patterning of various layers to a prototype switch highlighting the validated steps and the challenges encountered. A brief discussion of the perspectives for the integration of MEMS and LTCC technologies is also presented.