How to secure the fabrication of Gallium Nitride on Si wafers

2019 ◽  
Vol 2019 (1) ◽  
pp. 000444-000449
Author(s):  
D. Alliata ◽  
N. Anderson ◽  
M. Durand de Gevigney ◽  
I. Bergoend ◽  
P. Gastaldo
Keyword(s):  
Gallium Nitride ◽  
Phase Shift ◽  
Process Control ◽  
Silicon Substrate ◽  
High Volume ◽  
Fabrication Process ◽  
Control Solution ◽  
Total Control ◽  
Before And After ◽  
Infrared Interferometry

Abstract Process control solutions to secure the High-Volume Manufacturing of Gallium Nitride (GaN) devices for power applications are a must today. Unity recently developed and introduced on the market a total control solution that address both defectivity and metrology needs of GaN industry. Proprietary technologies like Phase Shift Deflectometry, darkfield inspection, confocal chromatic imaging and infrared interferometry are here explored to detect killer defects potentially affecting the gallium nitride wafer. More in detail, we characterized Gallium nitride on Silicon substrate before and after the fabrication of the final device and demonstrated how the fabrication process can be optimized.

In-line advanced process control solution for the fabrication of micro-bumps

2017 ◽  
Vol 2017 (1) ◽  
pp. 000087-000092
Author(s):  
Dario Alliata ◽  
Stephane Godny ◽  
Cleonisse Serrecchia ◽  
Tristan Combier ◽  
Astrid Sippel ◽  
...  
Keyword(s):  
Process Control ◽  
Fabrication Process ◽  
Wafer Surface ◽  
Control Solution ◽  
Advanced Process Control ◽  
Line Scan ◽  
Advanced Packaging ◽  
3D Information ◽  
Light Beams ◽  
2D And 3D

Abstract In this paper, Confocal Chromatic Microscopy was investigated to characterize the micro-bump fabrication process. We designed and fabricated in house a new detector that integrates through the same optical chromatic lens two light beams that are reflected into a 2D line scan camera and a spectrometer to obtain on the fly 2D and 3D information while scanning the wafer surface. We inspected 300 mm round wafers hosting arrays of copper micro-bumps down to 10 μm in width and 5 μm in height at post Cu growing and etching step. The 2D inspection revealed the presence of partial μbumps, shifted and missing μbumps. The 3D inspection could recognize shorter and taller bumps and determine the coplanarity of each bump population at die level. This information could be used to classify GOOD and BAD dies over the wafer, so that after dicing only known good dies would be used in the following advanced packaging step. In this way, the risk of shorts and / or missing contact is minimized when stacking dies either on a wafer or on a die.

Smart in-line defectivity/metrology process control solution for advanced 3D integration

2016 ◽  
Vol 2016 (1) ◽  
pp. 000032-000037 ◽  
Author(s):  
Amina Sidhoum ◽  
Nicolas Devanciard ◽  
Franck Bana ◽  
Arnaud Garnier ◽  
Nicolas Bresson ◽  
...  
Keyword(s):  
Process Control ◽  
Visual Inspection ◽  
Fabrication Process ◽  
Inspection Time ◽  
3D Integration ◽  
Control Solution ◽  
Automatic Visual Inspection ◽  
Morphology Characterization ◽  
Manufacturing Environments ◽  
First Time

Abstract When combined with in-line local metrology, Automatic Visual Inspection/Classification is a powerful tool to characterize 3D interconnect processes, either at the R&D level or in volume manufacturing environments. A new methodology that uses visual inspection results to drive local smart metrology was used for the first time to control the fabrication process of micro-pillar/micro-bump vertical contacts. Quantification of the inspection time when the smart logic concept was used revealed a throughput increase of 23% on average, while consistency of the automatic morphological accuracy was preserved as confirmed by in-line mechanical profilometry. The morphology characterization is discussed with respect to the electrical performances at die level.

