Cross-Sectional TEM Study Of Phase Separation In Reaction Of Ni-Ta Films With GaAs
Keyword(s):
X Ray
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ABSTRACTThe reaction between Ni60Ta40 amorphous alloy and (001) GaAs was studied by cross-sectional transmission electron microscopy, Auger spectroscopy, and x-ray diffraction. At 400°C formation of Ni GaAs at the interface with GaAs was observed. After heat treatment at 600°C in vacuum a layered structure of TaAs/NiGa/GaAs has been formed. The NiGa layer has epitaxial relations to the GaAs substrate. The vertical phase separation can be explained by opposite diffusion directions of nickel and arsenic atoms.
2019 ◽
Vol 61
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pp. 1707-1715
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1990 ◽
Vol 5
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pp. 746-753
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2007 ◽
Vol 25
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pp. 1128-1132
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1982 ◽
Vol 40
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pp. 722-723
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