In-Situ Investigation of Ion Beam-Induced Crossover in Uniaxial Magnetic Anisotropy of Polycrystalline Fe Films

Abstract In this paper an experimental set-up is presented that allows the Scanning Electron Microscope (SEM) in-situ investigation of electromigration phenomena in fully embedded copper interconnect structures, both from a top-down and from a cross-sectional perspective. The condition that the interconnects under test are fully embedded during the in-situ experiment is achieved using a Focussed Ion Beam (FIB) preparation technique. A SEM is equipped with a custom-made heating stage. During the experiment the void formation, growth and agglomeration process can be observed. Post-mortem cross-section analysis after the interconnect failure reveals e.g. a relationship between the microstructure of the copper contact and the non-constant growth rate of the voids.

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Uniaxial magnetic anisotropy in Co/Pd multilayers estimated by an in situ stress measurement and a computer simulation

Journal of Magnetism and Magnetic Materials ◽

10.1016/0304-8853(95)00186-7 ◽

1995 ◽

Vol 148 (1-2) ◽

pp. 150-151 ◽

Cited By ~ 2

Author(s):

A. Tsukamoto ◽

K. Hattori ◽

K. Nakagawa ◽

A. Itoh

Keyword(s):

Computer Simulation ◽

Magnetic Anisotropy ◽

Stress Measurement ◽

In Situ Stress ◽

Uniaxial Magnetic Anisotropy ◽

In Situ Stress Measurement

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Direct Observations of the Epitaxial Growth of Sputtered Ag on Si

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100071053 ◽

1973 ◽

Vol 31 ◽

pp. 122-123

Author(s):

J. S. Maa ◽

Thos. E. Hutchinson

Keyword(s):

Epitaxial Growth ◽

Film Growth ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Microscopy Technique ◽

Direct Observations ◽

In Situ Electron Microscopy ◽

Beam Sputtering ◽

The Subject

The growth of Ag films deposited on various substrate materials such as MoS2, mica, graphite, and MgO has been investigated extensively using the in situ electron microscopy technique. The three stages of film growth, namely, the nucleation, growth of islands followed by liquid-like coalescence have been observed in both the vacuum vapor deposited and ion beam sputtered thin films. The mechanisms of nucleation and growth of silver films formed by ion beam sputtering on the (111) plane of silicon comprise the subject of this paper. A novel mode of epitaxial growth is observed to that seen previously.The experimental arrangement for the present study is the same as previous experiments, and the preparation procedure for obtaining thin silicon substrate is presented in a separate paper.

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Nucleation and Early Growth of Sputtered thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100069570 ◽

1970 ◽

Vol 28 ◽

pp. 516-517

Author(s):

Dudley M. Sherman ◽

Thos. E. Hutchinson

Keyword(s):

Thin Films ◽

Electron Beam ◽

Ion Beam ◽

Ion Source ◽

Water Cooling ◽

Stages Of Growth ◽

Lens Assembly ◽

Microscope Technique ◽

Ion Beam Sputter Deposition

The in situ electron microscope technique has been shown to be a powerful method for investigating the nucleation and growth of thin films formed by vacuum vapor deposition. The nucleation and early stages of growth of metal deposits formed by ion beam sputter-deposition are now being studied by the in situ technique.A duoplasmatron ion source and lens assembly has been attached to one side of the universal chamber of an RCA EMU-4 microscope and a sputtering target inserted into the chamber from the opposite side. The material to be deposited, in disc form, is bonded to the end of an electrically isolated copper rod that has provisions for target water cooling. The ion beam is normal to the microscope electron beam and the target is placed adjacent to the electron beam above the specimen hot stage, as shown in Figure 1.