scholarly journals Visual Analysis of Biomarkers Reveals Differences in Lipid Profiles and Liver Enzymes before and after Gastric Sleeve and Bypass

Obesity Facts ◽  
2021 ◽  
pp. 1-11
Author(s):  
Marijn Marthe Georgine van Berckel ◽  
Saskia L.M. van Loon ◽  
Arjen-Kars Boer ◽  
Volkher Scharnhorst ◽  
Simon W. Nienhuijs
Keyword(s):  
Bariatric Surgery ◽  
Visual Analytics ◽  
Biochemical Markers ◽  
Visual Analysis ◽  
Large Population ◽  
High Volume ◽  
Cholesterol Concentration ◽  
Health State ◽  
Data Set ◽  
Before And After

<b><i>Introduction:</i></b> Bariatric surgery results in both intentional and unintentional metabolic changes. In a high-volume bariatric center, extensive laboratory panels are used to monitor these changes pre- and postoperatively. Consecutive measurements of relevant biochemical markers allow exploration of the health state of bariatric patients and comparison of different patient groups. <b><i>Objective:</i></b> The objective of this study is to compare biomarker distributions over time between 2 common bariatric procedures, i.e., sleeve gastrectomy (SG) and gastric bypass (RYGB), using visual analytics. <b><i>Methods:</i></b> Both pre- and postsurgical (6, 12, and 24 months) data of all patients who underwent primary bariatric surgery were collected retrospectively. The distribution and evolution of different biochemical markers were compared before and after surgery using asymmetric beanplots in order to evaluate the effect of primary SG and RYGB. A beanplot is an alternative to the boxplot that allows an easy and thorough visual comparison of univariate data. <b><i>Results:</i></b> In total, 1,237 patients (659 SG and 578 RYGB) were included. The sleeve and bypass groups were comparable in terms of age and the prevalence of comorbidities. The mean presurgical BMI and the percentage of males were higher in the sleeve group. The effect of surgery on lowering of glycated hemoglobin was similar for both surgery types. After RYGB surgery, the decrease in the cholesterol concentration was larger than after SG. The enzymatic activity of aspartate aminotransferase, alanine aminotransferase, and alkaline phosphate in sleeve patients was higher presurgically but lower postsurgically compared to bypass values. <b><i>Conclusions:</i></b> Beanplots allow intuitive visualization of population distributions. Analysis of this large population-based data set using beanplots suggests comparable efficacies of both types of surgery in reducing diabetes. RYGB surgery reduced dyslipidemia more effectively than SG. The trend toward a larger decrease in liver enzyme activities following SG is a subject for further investigation.

Quality of training in cervical cancer radical surgery: a survey from the European Network of Young Gynaecologic Oncologists (ENYGO)

2022 ◽  
pp. ijgc-2021-002812
Author(s):  
Nicolò Bizzarri ◽  
Andrei Pletnev ◽  
Zoia Razumova ◽  
Kamil Zalewski ◽  
Charalampos Theofanakis ◽  
...  
Keyword(s):  
Cervical Cancer ◽  
Minimally Invasive ◽  
Radical Surgery ◽  
Gynecologic Oncology ◽  
Laparoscopic Approach ◽  
High Volume ◽  
Lymph Node Biopsy ◽  
European Network ◽  
Before And After ◽  
Level Of Training

