Reliability, Properties and Microstructure of W80Ti20 Diffusion Barriers Between Al-Based Metallizations and Si.

1992 ◽  
Vol 260 ◽  
Author(s):  
A. G. Dirks ◽  
R. A. M. Wolters ◽  
A. E. M. De Veirman
Keyword(s):  
Barrier Properties ◽  
Diffusion Barriers ◽  
Columnar Microstructure ◽  
Compound Formation ◽  
Actual Distribution ◽  
Alloy Films ◽  
The Relationship ◽  
Post Deposition ◽  
Deposition Conditions

ABSTRACTTungsten-rich W-Ti (or W-Ti-N) alloy films are known for their applicability as diffusion barriers in advanced silicon technology, especially in the case of aluminium-based metallizations. For a wide variety of deposition conditions and post-deposition anneal treatments these refractory-metal barriers show a columnar microstructure. In contact with aluminium the W-Ti films do not form absolute barriers, because of mutual diffusion resulting in compound formation. The reactivity of the W-Ti barriers with the Al99Si1 interconnect has been studied by in-situ resistance measurements in vacuum at temperatures of approximately 450 °C (for W-Ti alloy films) and 475 °C (for W-Ti-N alloy films). In this paper new results dealing with the relationship between deposition conditions, microstructure and barrier properties will be discussed. Furthermore, it will be shown that the actual distribution of the titanium atoms in the tungsten matrix has a substantial influence on the reactivity of the barrier film with the Al99Si1 interconnect.

scholarly journals The relationship of structure, thermal and water vapor permeability barrier properties of poly(butylene succinate)/organomodified beidellite clay bionanocomposites prepared by in situ polycondensation

RSC Advances ◽  
2020 ◽  
Vol 10 (61) ◽  
pp. 37314-37326
Author(s):  
Mohamed Ilsouk ◽  
Mustapha Raihane ◽  
Benaissa Rhouta ◽  
Remo Merijs Meri ◽  
Janis Zicans ◽  
...  
Keyword(s):  
Water Vapor ◽  
Water Vapor Permeability ◽  
Barrier Properties ◽  
Vapor Permeability ◽  
Permeability Barrier ◽  
Butylene Succinate ◽  
Biodegradable Nanocomposites ◽  
Relationship Of ◽  
The Relationship

The exploitation of beidellite clay (BDT), used as a nanofiller in the preparation of poly(butylene succinate) (PBS)/organoclay biodegradable nanocomposites, was investigated. Their thermal and water vapor barrier properties were also studied.

Coherent TiN Diffusion Barriers for Sub-0.5 μm Planarized AL Technology

1994 ◽  
Vol 337 ◽  
Author(s):  
Ken Ngan ◽  
Rod Mosely ◽  
Zheng Xu ◽  
Ivo Raaijmakers
Keyword(s):  
Thin Film ◽  
Silicon Surface ◽  
Diffusion Barriers ◽  
Flow Process ◽  
Resistance Increase ◽  
Heat Treated ◽  
Treatment Technologies ◽  
Al Thin Film ◽  
Post Deposition

ABSTRACTThis paper describes in situ post deposition treatment technologies to fortify the coherent PVD TiN barrier so that it will withstand the high temperature (> 450°C) Al deposition or flow process for sub-0.5 μm planarized Al technology. The coherent PVD TiN barriers were sputtered under 3 different pressure conditions and subsequently heat treated for fortification. Such heat treated, fortified PVD TiN barriers exhibit low reactivity with Al, which is illustrated by the minimal sheet resistance increase in TiN/Al thin film stacks during the heat treatment. Furthermore, optical and SEM inspection on the silicon surface show no pitting.Leakage current of less than 50 pA has been obtained on 10K-contact chains of sub-0.5 (μm devices using a vacuum integrated coherent Ti/fortified PVD TiN/planarized Al process. This development has led to a completely vacuum integrated sub-0.5 μm PVD Al plug fill process.

Profile Imaging of Silicon Surface Reconstructions

1985 ◽  
Vol 43 ◽  
pp. 262-263
Author(s):  
O.L. Krivanek ◽  
G.J. Wood
Keyword(s):  
Electron Microscopy ◽  
Surface Structure ◽  
Structure Determination ◽  
Silicon Surface ◽  
Good Resolution ◽  
Surface Reconstructions ◽  
Bulk Structure ◽  
Point To Point ◽  
The Relationship

Electron microscopy at 0.2nm point-to-point resolution, 10-10 torr specimei region vacuum and facilities for in-situ specimen cleaning presents intere; ing possibilities for surface structure determination. Three methods for examining the surfaces are available: reflection (REM), transmission (TEM) and profile imaging. Profile imaging is particularly useful because it giv good resolution perpendicular as well as parallel to the surface, and can therefore be used to determine the relationship between the surface and the bulk structure.

