Mechanical Properties of Ion-Implanted Thin Films and Interfaces

1981 ◽  
Vol 7 ◽  
Author(s):  
G. L. Miller ◽  
M. Soni ◽  
M. McDonald ◽  
E. N. Kaufmann ◽  
R. L. Fenstermacher
Keyword(s):  
Mechanical Properties ◽  
Ion Implantation ◽  
Ion Beam ◽  
Small Samples ◽  
Ion Beam Modification ◽  
In Situ Investigation ◽  
Metal Support ◽  
Annealing Effects ◽  
Areas Of Interest ◽  
Aluminum Substrates

ABSTRACTOne of the areas of interest in the ion-beam modification of materials is that of alteration of specifically mechanical properties. To this end a method has been developed allowing in situ investigation of the stress, Young's modulus and mechanical hysteresis of small samples during and following ion-implantation. The samples are typically in the form of ~ 2 mm ⨉ 2 mm squares a few thousand angstroms thick, deposited on a ~ 50µ thick metal support, and forming a mechanical marginal oscillator. The measurement is carried out by flexing the samples at ~ 500 Hz under a servo-stabilized sinusoidal strain with a peak value in the range 0 to ~ 10−3. The accuracy of the method is typically ~ 1% or better for the measured quantities.Results are presented showing strain dependent (nonlinear) mechanical effects, thermal annealing effects, ion implantation of boron into copper and ion-beam mixing of copper films on aluminum substrates.

scholarly journals Synergistic Effects Under Ion-Beam Modification of Metals

2021 ◽  
Vol 248 ◽  
pp. 04006
Author(s):  
Anatoly Borisov ◽  
Boris Krit ◽  
Igor Suminov ◽  
Mikhail Ovchinnikov ◽  
Sergey Tikhonov
Keyword(s):  
Mechanical Properties ◽  
Ion Implantation ◽  
Synergistic Effects ◽  
Ion Beam ◽  
Physical And Mechanical Properties ◽  
Ion Source ◽  
Laser Beams ◽  
Vacuum Arc ◽  
Thermal Hardening ◽  
Ion Beam Modification

The combined effect of ion and laser beams on physical and mechanical properties of metal and alloy surfaces has been studied. The technique of determining the main parameters of polyenergetic ion implantation using a vacuum-arc ion source is proposed and evaluated. It is found that treatment with titanium ions and the subsequent laser thermal hardening increase microhardness of steel 45 and U8 up to 6 times.

Ion Implantation and Annealing Effects in Silicon Carbide

1996 ◽  
Vol 438 ◽  
Author(s):  
V. Heera ◽  
W. Skorupa
Keyword(s):  
Silicon Carbide ◽  
High Temperature ◽  
Ion Implantation ◽  
High Power ◽  
High Frequency ◽  
Ion Beam ◽  
Surface Erosion ◽  
Annealing Effects ◽  
Ion Ranges ◽  
Induced Crystallization

AbstractSiC is a promising semiconductor material for high-power/high-frequency and hightemperature electronic applications. For selective doping of SiC ion implantation is the only possible process. However, relatively little is known about ion implantation and annealing effects in SiC. Compared to ion implantation into Si there is a number of specific features which have to be considered for successful ion beam processing of SiC. A brief review is given on some aspects of ion implantation in and annealing of SiC. The ion implantation effects in SiC are discussed in direct comparison to Si. The following issues are addressed: ion ranges, radiation damage, amorphization, high temperature implantation, ion beim induced crystallization and surface erosion.

Recent Advances in The Application of Focused Ion Beams

1985 ◽  
Vol 45 ◽  
Author(s):  
Kenji Gamo ◽  
Susumu Namba
Keyword(s):  
Ion Implantation ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beams ◽  
Focused Ion Beams ◽  
Ion Beam Modification ◽  
Chemical Effects ◽  
Recent Advances ◽  
Maskless Patterning

Recent advances of focused ion beam systems and their applications are presented. The applications include maskless ion implantation and various maskless patterning techniques which make use of ion induced chemical effects. These are ion beam assisted etching, deposition and ion beam modification techniques and are promising to improve patterning speed and extend applications of focused ion beams.

Conducting Polymer Films by Ion Implantation

1989 ◽  
Vol 154 ◽  
Author(s):  
P.H. Lu ◽  
R.A. Moody ◽  
I.H. Loh
Keyword(s):  
Ion Implantation ◽  
Photoelectron Spectroscopy ◽  
Structural Changes ◽  
Ion Beam ◽  
Beam Current ◽  
Beam Current Density ◽  
Electrically Conductive ◽  
Energy Beam ◽  
Ion Beam Modification ◽  
Spin Resonance

AbstractInsulating polymeric sheets were made electrically conductive by ion implantation. The effects of implantation parameters, such as ion species, dose, energy, beam current density, and substrate temperature, on the resultant sheet resistivities were investigated. Surface structural changes of implanted polymers were evaluated by X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectroscopy (RBS), and Fourier transform infared spectroscopy (FTIR). Electron spin resonance (ESR) and temperature dependent resistivity measurements were performed to explore the conduction mechanisms of implanted polymers. The results indicate that ion beam modification of polymers proceeds via a similar mechanism as high temperature pyrolysis. The resultant carbon-enriched materials which can be described by the conducting grain model.

