Highly Flexible Die Attach Adhesives for MEMS packages
Die attach materials for most MEMS packages must be highly flexible as temperature changes during the assembly process and application may lead to thermo-mechanical stress as a consequence of dissimilar coefficients of thermal expansion of substrate, chip and adhesive. Thermo-mechanical stress results in a distortion of the signal characteristics of the extremely stress-sensitive MEMS device. Within the scope of this paper, highly flexible heat-curing adhesives with a Young's modulus down to 5 MPa (0.725 ksi) at room temperature were developed. DMTA measurements show that temperature storage at +120 °C (+248 °F) does not cause the adhesive to embrittle, which would have a negative effect on the MEMS package's reliability. After storage at +120 °C (+248 °F) for up to 1000 h, no increase in Young's modulus can be observed. The adhesives cure at extremely low temperatures down to +100 °C (+212 °F), which reduces stress development during the assembly process. In addition, the adhesives have very process-friendly properties. Processing times of more than one week can be achieved. The option of dual curing enables preliminary light fixation of the chip within just seconds.