BackgroundThe European Society of Gynaecological Oncology (ESGO) and partners are committed to improving the training for gynecologic oncology fellows. The aim of this survey was to assess the type and level of training in cervical cancer surgery and to investigate whether the Laparoscopic Approach to Cervical Cancer (LACC) trial results impacted training in radical surgery for gynecologic oncology fellows.MethodsIn June 2020, a 47-question electronic survey was shared with European Network of Young Gynaecologic Oncologists (ENYGO) members. Specialist fellows in obstetrics and gynecology, and gynecologic oncology, from high- and low-volume centers, who started training between January 1, 2017 and January 1, 2020 or started before January 1, 2017 but finished their training at least 6 months after the LACC trial publication (October 2018), were included.Results81 of 125 (64.8%) respondents were included. The median time from the start of the fellowship to completion of the survey was 28 months (range 6–48). 56 (69.1%) respondents were still fellows-in-training. 6 of 56 (10.7%) and 14 of 25 (56.0%) respondents who were still in training and completed the fellowship, respectively, performed ≥10 radical hysterectomies during their training. Fellows trained in an ESGO accredited center had a higher chance to perform sentinel lymph node biopsy (60.4% vs 30.3%; p=0.027). There was no difference in the mean number of radical hysterectomies performed by fellows during fellowship before and after the LACC trial publication (8±12.0 vs 7±8.4, respectively; p=0.46). A significant reduction in number of minimally invasive radical hysterectomies was noted when comparing the period before and after the LACC trial (38.5% vs 13.8%, respectively; p<0.001).ConclusionExposure to radical surgery for cervical cancer among gynecologic oncology fellows is low. Centralization of cervical cancer cases to high-volume centers may provide an increase in fellows’ exposure to radical procedures. The LACC trial publication was associated with a decrease in minimally invasive radical hysterectomies performed by fellows.

High-volume manufacturing device overlay process control

2017 ◽  
Author(s):  
Honggoo Lee ◽  
Sangjun Han ◽  
Jaeson Woo ◽  
DongYoung Lee ◽  
ChangRock Song ◽  
...  
Keyword(s):  
Process Control ◽  
High Volume

Circadian rhythms and patterns of performance before and after simulated jet lag

1989 ◽  
Vol 257 (4) ◽  
pp. R796-R803 ◽  
Author(s):  
W. N. Tapp ◽  
B. H. Natelson
Keyword(s):  
Phase Shift ◽  
Discrimination Performance ◽  
Maximum Amplitude ◽  
Phase Advance ◽  
Light Cycle ◽  
Monkey Model ◽  
Before And After ◽  
Human Experiments ◽  
Temperature Rhythms ◽  
And Performance

We have developed a rhesus monkey model that enables us to investigate physiological rhythms and circadian effects on performance in an integrated framework. Monkeys worked for 8 h/day on a two-component task (a vigilance trial followed by a discrimination trial) for their daily food aliquot. Concurrently, we recorded activity and temperature rhythms around the clock. To test the model, we studied rhythms and performance during entrainment to a 24-h light cycle and after a 6-h phase advance. Results from this animal model displayed many of the essential characteristics seen in similar human experiments. During stable entrainment, temperature rhythms reached their maximum amplitude in late afternoon, with activity rhythms reaching their maximum amplitude several hours earlier. Performance exhibited consistent task-dependent variations over the course of daily sessions. Speed of discrimination performance was fastest at the beginning of the session, and speed of vigilance performance was fastest several hours later. After a 6-h phase advance, monkeys exhibited transient internal desynchrony with activity resynchronizing faster than temperature. Both vigilance and discrimination were impaired after the phase shift, with vigilance exhibiting larger-magnitude and longer-lasting impairments than discrimination. A second drop in performance was seen 10-14 days after the phase shift. These data replicate and extend earlier work in humans and show that this model can be used in the study of chronobiological questions that would be too expensive or too impractical to do with humans.

Curriculum to Introduce Critical Care Nurses to Extracorporeal Membrane Oxygenation

2020 ◽  
Vol 29 (4) ◽  
pp. 262-269
Author(s):  
Whitney D. Gannon ◽  
Lynne Craig ◽  
Lindsey Netzel ◽  
Carmen Mauldin ◽  
Ashley Troutt ◽  
...  
Keyword(s):  
Critical Care ◽  
Extracorporeal Membrane Oxygenation ◽  
Reference Group ◽  
High Volume ◽  
Critical Care Nurses ◽  
Care Nurse ◽  
Membrane Oxygenation ◽  
Written Examination ◽  
Advanced User ◽  
Before And After