A combined ultrastructural and gene molecular research for the relationship between human uterine cervical carcinoma and human papillomavirus

1990 ◽  
Vol 48 (3) ◽  
pp. 204-205
Author(s):  
Kun Lee ◽  
Jingyi Si ◽  
Ricai Han ◽  
Wei Zhang ◽  
Bingbing Tan ◽  
...  
Keyword(s):  
Cervical Cancer ◽  
Human Papillomavirus ◽  
Intraepithelial Neoplasia ◽  
Hpv Infection ◽  
Dot Blot ◽  
Homologous Sequences ◽  
Normal Cervical Epithelium ◽  
The Relationship ◽  
Chronic Cervicitis

There are more supports for the view that human papillomavirus (HPV) infection might be an etiological factor in the development of cervical cancer when the association of persistent condylomata is considered. Biopsies from 318 cases with squamous cell carcinoma of uterine cervix, 48 with cervical and vulvar condylomata, 14 with cervical intraepithelial neoplasia (CIN), 34 with chronic cervicitis and 24 normal cervical epithelium were collected from 5 geographic regions of China with different cervical cancer mortalities. All specimens were prepared for Dot blot, Southern blot and in situ DNA-DNA hybridizations by using HPV-11, 16, 18 DNA labelled with 32P and 3H as probes to detect viral homologous sequences in samples. Among them, 32 cases with cervical cancer, 27 with condyloma and 10 normal cervical epitheliums were randomly chosen for comparative EM observation. The results showed that: 1), 192 out of 318 (60.4%) cases of cervical cancer were positive for HPV-16 DNA probe (Table I)

The reaction of amorphous Ni-Nb films with Si in the presence of a native SiO2 layer

1990 ◽  
Vol 48 (4) ◽  
pp. 664-665
Author(s):  
N. Rozhanski ◽  
A. Barg
Keyword(s):  
High Temperature ◽  
Crystallization Temperature ◽  
Diffusion Barriers ◽  
Sio2 Layer ◽  
Si Substrate ◽  
Cross Sectional ◽  
Plan View ◽  
Temperature Range ◽  
Sputter Deposited

Amorphous Ni-Nb alloys are of potential interest as diffusion barriers for high temperature metallization for VLSI. In the present work amorphous Ni-Nb films were sputter deposited on Si(100) and their interaction with a substrate was studied in the temperature range (200-700)°C. The crystallization of films was observed on the plan-view specimens heated in-situ in Philips-400ST microscope. Cross-sectional objects were prepared to study the structure of interfaces.The crystallization temperature of Ni5 0 Ni5 0 and Ni8 0 Nb2 0 films was found to be equal to 675°C and 525°C correspondingly. The crystallization of Ni5 0 Ni5 0 films is followed by the formation of Ni6Nb7 and Ni3Nb nucleus. Ni8 0Nb2 0 films crystallise with the formation of Ni and Ni3Nb crystals. No interaction of both films with Si substrate was observed on plan-view specimens up to 700°C, that is due to the barrier action of the native SiO2 layer.

scholarly journals Novel hydrogen chemisorption properties of amorphous ceramic compounds consisting of p-block elements: exploring Lewis acid-base Al–N pair site formed in-situ within polymer-derived silicon-aluminum-nitrogen-based system

2021 ◽  
Author(s):  
Shotaro Tada ◽  
Norifumi Asakuma ◽  
Shiori Ando ◽  
Toru Asaka ◽  
Yusuke Daiko ◽  
...  
Keyword(s):  
Lewis Acid ◽  
Active Site ◽  
Hydrogen Chemisorption ◽  
Acid Base ◽  
Polymer Derived Ceramics ◽  
System P ◽  
Ceramic Compounds ◽  
The Relationship

This paper reports on the relationship between the H2 chemisorption properties and reversible structural reorientation of the possible active site around Al formed in-situ within polymer-derived ceramics (PDCs) based on...

scholarly journals Simple empirical method for estimating lava-effusion rate using nighttime Himawari-8 1.6-µm infrared images