Ion Beam Modification of Carbon Materials

2005 ◽  
Vol 107 ◽  
pp. 107-110
Author(s):  
Masaya Iwaki
Keyword(s):  
Electrical Conductivity ◽  
Wear Resistance ◽  
Cell Adhesion ◽  
Ion Implantation ◽  
Electrochemical Properties ◽  
Surface Properties ◽  
Carbon Materials ◽  
Ion Beam ◽  
Ion Beam Modification ◽  
Ion Species

A study has been made of surface properties of carbon materials modified by ion beams. Substrates used were natural diamonds, glass-like carbon plates and polymer sheets. Ion species were chemically-active elements such as C, N and O, inert gas elements such as He, Ne and Ar, and metallic elements such as Cr and Ti. It was found that diamond becomes electrically conductive in ion implanted layers, which are amorphous or graphite-like structures. Electrical conductivity depends on implanted species, doses and target temperatures. It was found that glass-like carbon consisting of graphite and disordered graphite becomes amorphous due to ion beam bombardment. Amorphization causes the wear resistance to improve. The electrochemical properties changes depending on implanted species. The wear resistance and electrochemical properties depended on the target temperature during ion implantation. Ion beam bombardment to polymers has been carried out to control the electrical conductivity, cell adhesion and bio-compatibility. The electrical conductivity of polyimide films increases as the dose increases. The saturated sheet resistivity of implanted layers depends on ion species, dose and dose rate. It was found that the cell adhesion can be controlled by ion beam bombardment. The results were used in the fields of clinical examinations. In summary, ion beam bombardment to carbon materials is useful to control the carbon structures and surface properties depending on ion implantation conditions.

Nanomechanical properties of energetically treated polyethylene surfaces

2002 ◽  
Vol 17 (2) ◽  
pp. 423-430 ◽  
Author(s):  
C. Klapperich ◽  
L. Pruitt ◽  
K. Komvopoulos
Keyword(s):  
Mechanical Properties ◽  
Low Temperature ◽  
Ion Implantation ◽  
Ion Beam ◽  
Plasma Modification ◽  
High Dose ◽  
Oxygen Ion ◽  
Ion Beam Treatment ◽  
Argon Ion ◽  
Oxygen Ion Implantation

The effects of energetic treatments, crosslinking, and plasma modification on the surface mechanical properties and deformation behavior of ultrahigh molecular weight polyethylene (UHMWPE) were examined in light of nanoindentation experiments performed with a surface force microscope. Samples of UHMWPE were subjected to relatively high-dose gamma irradiation, oxygen ion implantation, and argon ion beam treatment. A range of crosslinking was achieved by varying the radiation dose. In addition, low-temperature plasma treatment with hexamethyldisiloxane/O2 and C3F6 was investigated for comparison. The surface mechanical properties of the treated UHMWPE samples are compared with those of untreated UHMWPE samples used as controls. Surface adhesion measurements obtained from the nanoindentation material responses are also discussed in terms of important treatment parameters. Results demonstrate that high-dose oxygen ion implantation, argon ion beam treatment, and low-temperature C3F6 plasma modification are effective treatments for enhancing the surface mechanical properties of UHMWPE.

Condition Monitoring of High Temperature Components With Sub-Sized Samples

2008 ◽  
Author(s):  
Wolfgang Hoffelner ◽  
Manuel Pouchon ◽  
Maria Samaras ◽  
Annick Froideval ◽  
Jiachao Chen
Keyword(s):  
Mechanical Properties ◽  
Condition Monitoring ◽  
Focused Ion Beam ◽  
Residual Life ◽  
Ion Beam ◽  
Oxide Dispersion Strengthened ◽  
Dislocation Dynamics ◽  
Thin Strip ◽  
Small Samples ◽  
Term Operation

Advanced nuclear plants are designed for long-term operation in quite demanding environments. Limited operation experience with the materials used in such plants necessitate a reliable assessment of damage and residual life of components. Non-destructive condition monitoring of damage is difficult, if not impossible for many materials. Periodic investigation of small samples taken from well defined locations in the plant could provide an attractive tool for damage assessments. This paper will discuss possibilities of using very small samples taken from plant locations for complementary condition monitoring. Techniques such as micro/nano-indentation, micropillar compression, micro bending, small punch and thin strip testing can be used for the determination of local mechanical properties. Advanced preparation techniques such as focused ion beam (FIB) allow the preparation of samples from these small volumes for micro-structural analyses with transmission electron microscope (TEM) and advanced X-ray synchrotron techniques. Modeling techniques (e.g. dislocation dynamics DD) can provide a quantitative link between microstructure and mechanical properties. Using examples from ferritic oxide dispersion strengthened materials the DD approach is highlighted to understand component life assessments.

Sign in / Sign up

Export Citation Format

Share Document