Influence of Tilt Angle on Hole Count and Secondary Fluorescence in x-ray Microanalysis
The spatial resolution and accuracy of X-ray microanalysis in an analytical electron microscope (AEM) are limited by a variety of factors, two of which are the hole count and secondary fluorescence. The hole count arises from uncollimated radiation, either electrons or X rays, which excites areas of the specimen other than that excited by the primary electron beam. This can result in X-ray generation even when the probe does not hit the specimen; hence the name hole count. Secondary fluorescence deals with X-ray generation resulting from radiation produced by the interaction of the incident probe with the specimen. This radiation may be either backscattered electrons spiraling in the magnetic field of the objective lens or high energy X rays, particularly forward-peaked bremsstrahlung radiation. As the interaction of both the uncollimated radiation and the secondary radiation with the specimen can be influenced by the tilt angle of the specimen, the variation of the hole count and secondary fluorescence with specimen tilt was investigated.