A Study of a Data Retention Characteristic for Various Schemes of Gate Oxide Formation in Sub-50-nm Saddle-Fin Transistor DRAM Technology

2010 ◽  
Author(s):  
S. W. Ryu ◽  
S. K. Chun ◽  
T. Jang ◽  
B. Lee ◽  
D. Lee ◽  
...  
2019 ◽  
Vol 153 ◽  
pp. 8-11 ◽  
Author(s):  
Sangmin Lee ◽  
Jeonghwan Song ◽  
Seokjae Lim ◽  
Solomon Amsalu Chekol ◽  
Hyunsang Hwang

2006 ◽  
Vol 527-529 ◽  
pp. 1051-1054 ◽  
Author(s):  
Caroline Blanc ◽  
Dominique Tournier ◽  
Phillippe Godignon ◽  
D.J. Brink ◽  
Véronique Soulière ◽  
...  

We report on 4H-SiC MOSFET devices implemented on p-type <11-20>-oriented epitaxial layers, using a two-step procedure for gate oxide formation. First is a thin, dry, thermal SiO2 layer grown at 1050°C for 1 hour. Next, is a thick (50 nm) layer of complementary oxide deposited by PECVD using TEOS as gas precursor. With respect to the standard thermal oxidation process, this results in much improvement of the field effect mobility. For the best samples, we find a peak value in the range of 330 cm2/Vs while, on the full wafer, an average mobility of about 160 cm2/Vs is found. Up to now, this is one of the best results ever reported for 4H-SiC MOSFETs.


Author(s):  
Sung Ho Lee ◽  
Yong Ho Yoo ◽  
Tae Jung Park ◽  
Jin Choi ◽  
Ju Hyeon Ahn ◽  
...  

Abstract Data retention characteristic is one of the most critical issues in low power DRAMs because it determines idle currents of self-refresh operation. Compared to normal healthy cells, a few ppm orders of cells in a tail distribution have much higher leakage currents. The origin of the leaky cells (so called weak cells or tail cells) has been quite arguable for the past decades [1, 2], but it should be scrutinized in order to achieve long data retention time. In this paper, we have thoroughly investigated the behavior of the retention weak cells using a newly generated combination program and TEM analysis so as to discover and explain their origins


2009 ◽  
Vol 1195 ◽  
Author(s):  
Younggeun Jang ◽  
Kwangwook Lee ◽  
Eunsoo Kim ◽  
Jonghye Cho ◽  
Jungmyoung Shim ◽  
...  

AbstractData retention is one of the major device reliabilities of NAND Flash memory. We found that the lower Refractive Index (RI) of the Passivation Silicon Oxynitride (SiON) layer deposited by PECVD, the better data retention behavior was achieved. The hydrogen content and the stress analysis of the films are analyzed to find out which is more important in this case. Generally, when the RI of SiON decreases, both parameters also decrease, so it is impossible to find out which parameter is major factor of data retention. To analyze the effects of two parameters separately, we applied two conditions which had the same H contents but quite different stress values. The final data retention levels are same in both conditions. In addition, even if the layer has the same H content, the retention characteristic is changed by how hydrogen is bonded in the film. In conclusion, the data retention characteristic can be explained by mobile ions generated by the hydrogen weakly bonded in PECVD SiON films in our experiment.


2017 ◽  
Vol 897 ◽  
pp. 537-540
Author(s):  
Victor Soler ◽  
Maria Cabello ◽  
Maxime Berthou ◽  
Josep Montserrat ◽  
José Rebollo ◽  
...  

SiC planar VDMOS of three voltages ratings (1.7kV, 3.3kV and 4.5kV) have been fabricated using a Boron diffusion process into the thermal gate oxide for improving the SiO2/SiC interface quality. Experimental results show a remarkable increase of the effective channel mobility which increases the device current capability, especially at room temperatures. At high temperatures, the impact of the Boron treatment is lower since the major contribution of the drift layer to the on-resistance. In addition, the intrinsic body diode characteristics approximate to that of an ideal PiN diode, and the blocking capability is not compromised by the use of Boron for the gate oxide formation.


2005 ◽  
Vol 483-485 ◽  
pp. 669-672 ◽  
Author(s):  
Ryouji Kosugi ◽  
Kenji Fukuda ◽  
Kazuo Arai

A high temperature rapid thermal processing (HT-RTP) above 1400oC was investigated for use in the gate oxide formation of 4H-SiC by a cold-wall oxidation furnace. The gate oxide film of ~50nm can be formed for several minutes in the oxidizing atmospheres such as N2O and O2, where the oxidation rates were 8-10nm/min. After the initial oxide formation, the HT-RTPs in various ambient gases were conducted, and the dependences of their MOS interface properties on the gases were evaluated by a capacitance-voltage (CV) measurement. Based on the results, the process sequence of gate oxidation was determined as follows; the initial oxide was formed by the HT-RTO (oxidation) in N2O or in O2 with subsequent post annealing in Ar ambient, and then the HT-RTN (nitridation) in NO was conducted. The total process time becomes 20-50min. The interface trap density (Dit) of fabricated MOS capacitor shows 3-5x1011cm-2eV-1 at Ec-E~0.2eV. The field-effect channel mobility of fabricated 4H-SiC lateral MOSFETs was ~30cm2/Vs.


2011 ◽  
Vol 403-408 ◽  
pp. 4287-4294
Author(s):  
Debasis Mukherjee ◽  
B.V.R. Reddy

Leakage Current is found to be gradually increasing in CMOS VLSI circuits with advance of technologies, specially in nanometer range. Though area of a transistor is becoming less and lesser, but precious control over the operations of a transistor is not possible in such a small structure. Reductions of threshold voltage, channel length, and gate oxide thickness are responsible for generation of leakage current. In this paper we have reviewed eight types of leakage current present in CMOS VLSI circuits, namely 1. Reverse Bias pn Junction Current, 2. Sub-threshold Leakage, 3. Drain Induced Barrier Lowering Effect, 4. Gate Induced Drain Leakage current, 5. Punch Through, 6. Narrow Channel Effects, 7. Gate Oxide Tunneling leakage current and 8. Hot-Carrier Injection. After that, we have reviewed 6-T SRAM read and write operation. Next to that, we have reviewed three techniques of leakage reduction namely 1. Transistor Stacking Effect, 2. Data Retention Gated-Ground Cache and 3. Drowsy Cache. We have reproduced the simulation result of these leakage minimization techniques. Finally we have shown comparison of 1. Conventional 6-T SRAM leakage current, 2. leakage current using Data Retention Gated-Ground Cache techniques and 3. leakage current using Drowsy Cache techniques. To obtain these three results we have used Cadence Virtuso & SoC Encounter tools. All these three results has been simulated with IBM 90 nanometer technology file.


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