CHARACTERIZATION OF TRIS (8-HYDROXYQUINOLINE) ALUMINUM (Alq3) FILM USING SPECTROSCOPIC ELLIPSOMETRY
We have applied spectroscopic ellipsometry to obtain the optical constants, i.e., refractive indices (n) and extinction coefficients (k) of a thin tris (8-hydroxyquinoline) aluminum ( Alq 3) film evaporated on the top of 300-nm-thick SiO 2 layer on a silicon substrate. Using a spectroscopic ellipsometer we collected the ellipsometric data of Ψ and Δ at 3 incident angles of 65°, 70° and 75° and 226 energies of 1.5 eV to 6.0 eV. For the organic sample, we adopted a simple two-film model consisting of ambient/organic film/ SiO 2 film/silicon substrate. Using the multiple oscillators of Tauc-Lorentz (TL) dispersion function and the two-film model, we obtained the thickness of the Alq 3 film. By data inversion technique, the spectra of n and k for the Alq 3 film are calculated from measured Ψ and Δ at each photon energy when the film thickness is fixed to a value obtained by the TL dispersion fitting. The extrapolation of optical function near band gap yields the band gap of 2.64 eV for Alq 3 film.