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In situ investigation of the primary recrystallization of alpha titanium in HVEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100110313 ◽

1978 ◽

Vol 36 (1) ◽

pp. 634-635

Author(s):

S. Naka ◽

R. Penelle ◽

R. Valle

Keyword(s):

Dimensional Analysis ◽

Texture Evolution ◽

Cold Work ◽

Three Dimensional ◽

Primary Recrystallization ◽

Thin Foils ◽

In Situ Investigation ◽

Grain Growth Model ◽

Alpha Titanium

The in situ experimentation technique in HVEM seems to be particularly suitable to clarify the processes involved in recrystallization. The material under investigation was unidirectionally cold-rolled titanium of commercial purity. The problem was approached in two different ways. The three-dimensional analysis of textures was used to describe the texture evolution during the primary recrystallization. Observations of bulk-annealed specimens or thin foils annealed in the microscope were also made in order to provide information concerning the mechanisms involved in the formation of new grains. In contrast to the already published work on titanium, this investigation takes into consideration different values of the cold-work ratio, the temperature and the annealing time.Two different models are commonly used to explain the recrystallization textures i.e. the selective grain growth model (Beck) or the oriented nucleation model (Burgers). The three-dimensional analysis of both the rolling and recrystallization textures was performed to identify the mechanismsl involved in the recrystallization of titanium.

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TEM Study of Co/Pd and Co/Au Multilayers

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100151015 ◽

1993 ◽

Vol 51 ◽

pp. 1036-1037

Author(s):

A.E.M. De Veirman ◽

F.J.G. Hakkens ◽

W.M.J. Coene ◽

F.J.A. den Broeder

Keyword(s):

Magnetic Anisotropy ◽

Ion Beam ◽

Perpendicular Magnetic Anisotropy ◽

Optical Recording ◽

Magnetic Multilayer ◽

Ion Beam Sputtering ◽

Cross Sectional ◽

Transmission Electron ◽

Beam Sputtering ◽

Substrate Temperatures

There is currently great interest in magnetic multilayer (ML) thin films (see e.g.), because they display some interesting magnetic properties. Co/Pd and Co/Au ML systems exhibit perpendicular magnetic anisotropy below certain Co layer thicknesses, which makes them candidates for applications in the field of magneto-optical recording. It has been found that the magnetic anisotropy of a particular system strongly depends on the preparation method (vapour deposition, sputtering, ion beam sputtering) as well as on the substrate, underlayer and deposition temperature. In order to get a better understanding of the correlation between microstructure and properties a thorough cross-sectional transmission electron microscopy (XTEM) study of vapour deposited Co/Pd and Co/Au (111) MLs was undertaken (for more detailed results see ref.).The Co/Pd films (with fixed Pd thickness of 2.2 nm) were deposited on mica substrates at substrate temperatures Ts of 20°C and 200°C, after prior deposition of a 100 nm Pd underlayer at 450°C.

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Electron and ion irradiation-induced dissolution of mechanical twins in the intermetalic U3Si: An in situ HVEM study

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100155232 ◽

1989 ◽

Vol 47 ◽

pp. 652-653

Author(s):

Charles W. Allen ◽

Robert C. Birtcher

Keyword(s):

Elevated Temperatures ◽

Ion Irradiation ◽

Ion Beam ◽

National Laboratory ◽

Argonne National Laboratory ◽

Heavy Ion ◽

High Energy ◽

Mechanical Twinning ◽

In Situ Experiments

The uranium silicides, including U3Si, are under study as candidate low enrichment nuclear fuels. Ion beam simulations of the in-reactor behavior of such materials are performed because a similar damage structure can be produced in hours by energetic heavy ions which requires years in actual reactor tests. This contribution treats one aspect of the microstructural behavior of U3Si under high energy electron irradiation and low dose energetic heavy ion irradiation and is based on in situ experiments, performed at the HVEM-Tandem User Facility at Argonne National Laboratory. This Facility interfaces a 2 MV Tandem ion accelerator and a 0.6 MV ion implanter to a 1.2 MeV AEI high voltage electron microscope, which allows a wide variety of in situ ion beam experiments to be performed with simultaneous irradiation and electron microscopy or diffraction.At elevated temperatures, U3Si exhibits the ordered AuCu3 structure. On cooling below 1058 K, the intermetallic transforms, evidently martensitically, to a body-centered tetragonal structure (alternatively, the structure may be described as face-centered tetragonal, which would be fcc except for a 1 pet tetragonal distortion). Mechanical twinning accompanies the transformation; however, diferences between electron diffraction patterns from twinned and non-twinned martensite plates could not be distinguished.

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