Background Despite the growing use of extracorporeal membrane oxygenation (ECMO) in intensive care units (ICUs), no standardized ECMO training pathways are available for ECMO-naive critical care nurses. Objectives To evaluate a critical care nurse ECMO curriculum that may be reproducible across institutions. Methods An ECMO curriculum consisting of a basic safety course and an advanced user course was designed for critical care nurses. Courses incorporated didactic and simulation components, written knowledge examinations, and electronic modules. Differences in examination scores before and after each course for the overall cohort and for participants from each ICU type were analyzed with t tests or nonparametric equality-of-medians tests. Differences in postcourse scores across ICU types were examined with multiple linear regression. Results Critical care nurses new to ECMO (n = 301) from various ICU types participated in the basic safety course; 107 nurses also participated in the advanced user course. Examination scores improved after completion of both courses for overall cohorts (P &lt; .001 in all analyses). Median (interquartile range) individual score improvements were 23.1% (15.4%-38.5%) for the basic safety course and 8.4% (0%-16.7%) for the advanced user course. Postcourse written examination scores stratified by ICU type, compared with the medical ICU/cardiovascular ICU group (reference group), differed only in the neurovascular ICU group for the basic safety course (percent score difference, −3.0; 95% CI, −5.3 to −0.8; P = .01). Conclusions Implementation of an ECMO curriculum for a high volume of critical care nurses is feasible and effective.

Enabling Requirements for High Volume Thermo compression Bonding

2015 ◽  
Vol 2015 (DPC) ◽  
pp. 000995-001015
Author(s):  
Tom Strothmann
Keyword(s):  
Process Control ◽  
Cost Reduction ◽  
State Of The Art ◽  
High Volume ◽  
Manufacturing Technology ◽  
Data Logging ◽  
Key Factors ◽  
Review State ◽  
Memory Applications

The potential of Thermo compression Bonding (TCB) has been widely discussed for several years, but it has not previously achieved widespread production use. TCB has now begun the transition to an accepted high volume manufacturing technology driven primarily by the memory market, but with wider adoption close for non-memory applications. Several key factors have enabled this transition, including advanced TCB equipment with higher UPH for cost reduction and advanced methods of inline process control. The unique requirements of TCB demand absolute process control, simultaneous data logging capability for multiple key factors in the process and portability of the process between tools. This introduces a level of sophistication that has not previously been required for BE assembly processes. This presentation will review state of the art TCB technology and the fundamental equipment requirements to support the transition to HVM.

Automated Metrology Improves Productivity and Yields for Wafer Level Packaging in High Volume Manufacturing

2014 ◽  
Vol 2014 (1) ◽  
pp. 000155-000160
Author(s):  
Jin You Zao ◽  
Bong Yin Yen ◽  
Lim Beng Kuan ◽  
John Thornell ◽  
Darcy Hart ◽  
...  
Keyword(s):  
Process Control ◽  
High Volume ◽  
Critical Dimension ◽  
Thickness Measurement ◽  
Electrical Performance ◽  
Wafer Level ◽  
Chip Scale Package ◽  
Under Sampling ◽  
Line Process ◽  
Increasing Demand

Wafer Bumping In-line Process control of Wafer-Level Chip Scale Package (WLCSP) requires accurate measurement of bump features during processing. These bump features include critical dimension of Redistribution Layer (RDL), Under Bump Metal (UBM) and transparent polyimide thickness. For a 4-Mask Layer Cu plated WLCSP, accurate feature thickness measurement is required for both the Redistribution Layer (RDL) and Under Bump Metal (UBM) to ensure consistent delivery of good electrical performance and package reliability. This is especially important as WLCSP is moving towards finer feature size and pitch to meet increasing demand for smaller form factor. This paper reports the development of an automated Critical Dimension (CD) measurement solution capable of measuring features at pre-defined locations on different topology both under sampling and full inspection mode on wafer. The solution is fully scalable to meet the requirement of high product-mix HVM environment, by highly adaptive to different features on different products for which measurement needs to be automated for effective process control.

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