2021 ◽  
Vol 73 (1) ◽  
Author(s):  
Takayuki Kaneko ◽  
Atsushi Yasuda ◽  
Toshitsugu Fujii
Keyword(s):  
Lava Flow ◽  
Estimation Method ◽  
Simulation Software ◽  
Spectral Radiance ◽  
Effusion Rate ◽  
Actual Distribution ◽  
High Positive Correlation ◽  
Low Viscosity ◽  
Lava Effusion ◽  
The Relationship

AbstractThe effusion rate of lava is one of the most important eruption parameters, as it is closely related to the migration process of magma underground and on the surface, such as changes in lava flow direction or formation of new effusing vents. Establishment of a continuous and rapid estimation method has been an issue in volcano research as well as disaster prevention planning. For effusive eruptions of low-viscosity lava, we examined the relationship between the nighttime spectral radiance in the 1.6-µm band of the Himawari-8 satellite (R1.6Mx: the pixel value showing the maximum radiance in the heat source area) and the effusion rate using data from the 2017 Nishinoshima activity. Our analysis confirmed that there was a high positive correlation between these two parameters. Based on the linear-regression equation obtained here (Y = 0.47X, where Y is an effusion rate of 106 m3 day−1 and X is an R1.6Mx of 106 W m−2 sr−1 m−1), we can estimate the lava-effusion rate from the observation data of Himawari-8 via a simple calculation. Data from the 2015 Raung activity—an effusive eruption of low-viscosity lava—were arranged along the extension of this regression line, which suggests that the relationship is applicable up to a level of ~ 2 × 106 m3 day−1. We applied this method to the December 2019 Nishinoshima activity and obtained an effusion rate of 0.50 × 106 m3 day−1 for the initial stage. We also calculated the effusion rate for the same period based on a topographic method, and verified that the obtained value, 0.48 × 106 m3 day−1, agreed with the estimation using the Himawari-8 data. Further, for Nishinoshima, we simulated the extent of hazard areas from the initial lava flow and compared cases using the effusion rate obtained here and the value corresponding to the average effusion rate for the 2013–2015 eruptions. The former distribution was close to the actual distribution, while the latter was much smaller. By combining this effusion-rate estimation method with real-time observations by Himawari-8 and lava-flow simulation software, we can build a rapid and precise prediction system for volcano hazard areas.

scholarly journals Comparison of the Concentration of Risk Elements in Alluvial Soils Determined by pXRF In Situ, in the Laboratory, and by ICP-OES

Agronomy ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 938
Author(s):  
Ladislav Menšík ◽  
Lukáš Hlisnikovský ◽  
Pavel Nerušil ◽  
Eva Kunzová
Keyword(s):  
Precision Agriculture ◽  
Alluvial Soil ◽  
Coefficient Of Determination ◽  
Fast Method ◽  
Agricultural Practice ◽  
Regression Equations ◽  
Icp Oes ◽  
Risk Elements ◽  
The Relationship

The aim of the study was to compare the concentrations of risk elements (As, Cu, Mn, Ni, Pb, Zn) in alluvial soil, which were measured by a portable X-ray fluorescence analyser (pXRF) in situ (FIELD) and in the laboratory (LABORATORY). Subsequently, regression equations were developed for individual elements through the method of construction of the regression model, which compare the results of pXRF with classical laboratory analysis (ICP-OES). The accuracy of the measurement, expressed by the coefficient of determination (R2), was as follows in the case of FIELD–ICP-OES: Pb (0.96), Zn (0.92), As (0.72), Mn (0.63), Cu (0.31) and Ni (0.01). In the case of LABORATORY–ICP-OES, the coefficients had values: Pb (0.99), Zn (0.98), Cu and Mn (0.89), As (0.88), Ni (0.81). A higher dependence of the relationship was recorded between LABORATORY–ICP-OES than between FIELD–ICP-OES. An excellent relationship was recorded for the elements Pb and Zn, both for FIELD and LABORATORY (R2 higher than 0.90). The elements Cu, Mn and As have a worse tightness in the relationship; however, the results of the model have shown its applicability for common use, e.g., in agricultural practice or in monitoring the quality of the environment. Based on our results, we can say that pXRF instruments can provide highly accurate results for the concentration of risk elements in the soil in real time for some elements and meet the principle of precision agriculture: an efficient, accurate and fast method of analysis.

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