Properties of Image Sensor Structure Obtained Below 120°C On The Foil By Reactive Magnetron Sputtering

1999 ◽  
Vol 558 ◽  
Author(s):  
A. Kolodziej ◽  
P. Krewniak ◽  
R. Tadeusiewicz
Keyword(s):  
Mechanical Characteristics ◽  
Thermal Control ◽  
Image Sensor ◽  
Pin Diode ◽  
Light Weight ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Sensor Structure ◽  
Polyimide Foil

ABSTRACTPolyimide substrates are of interest because of their thermal stability, light weight, and good mechanical characteristics. This paper reports thermal control multilayer deposition experiments which have strongly affected the properties of the image sensor structure (TFT + photodiode). Particularly TFT properties have been studied with respect to difficulties of obtaining of good quality a-SiNx:H films at temperature below 120°C. We characterize the structural properties using infrared absorption, refractive index measurements, small angle x-ray diffraction and the optoelectrical measurements of the TFT and PIN diode structure. The linear image sensor consisting of two rows, 40 pixels per row, with dimensions 0.6 mm2was made on the polyimide foil.

Influence of Nanocrystallinity on Properties of Photodiode and TFT Image Sensor Structure

1996 ◽  
Vol 452 ◽  
Author(s):  
A. Kolodziej ◽  
S. Nowak ◽  
P. Krewniak
Keyword(s):  
Deposition Process ◽  
Image Sensor ◽  
Pin Diode ◽  
High Deposition Rate ◽  
Laser Crystallization ◽  
X Ray Diffraction ◽  
Magnetron Deposition ◽  
X Ray ◽  
Transmission Electron ◽  
Sensor Structure

AbstractThis paper reports technological experiments which have strongly affected the properties of the multilayer image sensor structure. The high deposition rate and large hydrogen content during the reactive magnetron deposition process causes nanocrystallization of prepared silicon films. We also report experiments with laser crystallization. The effect of microstructure in a-Si:H films on TFT and pin diode characteristics has been investigated. Crystallinity was confirmed by Raman scattering, small angle X-ray diffraction (SAXD) and transmission electron microscopy (TEM). The parameters of the photodiodes such as quantum efficiency, dark and light currents, etc. have been tested using the measurements of samples in the configuration of a linear image sensor consisting of two rows, 30 to 160 pixels per row, with dimensions 0.1mm2-1mm2.

Superconductivity of Dc Reactive Magnetron Sputtered Epitaxial TiN/NbN Superlattices

1992 ◽  
Vol 275 ◽  
Author(s):  
M. Shinn ◽  
B. -S. Hong ◽  
S. A. Barnett
Keyword(s):  
Magnetic Field ◽  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Film Surface ◽  
Wavelength Dependence ◽  
Reactive Magnetron ◽  
Superconducting Transition ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron

ABSTRACTEpitaxial B1-structure TiN/NbN superlattices have been grown by reactive magnetron sputtering On MgO(001). X-ray diffraction and transmission electron microscopy (TEM) diffraction spectra exhibited up to nine orders of superlattice reflections, indicating that the superlattice interfaces were relatively sharp. TEM images also showed well-defined layers. The superlattice wavelength (∧) dependence of the superconducting transition temperature (Tc), critical Current density (Jc), and electrical resistivity (ρ) have been investigated. Tc values increased from 12 K to 17 K with increasing ∧. Jc in a magnetic field perpendicular to the film surface ranged from 104 to 106 A/cm2, increasing with increasing wavelength and decreasing with increasing applied magnetic field. Jc in a field parallel to the film surface was > 10 times higher, ≈ 107 A/cm2. The resistivity exhibited different ∧ dependencies in three different A ranges.

Properties of Nanosized Tin Oxide Thin Film Prepared by Reactive Magnetron Sputtering

2007 ◽  
Author(s):  
Xiao Di Liu ◽  
Dacheng Zhang
Keyword(s):  
Magnetron Sputtering ◽  
Quartz Glass ◽  
Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Different Temperatures

Nanosized tin oxide thin films were fabricated on silicon and quartz glass substrates by direct current reactive magnetron sputtering method, and then were calcined at different temperatures ranging from 400°C to 900°C. The results analyzed by X ray photoemission spectra (XPS), scanning electron microscope (SEM), Spectroscopic ellipsometer, Powder X-ray diffraction (XRD), and HP4145B semiconductor parameter analyzer measurements show that the sample with quartz glass substrate and calcinated at 650°C possesses better properties and suitable to be used in our gas sensor.

Growth Kinetics and Mechanical Characterization of a Hard Boron Coating on a Tool Steel

2017 ◽  
Vol 380 ◽  
pp. 29-34 ◽  
Author(s):  
D. Sánchez Huerta ◽  
N. López Perrusquia ◽  
I. Hilerio Cruz ◽  
M.A. Doñu Ruiz ◽  
E.D. García Bustos ◽  
...  
Keyword(s):  
Activation Energy ◽  
Mechanical Characteristics ◽  
Mechanical Characterization ◽  
Chemical Elements ◽  
Thermochemical Treatment ◽  
X Ray Diffraction ◽  
X Ray ◽  
Optimal Classification

The mechanical characteristics are determined to a FeB/Fe2B coating applied in AISI L6 steel tool and blades make to cut paper. The thermochemical treatment was applied at temperatures of 1173, 1223 and 1273 K with permanence time of 0.5, 2 and 3 h for each temperature. The diffusion coefficient and activation energy for each phase is obtained for this boron coating on an AISI L6 steel. HRC test were made to establish the type of adherence (qualitative) and comparing with the VDI 3198 standard and the results were obtaining optimal classification of HF1-HF2 in condition for 3h of the three temperatures. The result by nanoidentation show hardness of 1000 - 2000 HV as well as the Young's modulus for each present phase of the coating. Through micrographs (SEM) are showing thicknesses up to 79.52 ± 18.82 μm for FeB and 97.80 ± 20.01μm for Fe2B, a morphology sawn ́s type is evidence. Through EDS and x-ray diffraction are used to show the chemical elements formed.

Pressureless Melt Infiltrated Non-Oxide Ceramic-Metal Composites

2008 ◽  
Vol 403 ◽  
pp. 251-252
Author(s):  
A. Kalemtas ◽  
Gürsoy Arslan ◽  
Ferhat Kara
Keyword(s):  
Oxide Ceramic ◽  
Light Weight ◽  
X Ray Diffraction ◽  
Infiltration Process ◽  
Metal Composites ◽  
X Ray ◽  
Melt Infiltration ◽  
In Situ Reactions ◽  
B4c Powder

In the present study highly dense (open porosity < 1 %), light-weight (d £ 2.85 g/cm3) and Al4C3-free non-oxide ceramic-metal composites were produced at comparatively low temperatures ( 1250°C) by pressurless melt infiltration. Phase analysis of the SiC-B4C-Al composites revealed that a significant amount of hygroscopic Al4SiC4 and Al4C3 phases were formed. Si3N4 powder was added in different amounts to the SiC-B4C powder batches to suppress formation of these phases via in-situ reactions during the infiltration process. X-ray diffraction results of the SiC-B4C-Si3N4-Al composites confirmed that the incorporation of Si3N4 to the SiC-B4C system reduced or eliminated the formation of the hygroscopic phases and resulted in in-situ formation of AlN, SiC and Si phases in the composite.

Study of Fe-Ni(Cr) Alloy and Nano-Al2O3 Particles Composite Coating Prepared by Laser Cladding

2006 ◽  
Vol 118 ◽  
pp. 585-590 ◽  
Author(s):  
Yeo Jian Hua ◽  
Zhang Wei ◽  
Gao Ming Xia ◽  
Zhang Qun Li
Keyword(s):  
Composite Coating ◽  
Laser Cladding ◽  
Mechanical Characteristics ◽  
Dendritic Structure ◽  
Processing System ◽  
Wear Property ◽  
Chromium Alloy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Iron Nickel

The experiments of laser cladding Ni-coated nano-Al2O3 powder were made on 2Cr13 stainless steel using 7kW CO2 laser processing system. The microstructure and mechanical characteristics of composite coating were tested by scanning electronic microscope (SEM), X-ray diffraction (XRD), energy dispersion analyzer of X-ray (EDAX) and microhardness tester. The results showed that the composite coating was composed of superfine cellular dendritic structure. The X-ray diffraction data revealed that the cellular grains were composed of nano-Al2O3 particles, iron nickel alloy and iron chromium alloy. The mechanical characteristics of composite coating greatly increased. Compared with parent metal, the average hardness of composite coating increased by 1 time, and its wear property increased by 1.25 times.

Study on Oxidation Resistance of Ti1-xAlxN Coating

2012 ◽  
Vol 534 ◽  
pp. 97-100
Author(s):  
C.L. Zhong ◽  
P.A. Wei ◽  
L.E. Luo
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Oxidation Resistance ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Al Content ◽  
Compound Coating ◽  
Cubic Structure ◽  
Scanning Electron

A series of Ti1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and surface morphology of the coatings were characterized by energy dispersive spectroscopy (EDS), X-ray diffraction (XRD) and scanning electron microscopy (SEM). The effect of Al content on the microstructure and the oxidation resistance was studied. It was found that Ti1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations. The oxidation resistance obviously improves with the increase of Al content.

Investigation on AZO Films Deposited by Radio-Frequency Reactive Magnetron Sputtering

2013 ◽  
Vol 320 ◽  
pp. 35-39
Author(s):  
Cheng Long Kang ◽  
Jin Xiang Deng ◽  
Min Cui ◽  
Chao Man ◽  
Le Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Rf Magnetron Sputtering ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Doped Zno ◽  
Scanning Electron

The Al2O3-doped ZnO(AZO) films were deposited on the glasses by means of RF magnetron sputtering technology. The films were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and Profile-system respectively. The effect of substrate temperature on the structure of the AZO films is investigated.As a result, the properties of the AZO thin films are remarkably influenced by the substrate temperature , especially in the range of 200°C to 500 °C. The film prepared at the substrate temperature of 400°C possesses the best crystalline.

Effect of Preparation on Standard Dry Density and Strength of Foamed Cement by Orthogonal Test

2014 ◽  
Vol 577 ◽  
pp. 1119-1122
Author(s):  
Na Li ◽  
Qi Wang ◽  
Peng Song
Keyword(s):  
Electron Microscopy ◽  
Thermal Conductivity ◽  
High Strength ◽  
Xrd Analysis ◽  
Orthogonal Test ◽  
Dry Density ◽  
Light Weight ◽  
X Ray Diffraction ◽  
X Ray ◽  
Scanning Electron

In this paper, we studied the effect of preparation on standard dry density and strength of foamed cement by orthogonal test. The results indicate that the more excellent combination is A1B1C1, namely G1, the standard dry density is 376 kg/m3, the flexural and compressive strengths are 0.43 MPa and 0.8 MPa respectively, and the thermal conductivity is 0.074 W/(m·K), which conforms to the characteristics of light weight and high strength. Fewer Ca (OH)2 crystals and more C-S-H gel generated in G1 through scanning electron microscopy (SEM) and X-ray diffraction (XRD) analysis is the reason for its high strength.

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